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Journal Articles

Oxidation behavior of TiB₂–SiC nanocomposite coatings deposited by magnetron sputtering

Yuanxing Wu, Qizhong Li, Rong Tu, Takashi Goto

J. Vac. Sci. Technol. A 42, 063109 (2024)

https://doi.org/10.1116/6.0004075

Published: November 2024

View article titled, Oxidation behavior of TiB2–SiC nanocomposite coatings deposited by magnetron sputtering

Journal Articles

Development and evaluation of CrAlAgN self-lubricating coatings for high temperature metal forming dies

Jianliang Lin, Chia-Lin Li, Jyh-Wei Lee, Xuhai Zhang, Jingcai Xiao, Sean C. Piper

J. Vac. Sci. Technol. A 42, 023105 (2024)

https://doi.org/10.1116/6.0003306

Published: February 2024

View article titled, Development and evaluation of CrAlAgN self-lubricating coatings for high temperature metal forming dies

Journal Articles

Statistically distributed nano-scratch testing of AlFeMnNb, AlFeMnNi, and TiN/Si₃N₄ thin films on silicon

Ben D. Beake, Vladimir M. Vishnyakov, Stephen R. Goodes, Azadeh Taher Rahmati

J. Vac. Sci. Technol. A 42, 013104 (2024)

https://doi.org/10.1116/6.0003189

Published: January 2024

View article titled, Statistically distributed nano-scratch testing of AlFeMnNb, AlFeMnNi, and TiN/Si3N4 thin films on silicon

Journal Articles

Study of Al2124-SiC nanocomposites by an improved statistical nanoindentation methodology

Esteban Broitman, Yuri Kadin, Predrag Andric

J. Vac. Sci. Technol. A 41, 063210 (2023)

https://doi.org/10.1116/6.0003048

Published: November 2023

View article titled, Study of Al2124-SiC nanocomposites by an improved statistical nanoindentation methodology

Journal Articles

Structure evolution and mechanical properties of Al-alloyed tantalum diboride films prepared by magnetron sputtering co-deposition

Viktor Šroba, Tomáš Fiantok, Martin Truchlý, Tomáš Roch, Branislav Grančič, Katarína Viskupová, Leonid Satrapinskyy, Peter Švec, Jr., Štefan Nagy, Vitalii Izai, Peter Kúš, Marián Mikula

J. Vac. Sci. Technol. A 41, 023410 (2023)

https://doi.org/10.1116/6.0002390

Published: March 2023

View article titled, Structure evolution and mechanical properties of Al-alloyed tantalum diboride films prepared by magnetron sputtering co-deposition

Journal Articles

Preface for the special topic collection honoring Dr. Scott Chambers’ 70th birthday and his leadership in the science and technology of oxide thin films

Tiffany C. Kaspar, Yingge Du, Mark H. Engelhard, Don R. Baer, Bharat Jalan, Joseph H. Ngai

J. Vac. Sci. Technol. A 40, 041602 (2022)

https://doi.org/10.1116/6.0001942

Published: June 2022

View article titled, Preface for the special topic collection honoring Dr. Scott Chambers’ 70th birthday and his leadership in the science and technology of oxide thin films

Journal Articles

Effect of electrochemical cycling on microstructures of nanocomposite silicon electrodes using hyperpolarized ¹²⁹Xe and ⁷Li NMR spectroscopy

Yougang Mao, Naba K. Karan, Ravi Kumar, Russell Hopson, Pradeep R. Guduru, Brian W. Sheldon, Li-Qiong Wang

J. Vac. Sci. Technol. A 40, 043203 (2022)

https://doi.org/10.1116/6.0001768

Published: May 2022

View article titled, Effect of electrochemical cycling on microstructures of nanocomposite silicon electrodes using hyperpolarized 129Xe and 7Li NMR spectroscopy

Journal Articles

Structure evolution and mechanical properties of co-sputtered Zr-Al-B₂ thin films

Tomáš Fiantok, Viktor Šroba, Nikola Koutná, Vitalii Izai, Tomáš Roch, Martin Truchlý, Marek Vidiš, Leonid Satrapinskyy, Štefan Nagy, Branislav Grančič, Peter Kúš, Marián Mikula

J. Vac. Sci. Technol. A 40, 033414 (2022)

https://doi.org/10.1116/6.0001802

Published: April 2022

View article titled, Structure evolution and mechanical properties of co-sputtered Zr-Al-B2 thin films

Journal Articles

Self-assembled vertically aligned nanocomposite systems integrated on silicon substrate: Progress and future perspectives

