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Journal Articles

Nb-doped TiO2 coatings developed by high power impulse magnetron sputtering-chemical vapor deposition hybrid deposition process

Justyna Kulczyk-Malecka, David Donaghy, Brice Delfour-Peyrethon, Matthew Werner, Paul R. Chalker, James W. Bradley, Peter J. Kelly
Journal: Journal of Vacuum Science & Technology A
J. Vac. Sci. Technol. A 38, 033410 (2020)
https://doi.org/10.1116/6.0000118
Published: April 2020
View article titled, Nb-doped TiO<sub>2</sub> coatings developed by high power impulse magnetron sputtering-chemical vapor deposition hybrid deposition process
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Journal Articles

Effect of the plasma confinement on properties of a-C:H:SiOx films grown by plasma enhanced chemical vapor deposition

Alexander S. Grenadyorov, Аndrey А. Solovyev, Konstantin V. Oskomov, Vladimir O. Oskirko
Journal: Journal of Vacuum Science & Technology A
J. Vac. Sci. Technol. A 37, 061512 (2019)
https://doi.org/10.1116/1.5118852
Published: November 2019
View article titled, Effect of the plasma confinement on properties of a-C:H:SiO<sub>x</sub> films grown by plasma enhanced chemical vapor deposition
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Journal Articles

Lithium phosphorous oxynitride films synthesized by a plasma-assisted directed vapor deposition approach

Yoon Gu Kim, H. N. G. Wadley
Journal: Journal of Vacuum Science & Technology A
J. Vac. Sci. Technol. A 26, 174–183 (2008)
https://doi.org/10.1116/1.2823491
Published: January 2008
View article titled, Lithium phosphorous oxynitride films synthesized by a plasma-assisted directed vapor deposition approach
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Journal Articles

Design and test of a magnetic shield for turbomolecular pumps

M. De Angeli, G. Gervasini, G. Gittini
Journal: Journal of Vacuum Science & Technology A
J. Vac. Sci. Technol. A 25, 1475–1479 (2007)
https://doi.org/10.1116/1.2771556
Published: August 2007
View article titled, Design and test of a magnetic shield for turbomolecular pumps
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Journal Articles

Removal of carbon deposits in narrow gaps by oxygen plasmas at low pressure

J. A. Ferreira, F. L. Tabarés, D. Tafalla
Journal: Journal of Vacuum Science & Technology A
J. Vac. Sci. Technol. A 25, 746–750 (2007)
https://doi.org/10.1116/1.2746046
Published: June 2007
View article titled, Removal of carbon deposits in narrow gaps by oxygen plasmas at low pressure
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Journal Articles

Design and test of magnetic shields for quadrupole mass spectrometers

G. Gervasini, M. De Angeli, G. Gittini
Journal: Journal of Vacuum Science & Technology A
J. Vac. Sci. Technol. A 25, 269–274 (2007)
https://doi.org/10.1116/1.2464121
Published: February 2007
View article titled, Design and test of magnetic shields for quadrupole mass spectrometers
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Journal Articles

Quantitative detection of tiny amounts of helium isotopes in a hydrogen isotope atmosphere using a standard-resolution quadrupole mass spectrometer

A. Frattolillo, A. De Ninno, A. Rizzo
Journal: Journal of Vacuum Science & Technology A
J. Vac. Sci. Technol. A 25, 75–89 (2007)
https://doi.org/10.1116/1.2395948
Published: January 2007
View article titled, Quantitative detection of tiny amounts of helium isotopes in a hydrogen isotope atmosphere using a standard-resolution quadrupole mass spectrometer
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Journal Articles

High-power pulsed sputtering using a magnetron with enhanced plasma confinement

Jaroslav Vlček, Pavel Kudláček, Kristýna Burcalová, Jindřich Musil
Journal: Journal of Vacuum Science & Technology A
J. Vac. Sci. Technol. A 25, 42–47 (2007)
https://doi.org/10.1116/1.2388954
Published: December 2006
View article titled, High-power pulsed sputtering using a magnetron with enhanced plasma confinement
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Journal Articles

Low-energy sputtering yields of tungsten and tantalum

R. P. Doerner
Journal: Journal of Vacuum Science & Technology A
J. Vac. Sci. Technol. A 23, 1545–1547 (2005)
https://doi.org/10.1116/1.2110385
Published: October 2005
View article titled, Low-energy sputtering yields of tungsten and tantalum
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Journal Articles

Hot hollow cathode diffuse arc deposition of chromium nitride films

H. Baránková, L. Bárdoš, L.-E. Gustavsson
Journal: Journal of Vacuum Science & Technology A
J. Vac. Sci. Technol. A 23, 959–963 (2005)
https://doi.org/10.1116/1.1914813
Published: June 2005
View article titled, Hot hollow cathode diffuse arc deposition of chromium nitride films
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Journal Articles

Development of ultrahigh and extreme high vacuum technology for physics research

H. F. Dylla
Journal: Journal of Vacuum Science & Technology A
J. Vac. Sci. Technol. A 21, S25–S33 (2003)
https://doi.org/10.1116/1.1599891
Published: September 2003
View article titled, Development of ultrahigh and extreme high vacuum technology for physics research
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Journal Articles

