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Journal Articles
J. Vac. Sci. Technol. A 41, 063001 (2023)
Published: September 2023
Journal Articles
J. Vac. Sci. Technol. A 41, 043405 (2023)
Published: June 2023
Includes: Supplementary data
Journal Articles
J. Vac. Sci. Technol. A 41, 023202 (2023)
Published: February 2023
Includes: Supplementary data
Journal Articles
Jacqueline Cooke, Praneeth Ranga, Arkka Bhattacharyya, Xueling Cheng, Yunshan Wang, Sriram Krishnamoorthy, Michael A. Scarpulla, Berardi Sensale-Rodriguez
J. Vac. Sci. Technol. A 41, 013406 (2023)
Published: December 2022
Includes: Supplementary data
Journal Articles
J. Vac. Sci. Technol. A 40, 033415 (2022)
Published: April 2022
Journal Articles
J. Vac. Sci. Technol. A 40, 013415 (2022)
Published: December 2021
Journal Articles
J. Vac. Sci. Technol. A 38, 050804 (2020)
Published: August 2020
Journal Articles
J. Vac. Sci. Technol. A 38, 053001 (2020)
Published: July 2020
Journal Articles
J. Vac. Sci. Technol. A 38, 023010 (2020)
Published: February 2020
Journal Articles
J. Vac. Sci. Technol. A 38, 020801 (2020)
Published: January 2020
Journal Articles
J. Vac. Sci. Technol. A 38, 013402 (2020)
Published: December 2019
Journal Articles
J. Vac. Sci. Technol. A 37, 030907 (2019)
Published: April 2019
Includes: Supplementary data
Journal Articles
Pascal Düngen, Mark Greiner, Karl-Heinz Böhm, Ioannis Spanos, Xing Huang, Alexander A. Auer, Robert Schlögl, Saskia Heumann
J. Vac. Sci. Technol. A 36, 01A126 (2018)
Published: December 2017
Includes: Supplementary data
Journal Articles
J. Vac. Sci. Technol. A 36, 010801 (2018)
Published: October 2017
Journal Articles
J. Vac. Sci. Technol. A 35, 061403 (2017)
Published: August 2017
Journal Articles
Md Tanim Humayun, Michela Sainato, Ralu Divan, Richard A. Rosenberg, Alvaro Sahagun, Lara Gundel, Paul A. Solomon, Igor Paprotny
J. Vac. Sci. Technol. A 35, 061402 (2017)
Published: July 2017
Includes: Supplementary data
Journal Articles
Jere Tupala, Marianna Kemell, Miika Mattinen, Kristoffer Meinander, Sanni Seppälä, Timo Hatanpää, Jyrki Räisänen, Mikko Ritala, Markku Leskelä
J. Vac. Sci. Technol. A 35, 041506 (2017)
Published: May 2017
Journal Articles
Akito Takashima, Eiji Ikenaga, Takayuki Muro, Akio Kawabata, Tomo Murakami, Mizuhisa Nihei, Naoki Yokoyama
J. Vac. Sci. Technol. A 35, 021507 (2017)
Published: January 2017
Journal Articles
J. Vac. Sci. Technol. A 35, 01B115 (2017)
Published: November 2016
Journal Articles
J. Vac. Sci. Technol. A 35, 01B113 (2017)
Published: November 2016
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