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Journal Articles

Cathodoluminescence spectroscopy and Kelvin probe work function correlation of native point defect distributions with piezoelectric voltage in strained ZnO microwires

Kamila Thompson, Kalpak Duddella, Micah S. Haseman, Leonard J. Brillson

J. Vac. Sci. Technol. A 43, 043209 (2025)

https://doi.org/10.1116/6.0004416

Published: July 2025

View articletitled, Cathodoluminescence spectroscopy and Kelvin probe work function correlation of native point defect distributions with piezoelectric voltage in strained ZnO microwires

Journal Articles

Wafer-level uniformity of atomic-layer-deposited niobium nitride thin films for quantum devices

Emanuel Knehr, Mario Ziegler, Sven Linzen, Konstantin Ilin, Patrick Schanz, Jonathan Plentz, Marco Diegel, Heidemarie Schmidt, Evgeni Il’ichev, Michael Siegel

J. Vac. Sci. Technol. A 39, 052401 (2021)

https://doi.org/10.1116/6.0001126

Published: July 2021

View articletitled, Wafer-level uniformity of atomic-layer-deposited niobium nitride thin films for quantum devices

Journal Articles

Self-assembled nanocolumns in Bi₂Se₃ grown by molecular beam epitaxy

Theresa P. Ginley, Stephanie Law

J. Vac. Sci. Technol. A 39, 033401 (2021)

https://doi.org/10.1116/6.0000831

Published: March 2021

View articletitled, Self-assembled nanocolumns in Bi2Se3 grown by molecular beam epitaxy

Journal Articles

Thermal atomic layer etching of germanium-rich SiGe using an oxidation and “conversion-etch” mechanism

Aziz I. Abdulagatov, Varun Sharma, Jessica A. Murdzek, Andrew S. Cavanagh, Steven M. George

J. Vac. Sci. Technol. A 39, 022602 (2021)

https://doi.org/10.1116/6.0000834

Published: February 2021

View articletitled, Thermal atomic layer etching of germanium-rich SiGe using an oxidation and “conversion-etch” mechanism

Journal Articles

Electron conducting Ag₂Te nanowire/polymer thermoelectric thin films

Tabitha Sutch, Jared M. Allred, Greg Szulczewski

J. Vac. Sci. Technol. A 39, 023401 (2021)

https://doi.org/10.1116/6.0000690

Published: January 2021

View articletitled, Electron conducting Ag2Te nanowire/polymer thermoelectric thin films

Includes: Supplementary data

Journal Articles

Cyclic approach for silicon nitride spacer etching in fin field-effect transistors and stacked nanowire devices

Olivier Pollet, Vincent Ah-Leung, Sebastien Barnola, Nicolas Posseme

J. Vac. Sci. Technol. A 38, 063007 (2020)

https://doi.org/10.1116/6.0000584

Published: November 2020

View articletitled, Cyclic approach for silicon nitride spacer etching in fin field-effect transistors and stacked nanowire devices

Journal Articles

First-principles study of phonon thermal transport in II–VI group graphenelike materials

Jianye Liu, Yinchang Zhao, Weiqiang Wang, Qi Zhong, Zhenhong Dai, Sheng Meng

J. Vac. Sci. Technol. A 38, 062202 (2020)

https://doi.org/10.1116/6.0000376

Published: October 2020

View articletitled, First-principles study of phonon thermal transport in II–VI group graphenelike materials

Journal Articles

Beyond point of care diagnostics: Low-dimensional nanomaterials for electronic virus sensing

C. Muratore, M. K. Muratore

J. Vac. Sci. Technol. A 38, 050804 (2020)

https://doi.org/10.1116/6.0000368

Published: August 2020

View articletitled, Beyond point of care diagnostics: Low-dimensional nanomaterials for electronic virus sensing

Journal Articles

Epitaxial metals for interconnects beyond Cu

Katayun Barmak, Sameer Ezzat, Ryan Gusley, Atharv Jog, Sit Kerdsongpanya, Asim Khaniya, Erik Milosevic, William Richardson, Kadir Sentosun, Amirali Zangiabadi, Daniel Gall, William E. Kaden, Eduardo R. Mucciolo, Patrick K. Schelling, Alan C. West, Kevin R. Coffey

J. Vac. Sci. Technol. A 38, 033406 (2020)

https://doi.org/10.1116/6.0000018

Published: April 2020

View articletitled, Epitaxial metals for interconnects beyond Cu

Journal Articles

New development of nanoscale spectroscopy using scanning probe microscope

Khant Minn, Blake Birmingham, Zhenrong Zhang

J. Vac. Sci. Technol. A 38, 030801 (2020)

https://doi.org/10.1116/1.5142029

Published: April 2020

View articletitled, New development of nanoscale spectroscopy using scanning probe microscope

Journal Articles

Isotropic dry etching of Si selectively to Si_0.7Ge_0.3 for CMOS sub-10 nm applications

Sana Rachidi, Alain Campo, Virginie Loup, Christian Vizioz, Jean-Michel Hartmann, Sébastien Barnola, Nicolas Posseme

J. Vac. Sci. Technol. A 38, 033002 (2020)

https://doi.org/10.1116/1.5143118

Published: March 2020

View articletitled, Isotropic dry etching of Si selectively to Si0.7Ge0.3 for CMOS sub-10 nm applications

Journal Articles

Surface science of shape-selective metal nanocrystal synthesis from first-principles: Growth of Cu nanowires and nanocubes

Kristen A. Fichthorn, Zihao Chen

J. Vac. Sci. Technol. A 38, 023210 (2020)

https://doi.org/10.1116/1.5141995

Published: February 2020

View articletitled, Surface science of shape-selective metal nanocrystal synthesis from first-principles: Growth of Cu nanowires and nanocubes

