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Journal Articles

Fabrication and characterization of a hybrid magnetic structure based on highly ordered metallic nanotube arrays

Alfreda Krisna Altama, Fanhua Kong, Natanael Ardi Sugiarto, Peikai Hsu, Shih-Yun Chen, Pakman Yiu, Jinn P. Chu
Journal: Journal of Vacuum Science & Technology A
J. Vac. Sci. Technol. A 41, 063114 (2023)
https://doi.org/10.1116/6.0003103
Published: November 2023
View article titled, Fabrication and characterization of a hybrid magnetic structure based on highly ordered metallic nanotube arrays
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Journal Articles

Ultrahigh density InGaN/GaN nanopyramid quantum dots for visible emissions with high quantum efficiency

Cheng Liu, Nikhil Pokharel, Qinchen Lin, Miguel A. Betancourt Ponce, Jian Sun, Dominic Lane, Thomas J. De Prinse, Nelson Tansu, Padma Gopalan, Chirag Gupta, Shubhra S. Pasayat, Luke J. Mawst
Journal: Journal of Vacuum Science & Technology A
J. Vac. Sci. Technol. A 41, 062705 (2023)
https://doi.org/10.1116/6.0002997
Published: November 2023
View article titled, Ultrahigh density InGaN/GaN nanopyramid quantum dots for visible emissions with high quantum efficiency
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Journal Articles

Study of Al2124-SiC nanocomposites by an improved statistical nanoindentation methodology

Esteban Broitman, Yuri Kadin, Predrag Andric
Journal: Journal of Vacuum Science & Technology A
J. Vac. Sci. Technol. A 41, 063210 (2023)
https://doi.org/10.1116/6.0003048
Published: November 2023
View article titled, Study of Al2124-SiC nanocomposites by an improved statistical nanoindentation methodology
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Journal Articles

Real-time artificial intelligence enhanced defect engineering in CeO2 nanostructures

Udit Kumar, Ayush Arunachalam, Corbin Feit, S. Novia Berriel, Kanad Basu, Parag Banerjee, Sudipta Seal
Journal: Journal of Vacuum Science & Technology A
J. Vac. Sci. Technol. A 41, 062409 (2023)
https://doi.org/10.1116/6.0002912
Published: November 2023
View article titled, Real-time artificial intelligence enhanced defect engineering in CeO<sub>2</sub> nanostructures
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Includes: Supplementary data
Journal Articles

Core-shell metallic nanotube arrays for highly sensitive surface-enhanced Raman scattering (SERS) detection

Jinn P. Chu, Yi-Jui Yeh, Chih-Yu Liu, Yi-Xiang Yang, Alfreda Krisna Altama, Ting-Hao Chang, Wei-Hung Chiang, Pakman Yiu, Kuo-Lun Tung
Journal: Journal of Vacuum Science & Technology A
J. Vac. Sci. Technol. A 41, 063111 (2023)
https://doi.org/10.1116/6.0003055
Published: October 2023
View article titled, Core-shell metallic nanotube arrays for highly sensitive surface-enhanced Raman scattering (SERS) detection
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Journal Articles

Tribological behavior and wear mechanism of nanomultilayer AlCrN/AlTiSiN coatings at elevated temperatures

Baijun Xiao, Teng Fei Zhang
Journal: Journal of Vacuum Science & Technology A
J. Vac. Sci. Technol. A 41, 063110 (2023)
https://doi.org/10.1116/6.0003019
Published: October 2023
View article titled, Tribological behavior and wear mechanism of nanomultilayer AlCrN/AlTiSiN coatings at elevated temperatures
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Journal Articles

Angle resolved x-ray photoelectron spectroscopy assessment of the structure and composition of nanofilms—including uncertainties—through the multilayer model

Alberto Herrera-Gomez, Dulce Maria Guzman-Bucio, Marisol Mayorga-Garay, Orlando Cortazar-Martinez
Journal: Journal of Vacuum Science & Technology A
J. Vac. Sci. Technol. A 41, 063206 (2023)
https://doi.org/10.1116/6.0002981
Published: October 2023
View article titled, Angle resolved x-ray photoelectron spectroscopy assessment of the structure and composition of nanofilms—including uncertainties—through the multilayer model
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Journal Articles

Plasma functionalization mechanism to modify isocyanate groups on multiwalled carbon nanotubes

Daisuke Ogawa, Keiji Nakamura
Journal: Journal of Vacuum Science & Technology A
J. Vac. Sci. Technol. A 41, 063001 (2023)
https://doi.org/10.1116/6.0002835
Published: September 2023
View article titled, Plasma functionalization mechanism to modify isocyanate groups on multiwalled carbon nanotubes
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Journal Articles

Correlation of interfacial and dielectric characteristics in atomic layer deposited Al2O3/TiO2 nanolaminates grown with different precursor purge times

Partha Sarathi Padhi, R. S. Ajimsha, S. K. Rai, Sushmita Bhartiya, Aniruddha Bose, Bidyadhar Das, Manoj Kumar Tiwari, Pankaj Misra
Journal: Journal of Vacuum Science & Technology A
J. Vac. Sci. Technol. A 41, 063201 (2023)
https://doi.org/10.1116/6.0002849
Published: September 2023
View article titled, Correlation of interfacial and dielectric characteristics in atomic layer deposited Al<sub>2</sub>O<sub>3</sub>/TiO<sub>2</sub> nanolaminates grown with different precursor purge times
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Includes: Supplementary data
Journal Articles