Simulation of hydrogen outgassing in ultrahigh vacuum chamber and fusion device by recombination limited model

K. Akaishi, M. Nakasuga, Y. Funato
Journal: Journal of Vacuum Science & Technology A
J. Vac. Sci. Technol. A 20, 848–856 (2002)
https://doi.org/10.1116/1.1471354
Published: May 2002
View article titled, Simulation of hydrogen outgassing in ultrahigh vacuum chamber and fusion device by recombination limited model
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Journal Articles

Ultrahigh-rate plasma jet chemical etching of silicon

Th. Arnold, G. Boehm, A. Schindler
Journal: Journal of Vacuum Science & Technology A
J. Vac. Sci. Technol. A 19, 2586–2589 (2001)
https://doi.org/10.1116/1.1395621
Published: September 2001
View article titled, Ultrahigh-rate plasma jet chemical etching of silicon
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Journal Articles

Radio frequency siliconization: An approach to the coating for the future large superconducting fusion devices

J. Li, Y. P. Zhao, B. N. Wan, X. Z. Gong, M. Zhen, X. M. Gu, X. D. Zhang, J. R. Luo, Y. X. Wan, J. K. Xie, C. F. Li, J. L. Chen, HT-7 Team, K. Toi, N. Noda, T. Watari
Journal: Journal of Vacuum Science & Technology A
J. Vac. Sci. Technol. A 19, 2149–2154 (2001)
https://doi.org/10.1116/1.1376712
Published: September 2001
View article titled, Radio frequency siliconization: An approach to the coating for the future large superconducting fusion devices
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Journal Articles

Plasma enhanced direct current planar magnetron sputtering technique employing a twinned microwave electron cyclotron resonance plasma source

Xu Jun, Deng Xinlu, Yu Shiji, Lu Wenqi, Ma Tengcai
Journal: Journal of Vacuum Science & Technology A
J. Vac. Sci. Technol. A 19, 425–428 (2001)
https://doi.org/10.1116/1.1340654
Published: March 2001
View article titled, Plasma enhanced direct current planar magnetron sputtering technique employing a twinned microwave electron cyclotron resonance plasma source
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Journal Articles

Improvement on lithography pattern profile by plasma treatment

C. P. Soo, A. J. Bourdillon, S. Valiyaveettil, A. Huan, A. Wee, M. H. Fan, T. C. Ang, L. H. Chan
Journal: Journal of Vacuum Science & Technology A
J. Vac. Sci. Technol. A 17, 1526–1530 (1999)
https://doi.org/10.1116/1.582101
Published: July 1999
View article titled, Improvement on lithography pattern profile by plasma treatment
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Journal Articles

Optical properties of low-density foams considered as targets for inertial confinement fusion

O. J. Glembocki, M. L. Rebbert, S. M. Prokes, J. D. Sethian, C. R. K. Marrian, L. Y. Chan
Journal: Journal of Vacuum Science & Technology A
J. Vac. Sci. Technol. A 16, 50–56 (1998)
https://doi.org/10.1116/1.581010
Published: January 1998
View article titled, Optical properties of low-density foams considered as targets for inertial confinement fusion
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Journal Articles

Characterization of wall conditions in DIII-D

K. L. Holtrop, G. L. Jackson, A. G. Kellman, R. L. Lee, W. P. West, R. D. Wood, D. G. Whyte
Journal: Journal of Vacuum Science & Technology A
J. Vac. Sci. Technol. A 15, 678–682 (1997)
https://doi.org/10.1116/1.580800
Published: May 1997
View article titled, Characterization of wall conditions in DIII-D
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Journal Articles

Tritium permeation and inventory in an international thermonuclear experimental reactor divertor

W. M. Shu, K. Watanabe
Journal: Journal of Vacuum Science & Technology A
J. Vac. Sci. Technol. A 15, 169–175 (1997)
https://doi.org/10.1116/1.580459
Published: January 1997
View article titled, Tritium permeation and inventory in an international thermonuclear experimental reactor divertor
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Journal Articles

Measurements of tritium retention and removal on the Tokamak Fusion Test Reactor

C. H. Skinner, W. Blanchard, J. Kamperschroer, P. LaMarche, D. Mueller, A. Nagy, S. Scott, G. Ascione, E. Amarescu, R. Camp, M. Casey, J. Collins, M. Cropper, C. Gentile, M. Gibson, J. Hosea, M. Kalish, J. Langford, S. Langish, R. Mika, D. K. Owens, G. Pearson, S. Raftopoulos, R. Raucci, T. Stevenson, A. Von Halle, D. Voorhees, T. Walters, J. Winston
Journal: Journal of Vacuum Science & Technology A
J. Vac. Sci. Technol. A 14, 3267–3274 (1996)
https://doi.org/10.1116/1.580224
Published: November 1996
View article titled, Measurements of tritium retention and removal on the Tokamak Fusion Test Reactor
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