Journal Articles

Synthetic approaches for growing zinc sulfide and zinc selenide colloidal nanocrystals

Andrea M. Munro

J. Vac. Sci. Technol. A 38, 020805 (2020)

https://doi.org/10.1116/1.5141992

Published: February 2020

View articletitled, Synthetic approaches for growing zinc sulfide and zinc selenide colloidal nanocrystals

Journal Articles

Metal-assisted chemical etching of silicon and achieving pore sizes as small as 30 nm by altering gold thickness

Behnam Kheyraddini Mousavi, Mahmoud Behzadirad, Yaser Silani, Farshid Karbasian, Arash Kheyraddini Mousavi, Shams Mohajerzadeh

J. Vac. Sci. Technol. A 37, 061402 (2019)

https://doi.org/10.1116/1.5112776

Published: October 2019

View articletitled, Metal-assisted chemical etching of silicon and achieving pore sizes as small as 30 nm by altering gold thickness

Journal Articles

New route for selective etching in remote plasma source: Application to the fabrication of horizontal stacked Si nanowires for gate all around devices

Erwine Pargon, Camille Petit-Etienne, Laurène Youssef, Gaspard Thomachot, Sylvain David

J. Vac. Sci. Technol. A 37, 040601 (2019)

https://doi.org/10.1116/1.5100087

Published: May 2019

View articletitled, New route for selective etching in remote plasma source: Application to the fabrication of horizontal stacked Si nanowires for gate all around devices

Journal Articles

Measuring thickness in thin NbN films for superconducting devices

Owen Medeiros, Marco Colangelo, Ilya Charaev, Karl K. Berggren

J. Vac. Sci. Technol. A 37, 041501 (2019)

https://doi.org/10.1116/1.5088061

Published: May 2019

View articletitled, Measuring thickness in thin NbN films for superconducting devices

Journal Articles

Electron-electron interactions in nano-patterned La_0.3Sr_0.7MnO₃ thin films

Laurie E. Calvet, Guillaume Agnus, Philippe Lecoeur

J. Vac. Sci. Technol. A 37, 031504 (2019)

https://doi.org/10.1116/1.5085669

Published: March 2019

View articletitled, Electron-electron interactions in nano-patterned La0.3Sr0.7MnO3 thin films

Includes: Supplementary data

Journal Articles

Structural and optical properties of high magnesium content wurtzite-Zn_1−xMg_xO nanowires

Abdiel Rivera, Anas Mazady, John W. Zeller, Ashok K. Sood, Tariq Manzur, Mehdi Anwar

J. Vac. Sci. Technol. A 37, 020604 (2019)

https://doi.org/10.1116/1.5085837

Published: February 2019

View articletitled, Structural and optical properties of high magnesium content wurtzite-Zn1−xMgxO nanowires

Journal Articles

Fabrication and characterization of transparent conducting reduced graphene oxide/Ag nanowires/ZnO:Ga composite thin films on flexible substrates

Ching-Tian Chou, Fang-Hsing Wang

J. Vac. Sci. Technol. A 36, 05G504 (2018)

https://doi.org/10.1116/1.5035155

Published: July 2018

View articletitled, Fabrication and characterization of transparent conducting reduced graphene oxide/Ag nanowires/ZnO:Ga composite thin films on flexible substrates

Journal Articles

Synergistic interactions of H₂ and N₂ with molten gallium in the presence of plasma

Maria L. Carreon, Daniel F. Jaramillo-Cabanzo, Indira Chaudhuri, Madhu Menon, Mahendra K. Sunkara

J. Vac. Sci. Technol. A 36, 021303 (2018)

https://doi.org/10.1116/1.5004540

Published: December 2017

View articletitled, Synergistic interactions of H2 and N2 with molten gallium in the presence of plasma

Includes: Supplementary data

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Cathodoluminescence spectroscopy and Kelvin probe work function correlation of native point defect distributions with piezoelectric voltage in strained ZnO microwires

Wafer-level uniformity of atomic-layer-deposited niobium nitride thin films for quantum devices

Self-assembled nanocolumns in Bi₂Se₃ grown by molecular beam epitaxy

Thermal atomic layer etching of germanium-rich SiGe using an oxidation and “conversion-etch” mechanism

Electron conducting Ag₂Te nanowire/polymer thermoelectric thin films

Cyclic approach for silicon nitride spacer etching in fin field-effect transistors and stacked nanowire devices

First-principles study of phonon thermal transport in II–VI group graphenelike materials

Beyond point of care diagnostics: Low-dimensional nanomaterials for electronic virus sensing

Epitaxial metals for interconnects beyond Cu

New development of nanoscale spectroscopy using scanning probe microscope

Isotropic dry etching of Si selectively to Si_0.7Ge_0.3 for CMOS sub-10 nm applications

Surface science of shape-selective metal nanocrystal synthesis from first-principles: Growth of Cu nanowires and nanocubes

Synthetic approaches for growing zinc sulfide and zinc selenide colloidal nanocrystals

Metal-assisted chemical etching of silicon and achieving pore sizes as small as 30 nm by altering gold thickness

New route for selective etching in remote plasma source: Application to the fabrication of horizontal stacked Si nanowires for gate all around devices

Measuring thickness in thin NbN films for superconducting devices

Electron-electron interactions in nano-patterned La_0.3Sr_0.7MnO₃ thin films

Structural and optical properties of high magnesium content wurtzite-Zn_1−xMg_xO nanowires

Fabrication and characterization of transparent conducting reduced graphene oxide/Ag nanowires/ZnO:Ga composite thin films on flexible substrates

Synergistic interactions of H₂ and N₂ with molten gallium in the presence of plasma

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