Plasmonic black coatings with broadband absorption for space applications

Hanjörg Wagner, Valentin Ripka, Andrea Dellith, Jan Dellith, Florian Wittkämper, Uwe Hübner, Mario Ziegler
Journal: Journal of Vacuum Science & Technology A
J. Vac. Sci. Technol. A 41, 053209 (2023)
https://doi.org/10.1116/6.0002821
Published: August 2023
View article titled, Plasmonic black coatings with broadband absorption for space applications
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Includes: Supplementary data
Journal Articles

Chemical conversion of MoS2 thin films deposited by atomic layer deposition (ALD) into molybdenum nitride monitored by in situ reflectance measurements

J. Patouillard, R. Gassilloud, F. Mercier, A. Mantoux, R. Boichot, A. Crisci, M. Bernard, N. Gauthier, S. Cadot, C. Raynaud, F. Gianesello, E. Blanquet
Journal: Journal of Vacuum Science & Technology A
J. Vac. Sci. Technol. A 41, 052201 (2023)
https://doi.org/10.1116/6.0002678
Published: July 2023
View article titled, Chemical conversion of MoS<sub>2</sub> thin films deposited by atomic layer deposition (ALD) into molybdenum nitride monitored by <em>in situ</em> reflectance measurements
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Includes: Supplementary data
Journal Articles

Atomic layer deposition of calcium fluoride for barrier coating applications

John Hennessy, Robin E. Rodríguez, William C. West, Erik J. Brandon
Journal: Journal of Vacuum Science & Technology A
J. Vac. Sci. Technol. A 41, 042405 (2023)
https://doi.org/10.1116/6.0002563
Published: June 2023
View article titled, Atomic layer deposition of calcium fluoride for barrier coating applications
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Includes: Supplementary data
Journal Articles

Effect of structure on semiconducting properties of a small molecule n-type organic semiconductor: Phenyl-C61-butyric acid methyl ester

Zhaojing Gao, Dieudonné Niyonkuru, Arthur Yelon, Clara Santato
Journal: Journal of Vacuum Science & Technology A
J. Vac. Sci. Technol. A 41, 043405 (2023)
https://doi.org/10.1116/6.0002410
Published: June 2023
View article titled, Effect of structure on semiconducting properties of a small molecule n-type organic semiconductor: Phenyl-C61-butyric acid methyl ester
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Includes: Supplementary data
Journal Articles

Improvement of antibacterial activity and mechanical properties of titanium alloy by TiAlN/Ag gradient multilayer coatings

Xianglin Fang, Rong Tu, Jiawei Liu, Honglian Dai, Long Zheng, Shaobo Zhu, Song Zhang, Takashi Goto
Journal: Journal of Vacuum Science & Technology A
J. Vac. Sci. Technol. A 41, 033107 (2023)
https://doi.org/10.1116/6.0002552
Published: April 2023
View article titled, Improvement of antibacterial activity and mechanical properties of titanium alloy by TiAlN/Ag gradient multilayer coatings
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Journal Articles

Hydrophobic Si nanopillar array coated with few-layer MoS2 films for surface-enhanced Raman scattering

Tsung-Shine Ko, Yen-Lun Chen, Jiann Shieh, Szu-Hung Chen, Jing-Yang Syu, Guan-Long Chen
Journal: Journal of Vacuum Science & Technology A
J. Vac. Sci. Technol. A 41, 033106 (2023)
https://doi.org/10.1116/6.0002589
Published: April 2023
View article titled, Hydrophobic Si nanopillar array coated with few-layer MoS<sub>2</sub> films for surface-enhanced Raman scattering
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Journal Articles

Aminosilane small molecule inhibitors for area-selective deposition: Study of substrate-inhibitor interfacial interactions

Kaat Van Dongen, Rachel A. Nye, Jan-Willem J. Clerix, Claudia Sixt, Danilo De Simone, Annelies Delabie
Journal: Journal of Vacuum Science & Technology A
J. Vac. Sci. Technol. A 41, 032404 (2023)
https://doi.org/10.1116/6.0002347
Published: March 2023
View article titled, Aminosilane small molecule inhibitors for area-selective deposition: Study of substrate-inhibitor interfacial interactions
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Includes: Supplementary data
Journal Articles

Structure evolution and mechanical properties of Al-alloyed tantalum diboride films prepared by magnetron sputtering co-deposition

Viktor Šroba, Tomáš Fiantok, Martin Truchlý, Tomáš Roch, Branislav Grančič, Katarína Viskupová, Leonid Satrapinskyy, Peter Švec, Jr., Štefan Nagy, Vitalii Izai, Peter Kúš, Marián Mikula
Journal: Journal of Vacuum Science & Technology A
J. Vac. Sci. Technol. A 41, 023410 (2023)
https://doi.org/10.1116/6.0002390
Published: March 2023
View article titled, Structure evolution and mechanical properties of Al-alloyed tantalum diboride films prepared by magnetron sputtering co-deposition