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Journal Articles
Alfreda Krisna Altama, Fanhua Kong, Natanael Ardi Sugiarto, Peikai Hsu, Shih-Yun Chen, Pakman Yiu, Jinn P. Chu
J. Vac. Sci. Technol. A 41, 063114 (2023)
Published: November 2023
Journal Articles
Jinn P. Chu, Yi-Jui Yeh, Chih-Yu Liu, Yi-Xiang Yang, Alfreda Krisna Altama, Ting-Hao Chang, Wei-Hung Chiang, Pakman Yiu, Kuo-Lun Tung
J. Vac. Sci. Technol. A 41, 063111 (2023)
Published: October 2023
Journal Articles
Hanjörg Wagner, Valentin Ripka, Andrea Dellith, Jan Dellith, Florian Wittkämper, Uwe Hübner, Mario Ziegler
J. Vac. Sci. Technol. A 41, 053209 (2023)
Published: August 2023
Includes: Supplementary data
Journal Articles
J. Vac. Sci. Technol. A 41, 033107 (2023)
Published: April 2023
Journal Articles
Kaat Van Dongen, Rachel A. Nye, Jan-Willem J. Clerix, Claudia Sixt, Danilo De Simone, Annelies Delabie
J. Vac. Sci. Technol. A 41, 032404 (2023)
Published: March 2023
Includes: Supplementary data
Journal Articles
J. Vac. Sci. Technol. A 40, 062404 (2022)
Published: September 2022
Includes: Supplementary data
Journal Articles
J. Vac. Sci. Technol. A 40, 053404 (2022)
Published: September 2022
Journal Articles
J. Vac. Sci. Technol. A 40, 043006 (2022)
Published: June 2022
Includes: Supplementary data
Journal Articles
Zheng Lu, Angel Yanguas-Gil, Donghyeon Kang, Pragathi Darapaneni, Anil U. Mane, Christopher L. Marshall, Jeffrey W. Elam
J. Vac. Sci. Technol. A 40, 042404 (2022)
Published: June 2022
Journal Articles
Yougang Mao, Naba K. Karan, Ravi Kumar, Russell Hopson, Pradeep R. Guduru, Brian W. Sheldon, Li-Qiong Wang
J. Vac. Sci. Technol. A 40, 043203 (2022)
Published: May 2022
Journal Articles
J. Vac. Sci. Technol. A 40, 033415 (2022)
Published: April 2022
Journal Articles
J. Vac. Sci. Technol. A 40, 033407 (2022)
Published: April 2022
Journal Articles
J. Vac. Sci. Technol. A 40, 033401 (2022)
Published: March 2022
Includes: Supplementary data
Journal Articles
J. Vac. Sci. Technol. A 40, 022601 (2022)
Published: January 2022
Journal Articles
Masashi Watanabe, Takafumi Kanauchi, Yoshihiro Chida, Kenta Hayashi, Naoto Todoroki, Toshimasa Wadayama
J. Vac. Sci. Technol. A 40, 013216 (2022)
Published: January 2022
Journal Articles
Erik W. Peterson, Huanru Wang, Zongyuan Liu, Tasnim Ara, Sanjaya D. Senanayake, Jose A. Rodriguez, Jing Zhou
J. Vac. Sci. Technol. A 40, 013209 (2022)
Published: December 2021
Journal Articles
J. Vac. Sci. Technol. A 40, 013204 (2022)
Published: December 2021
Journal Articles
J. Vac. Sci. Technol. A 39, 063005 (2021)
Published: November 2021
Includes: Supplementary data
Journal Articles
J. Vac. Sci. Technol. A 39, 063205 (2021)
Published: September 2021
Journal Articles
J. Vac. Sci. Technol. A 39, 053407 (2021)
Published: August 2021
Includes: Supplementary data
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