Di Zhang, Matias Kalaswad, Haiyan Wang

J. Vac. Sci. Technol. A 40, 010802 (2022)

https://doi.org/10.1116/6.0001479

Published: December 2021

View article titled, Self-assembled vertically aligned nanocomposite systems integrated on silicon substrate: Progress and future perspectives

Journal Articles

Influence of chemical vapor precursor flow rate on the structure and thermal stability of phase-modulated VSiCN/Ag coatings

Forest C. Thompson, Frank M. Kustas, Kent E. Coulter, Grant A. Crawford

J. Vac. Sci. Technol. A 39, 063409 (2021)

https://doi.org/10.1116/6.0001302

Published: October 2021

View article titled, Influence of chemical vapor precursor flow rate on the structure and thermal stability of phase-modulated VSiCN/Ag coatings

Journal Articles

Electronic surface reconstruction of TiO₂ nanocrystals revealed by resonant inelastic x-ray scattering

Cheng-Hao Chuang, Chieh-Ming Chen, Yu-Cheng Shao, Ping-Hung Yeh, Chih-Ming Chang, Way-Faung Pong, Mukes Kapilashrami, Per-Anders Glans, Sheraz Gul, Gongming Wang, Yat Li, Jin Zhang, Jun Miyawaki, Hideharu Niwa, Yoshihisa Harada, Jin-Ming Chen, Jinghua Guo

J. Vac. Sci. Technol. A 39, 063204 (2021)

https://doi.org/10.1116/6.0001247

Published: September 2021

View article titled, Electronic surface reconstruction of TiO2 nanocrystals revealed by resonant inelastic x-ray scattering

Journal Articles

True hero of the trade: On the critical contributions of Art Gossard to modern device techonology

Aaron J. Muhowski, Alec M. Skipper, Stephen D. March, Mark J. W. Rodwell, Seth R. Bank

J. Vac. Sci. Technol. A 39, 020804 (2021)

https://doi.org/10.1116/6.0000792

Published: February 2021

View article titled, True hero of the trade: On the critical contributions of Art Gossard to modern device techonology

Journal Articles

Modeling atomic layer deposition process parameters to achieve dense nanocrystal-based nanocomposites

Austin Cendejas, Dillon Moher, Elijah Thimsen

J. Vac. Sci. Technol. A 39, 012406 (2021)

https://doi.org/10.1116/6.0000588

Published: December 2020

View article titled, Modeling atomic layer deposition process parameters to achieve dense nanocrystal-based nanocomposites

Includes: Supplementary data

Journal Articles

Plasmonic nanocomposites of zinc oxide and titanium nitride

Chad A. Beaudette, Jacob T. Held, Benjamin L. Greenberg, Phong H. Nguyen, Nolan M. Concannon, Russell J. Holmes, K. Andre Mkhoyan, Eray S. Aydil, Uwe R. Kortshagen

J. Vac. Sci. Technol. A 38, 042404 (2020)

https://doi.org/10.1116/1.5142858

Published: June 2020

View article titled, Plasmonic nanocomposites of zinc oxide and titanium nitride

Includes: Supplementary data

Journal Articles

Structure evolution and mechanical properties of hard tantalum diboride films

Viktor Šroba, Tomáš Fiantok, Martin Truchlý, Tomáš Roch, Miroslav Zahoran, Branislav Grančič, Peter Švec, Jr., Štefan Nagy, Vitalii Izai, Peter Kúš, Marián Mikula

J. Vac. Sci. Technol. A 38, 033408 (2020)

https://doi.org/10.1116/6.0000155

Published: April 2020

View article titled, Structure evolution and mechanical properties of hard tantalum diboride films

Journal Articles

Growth of dense, hard yet low-stress Ti_0.40Al_0.27W_0.33N nanocomposite films with rotating substrate and no external substrate heating

Zhengtao Wu, Olof Tengstrand, Babak Bakhit, Jun Lu, J. E. Greene, Lars Hultman, Ivan Petrov, Grzegorz Greczynski

J. Vac. Sci. Technol. A 38, 023006 (2020)

https://doi.org/10.1116/1.5140357

Published: January 2020

View article titled, Growth of dense, hard yet low-stress Ti0.40Al0.27W0.33N nanocomposite films with rotating substrate and no external substrate heating

Journal Articles

Temperature dependent Seebeck coefficient and thermal conductivity properties of graphene undoped and doped Ca-Pr-Co oxide thermoelectric nanocomposites

