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Journal Articles
J. Vac. Sci. Technol. A 43, 013105 (2025)
Published: December 2024
Journal Articles
J. Vac. Sci. Technol. A 42, 062602 (2024)
Published: October 2024
Journal Articles
J. Vac. Sci. Technol. A 42, 043410 (2024)
Published: June 2024
Journal Articles
Cheng Liu, Nikhil Pokharel, Qinchen Lin, Miguel A. Betancourt Ponce, Jian Sun, Dominic Lane, Thomas J. De Prinse, Nelson Tansu, Padma Gopalan, Chirag Gupta, Shubhra S. Pasayat, Luke J. Mawst
J. Vac. Sci. Technol. A 41, 062705 (2023)
Published: November 2023
Journal Articles
Cheng-Hao Chuang, Chieh-Ming Chen, Yu-Cheng Shao, Ping-Hung Yeh, Chih-Ming Chang, Way-Faung Pong, Mukes Kapilashrami, Per-Anders Glans, Sheraz Gul, Gongming Wang, Yat Li, Jin Zhang, Jun Miyawaki, Hideharu Niwa, Yoshihisa Harada, Jin-Ming Chen, Jinghua Guo
J. Vac. Sci. Technol. A 39, 063204 (2021)
Published: September 2021
Journal Articles
J. Vac. Sci. Technol. A 39, 012406 (2021)
Published: December 2020
Includes: Supplementary data
Journal Articles
Chad A. Beaudette, Jacob T. Held, Benjamin L. Greenberg, Phong H. Nguyen, Nolan M. Concannon, Russell J. Holmes, K. Andre Mkhoyan, Eray S. Aydil, Uwe R. Kortshagen
J. Vac. Sci. Technol. A 38, 042404 (2020)
Published: June 2020
Includes: Supplementary data
Journal Articles
J. Vac. Sci. Technol. A 38, 022420 (2020)
Published: February 2020
Includes: Supplementary data
Journal Articles
J. Vac. Sci. Technol. A 38, 023210 (2020)
Published: February 2020
Journal Articles
J. Vac. Sci. Technol. A 38, 020805 (2020)
Published: February 2020
Journal Articles
Ce-ce Zhao, Xiao-wen Sun, Xing-yu Wang, Yong Yang, Chen Zhang, Yan-wei Wang, Yu-duo Ma, Yu-hang Cui, Lei Wang, Yan-chun Dong, You Wang
J. Vac. Sci. Technol. A 38, 023206 (2020)
Published: February 2020
Journal Articles
J. Vac. Sci. Technol. A 37, 061405 (2019)
Published: November 2019
Journal Articles
Ann Lii-Rosales, Yong Han, King C. Lai, Dapeng Jing, Michael C. Tringides, James W. Evans, Patricia A. Thiel
J. Vac. Sci. Technol. A 37, 061403 (2019)
Published: November 2019
Includes: Supplementary data
Journal Articles
J. Vac. Sci. Technol. A 36, 061401 (2018)
Published: September 2018
Includes: Supplementary data
Journal Articles
J. Vac. Sci. Technol. A 36, 051303 (2018)
Published: August 2018
Journal Articles
Alexander S. Gudovskikh, Alexander V. Uvarov, Ivan A. Morozov, Artem I. Baranov, Dmitriy A. Kudryashov, Kirill S. Zelentsov, Anton S. Bukatin, Konstantin P. Kotlyar
J. Vac. Sci. Technol. A 36, 02D408 (2018)
Published: February 2018
Journal Articles
Alexander S. Gudovskikh, Ivan A. Morozov, Alexander V. Uvarov, Dmitriy A. Kudryashov, Ekaterina V. Nikitina, Anton S. Bukatin, Vladimir N. Nevedomskiy, Jean-Paul Kleider
J. Vac. Sci. Technol. A 36, 021302 (2018)
Published: December 2017
Journal Articles
Md Tanim Humayun, Michela Sainato, Ralu Divan, Richard A. Rosenberg, Alvaro Sahagun, Lara Gundel, Paul A. Solomon, Igor Paprotny
J. Vac. Sci. Technol. A 35, 061402 (2017)
Published: July 2017
Includes: Supplementary data
Journal Articles
Bryce A. Williams, Michelle A. Smeaton, Collin S. Holgate, Nancy D. Trejo, Lorraine F. Francis, Eray S. Aydil
J. Vac. Sci. Technol. A 34, 051204 (2016)
Published: August 2016
Includes: Supplementary data
Journal Articles
J. Vac. Sci. Technol. A 34, 01A131 (2016)
Published: November 2015
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