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Journal Articles

Design of line seeds for glancing angle deposition

Open Access
Chuang Qu, Bruce Alphenaar, Shamus McNamara, Kevin Walsh
Journal: Journal of Vacuum Science & Technology A
J. Vac. Sci. Technol. A 39, 043404 (2021)
https://doi.org/10.1116/6.0000998
Published: May 2021
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Journal Articles

Isotropic dry etching of Si selectively to Si0.7Ge0.3 for CMOS sub-10 nm applications

Editor’s PickAvailable to Purchase
Sana Rachidi, Alain Campo, Virginie Loup, Christian Vizioz, Jean-Michel Hartmann, Sébastien Barnola, Nicolas Posseme
Journal: Journal of Vacuum Science & Technology A
J. Vac. Sci. Technol. A 38, 033002 (2020)
https://doi.org/10.1116/1.5143118
Published: March 2020
View article titled, Isotropic dry etching of Si selectively to Si0.7Ge0.3 for CMOS sub-10 nm applications
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Journal Articles

New leak assembly based on fluidic nanochannels

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Aiqing Zhu, Yongheng Zhao, Xudi Wang, Yu Wang, Wei Wei, Keqiang Qiu, Dong Dong
Journal: Journal of Vacuum Science & Technology A
J. Vac. Sci. Technol. A 34, 050604 (2016)
https://doi.org/10.1116/1.4960646
Published: August 2016
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Journal Articles

Design and fabrication of a multilayer micro-/nanofluidic device with an electrically driven nanovalve

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Hao Li, Leonidas E. Ocola, Orlando Auciello, Millicent Firestone
Journal: Journal of Vacuum Science & Technology A
J. Vac. Sci. Technol. A 26, 752–756 (2008)
https://doi.org/10.1116/1.2936227
Published: June 2008
View article titled, Design and fabrication of a multilayer micro-/nanofluidic device with an electrically driven nanovalve
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Journal Articles

Nanotribological characterization of fluoropolymer thin films for biomedical micro/nanoelectromechanical system applications

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Kang Kug Lee, Bharat Bhushan, Derek Hansford
Journal: Journal of Vacuum Science & Technology A
J. Vac. Sci. Technol. A 23, 804–810 (2005)
https://doi.org/10.1116/1.1861939
Published: June 2005
View article titled, Nanotribological characterization of fluoropolymer thin films for biomedical micro/nanoelectromechanical system applications
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