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Journal Articles
Vincenzo Palmieri, Oscar Azzolini, Edoardo Bemporad, Daniele De Felicis, Richard R. Johnson, Marco Renzelli, Hanna Skliarova
J. Vac. Sci. Technol. A 37, 051510 (2019)
Published: August 2019
Journal Articles
J. Vac. Sci. Technol. A 37, 021501 (2019)
Published: January 2019
Includes: Supplementary data
Journal Articles
J. Vac. Sci. Technol. A 36, 031304 (2018)
Published: April 2018
Journal Articles
J. Vac. Sci. Technol. A 35, 061602 (2017)
Published: August 2017
Journal Articles
J. Vac. Sci. Technol. A 35, 021605 (2017)
Published: January 2017
Journal Articles
J. Vac. Sci. Technol. A 32, 061511 (2014)
Published: October 2014
Journal Articles
Effects of outgassing of loader chamber walls on hydriding of thin films for commercial applications
J. Vac. Sci. Technol. A 32, 041603 (2014)
Published: June 2014
Journal Articles
J. Vac. Sci. Technol. A 30, 041601 (2012)
Published: June 2012
Journal Articles
J. Vac. Sci. Technol. A 29, 041601 (2011)
Published: May 2011
Journal Articles
J. Vac. Sci. Technol. A 28, 652–657 (2010)
Published: June 2010
Journal Articles
J. Vac. Sci. Technol. A 28, 578–582 (2010)
Published: June 2010
Journal Articles
J. Vac. Sci. Technol. A 26, 321–327 (2008)
Published: March 2008
Journal Articles
J. Vac. Sci. Technol. A 25, 1309–1311 (2007)
Published: July 2007
Journal Articles
J. Vac. Sci. Technol. A 25, 1156–1160 (2007)
Published: July 2007
Journal Articles
J. Vac. Sci. Technol. A 25, 575–586 (2007)
Published: April 2007
Journal Articles
J. Vac. Sci. Technol. A 25, 480–484 (2007)
Published: April 2007
Journal Articles
J. Vac. Sci. Technol. A 25, 75–89 (2007)
Published: January 2007
Journal Articles
J. Vac. Sci. Technol. A 23, 725–726 (2005)
Published: June 2005
Journal Articles
J. Vac. Sci. Technol. A 20, 1450–1457 (2002)
Published: June 2002
Journal Articles
J. Vac. Sci. Technol. A 20, 138–145 (2002)
Published: January 2002
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