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Journal Articles
J. Vac. Sci. Technol. A 39, 053206 (2021)
Published: August 2021
Journal Articles
J. Vac. Sci. Technol. A 35, 05C201 (2017)
Published: April 2017
Journal Articles
Anton J. Walsh, Richard van Lent, Sabine V. Auras, Michael A. Gleeson, Otto T. Berg, Ludo B. F. Juurlink
J. Vac. Sci. Technol. A 35, 03E102 (2017)
Published: February 2017
Journal Articles
J. Vac. Sci. Technol. A 32, 021505 (2014)
Published: January 2014
Includes: Supplementary data
Journal Articles
J. Vac. Sci. Technol. A 30, 051401 (2012)
Published: July 2012
Journal Articles
J. Vac. Sci. Technol. A 27, 287–294 (2009)
Published: February 2009
Journal Articles
J. Vac. Sci. Technol. A 26, 123–127 (2008)
Published: December 2007
Journal Articles
J. Vac. Sci. Technol. A 25, 645–650 (2007)
Published: May 2007
Journal Articles
J. Vac. Sci. Technol. A 24, 126–132 (2006)
Published: December 2005
Journal Articles
J. Vac. Sci. Technol. A 23, 316–321 (2005)
Published: March 2005
Journal Articles
Neutral gas temperatures measured within a high-density, inductively coupled plasma abatement device
J. Vac. Sci. Technol. A 20, 1787–1795 (2002)
Published: September 2002
Journal Articles
Langmuir probe measurements in a low pressure inductively coupled plasma used for diamond deposition
J. Vac. Sci. Technol. A 17, 721–725 (1999)
Published: May 1999
Journal Articles
J. Vac. Sci. Technol. A 16, 290–293 (1998)
Published: January 1998
Journal Articles
J. Vac. Sci. Technol. A 15, 1129–1134 (1997)
Published: May 1997
Journal Articles
R. Mu, D. O. Henderson, Y. S. Tung, A. Ueda, C. Hall, W. E. Collins, C. W. White, R. A. Zuhr, Jane G. Zhu
J. Vac. Sci. Technol. A 14, 1482–1487 (1996)
Published: May 1996
Journal Articles
J. Vac. Sci. Technol. A 14, 1674–1678 (1996)
Published: May 1996
Journal Articles
J. Vac. Sci. Technol. A 14, 216–222 (1996)
Published: January 1996
Journal Articles
J. Vac. Sci. Technol. A 13, 1681–1686 (1995)
Published: May 1995
Journal Articles
J. Vac. Sci. Technol. A 13, 359–367 (1995)
Published: March 1995
Journal Articles
J. Vac. Sci. Technol. A 12, 1474–1479 (1994)
Published: July 1994
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