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Journal Articles
J. Vac. Sci. Technol. A 32, 061513 (2014)
Published: October 2014
Journal Articles
J. Vac. Sci. Technol. A 30, 041516 (2012)
Published: June 2012
Journal Articles
J. Vac. Sci. Technol. A 29, 06B101 (2011)
Published: October 2011
Journal Articles
New spiral molecular drag stage design for high compression ratio, compact turbomolecular-drag pumps
J. Vac. Sci. Technol. A 28, 931–936 (2010)
Published: June 2010
Journal Articles
J. Vac. Sci. Technol. A 28, 552–558 (2010)
Published: June 2010
Journal Articles
J. Vac. Sci. Technol. A 16, 1449–1453 (1998)
Published: May 1998
Journal Articles
J. Vac. Sci. Technol. A 15, 1385–1388 (1997)
Published: May 1997
Journal Articles
J. Vac. Sci. Technol. A 11, 1136–1141 (1993)
Published: July 1993