Serhat Koçyiğit, Arda Aytimur, Ibrahim Uslu

J. Vac. Sci. Technol. A 37, 061201 (2019)

https://doi.org/10.1116/1.5121253

Published: October 2019

View article titled, Temperature dependent Seebeck coefficient and thermal conductivity properties of graphene undoped and doped Ca-Pr-Co oxide thermoelectric nanocomposites

Journal Articles

On the oxidation behavior of cathodic arc evaporated Al-Cr-Fe and Al-Cr-Fe-O coatings. II. Transmission electron microscopy investigations of Al_0.675Cr_0.275Fe_0.05-based films

Christian Martin Koller, Alexander Kirnbauer, Szilárd Kolozsvári, Jürgen Ramm, Paul-Heinz Mayrhofer

J. Vac. Sci. Technol. A 37, 041504 (2019)

https://doi.org/10.1116/1.5099123

Published: May 2019

View article titled, On the oxidation behavior of cathodic arc evaporated Al-Cr-Fe and Al-Cr-Fe-O coatings. II. Transmission electron microscopy investigations of Al0.675Cr0.275Fe0.05-based films

Includes: Supplementary data

Journal Articles

Study of the high-temperature oxidation resistance mechanism of magnetron sputtered Hf₇B₂₃Si₁₇C₄N₄₅ film

Minghui Zhang, Jiechao Jiang, Petr Zeman, Šárka Zuzjaková, Jaroslav Vlček, Efstathios I. Meletis

J. Vac. Sci. Technol. A 36, 021505 (2018)

https://doi.org/10.1116/1.5004145

Published: December 2017

View article titled, Study of the high-temperature oxidation resistance mechanism of magnetron sputtered Hf7B23Si17C4N45 film

Journal Articles

Evolution of microstructure and macrostress in sputtered hard Ti(Al,V)N films with increasing energy delivered during their growth by bombarding ions

Jindřich Musil, Martin Jaroš, Radomír Čerstvý, Stanislav Haviar

J. Vac. Sci. Technol. A 35, 020601 (2017)

https://doi.org/10.1116/1.4967935

Published: November 2016

View article titled, Evolution of microstructure and macrostress in sputtered hard Ti(Al,V)N films with increasing energy delivered during their growth by bombarding ions

NARROW

Topics

Oxidation behavior of TiB₂–SiC nanocomposite coatings deposited by magnetron sputtering

Development and evaluation of CrAlAgN self-lubricating coatings for high temperature metal forming dies

Statistically distributed nano-scratch testing of AlFeMnNb, AlFeMnNi, and TiN/Si₃N₄ thin films on silicon

Study of Al2124-SiC nanocomposites by an improved statistical nanoindentation methodology

Structure evolution and mechanical properties of Al-alloyed tantalum diboride films prepared by magnetron sputtering co-deposition

Preface for the special topic collection honoring Dr. Scott Chambers’ 70th birthday and his leadership in the science and technology of oxide thin films

Effect of electrochemical cycling on microstructures of nanocomposite silicon electrodes using hyperpolarized ¹²⁹Xe and ⁷Li NMR spectroscopy

Structure evolution and mechanical properties of co-sputtered Zr-Al-B₂ thin films

Self-assembled vertically aligned nanocomposite systems integrated on silicon substrate: Progress and future perspectives

Influence of chemical vapor precursor flow rate on the structure and thermal stability of phase-modulated VSiCN/Ag coatings

Electronic surface reconstruction of TiO₂ nanocrystals revealed by resonant inelastic x-ray scattering

True hero of the trade: On the critical contributions of Art Gossard to modern device techonology

Modeling atomic layer deposition process parameters to achieve dense nanocrystal-based nanocomposites

Plasmonic nanocomposites of zinc oxide and titanium nitride

Structure evolution and mechanical properties of hard tantalum diboride films

Growth of dense, hard yet low-stress Ti_0.40Al_0.27W_0.33N nanocomposite films with rotating substrate and no external substrate heating

Temperature dependent Seebeck coefficient and thermal conductivity properties of graphene undoped and doped Ca-Pr-Co oxide thermoelectric nanocomposites

On the oxidation behavior of cathodic arc evaporated Al-Cr-Fe and Al-Cr-Fe-O coatings. II. Transmission electron microscopy investigations of Al_0.675Cr_0.275Fe_0.05-based films

Study of the high-temperature oxidation resistance mechanism of magnetron sputtered Hf₇B₂₃Si₁₇C₄N₄₅ film

Evolution of microstructure and macrostress in sputtered hard Ti(Al,V)N films with increasing energy delivered during their growth by bombarding ions

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