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Journal Articles

Machine-learning-enabled on-the-fly analysis of RHEED patterns during thin film deposition by molecular beam epitaxy

Tiffany C. Kaspar, Sarah Akers, Henry W. Sprueill, Arman H. Ter-Petrosyan, Jenna A. Bilbrey, Derek Hopkins, Ajay Harilal, Jijo Christudasjustus, Patrick Gemperline, Ryan B. Comes

J. Vac. Sci. Technol. A 43, 032702 (2025)

https://doi.org/10.1116/6.0004493

Published: March 2025

View articletitled, Machine-learning-enabled on-the-fly analysis of RHEED patterns during thin film deposition by molecular beam epitaxy

Journal Articles

Improvement of data analytics techniques in reflection high-energy electron diffraction to enable machine learning

Patrick T. Gemperline, Rajendra Paudel, Rama K. Vasudevan, Ryan B. Comes

J. Vac. Sci. Technol. A 43, 032701 (2025)

https://doi.org/10.1116/6.0004400

Published: March 2025

View articletitled, Improvement of data analytics techniques in reflection high-energy electron diffraction to enable machine learning

Journal Articles

Practical guide on chemometrics/informatics in x-ray photoelectron spectroscopy (XPS). II. Example applications of multiple methods to the degradation of cellulose and tartaric acid

Tahereh G. Avval, Hyrum Haack, Neal Gallagher, David Morgan, Pascal Bargiela, Neal Fairley, Vincent Fernandez, Matthew R. Linford

J. Vac. Sci. Technol. A 40, 063205 (2022)

https://doi.org/10.1116/6.0001969

Published: November 2022

View articletitled, Practical guide on chemometrics/informatics in x-ray photoelectron spectroscopy (XPS). II. Example applications of multiple methods to the degradation of cellulose and tartaric acid

Includes: Supplementary data

Journal Articles

Experimental design and analysis of activators regenerated by electron transfer-atom transfer radical polymerization experimental conditions for grafting sodium styrene sulfonate from titanium substrates

Rami N. Foster, Patrik K. Johansson, Nicole R. Tom, Patrick Koelsch, David G. Castner

J. Vac. Sci. Technol. A 33, 05E131 (2015)

https://doi.org/10.1116/1.4929506

Published: August 2015

View articletitled, Experimental design and analysis of activators regenerated by electron transfer-atom transfer radical polymerization experimental conditions for grafting sodium styrene sulfonate from titanium substrates

Includes: Supplementary data

Journal Articles

Surface characterization of plasma-polymerized cyclohexane thin film

Changrok Choi, Sanghak Yeo, Hyun Kyong Shon, Jeong Won Kim, Dae Won Moon, Donggeun Jung, Tae Geol Lee

J. Vac. Sci. Technol. A 25, 938–942 (2007)

https://doi.org/10.1116/1.2743641

Published: July 2007

View articletitled, Surface characterization of plasma-polymerized cyclohexane thin film

Journal Articles

Topography in secondary ion mass spectroscopy images

Srinath Rangarajan, Bonnie J. Tyler

J. Vac. Sci. Technol. A 24, 1730–1736 (2006)

https://doi.org/10.1116/1.2217980

Published: August 2006

View articletitled, Topography in secondary ion mass spectroscopy images

Journal Articles

Time-of-flight secondary ion mass spectrometry chemical imaging analysis of micropatterns of streptavidin and cells without labeling

Tae Geol Lee, Hyun Kyong Shon, Kyung-Bok Lee, Jinmo Kim, Insung S. Choi, Dae Won Moon

J. Vac. Sci. Technol. A 24, 1203–1207 (2006)

https://doi.org/10.1116/1.2206191

Published: June 2006

View articletitled, Time-of-flight secondary ion mass spectrometry chemical imaging analysis of micropatterns of streptavidin and cells without labeling

Journal Articles

Maximum likelihood principal component analysis of time-of-flight secondary ion mass spectrometry spectral images

Michael R. Keenan

J. Vac. Sci. Technol. A 23, 746–750 (2005)

https://doi.org/10.1116/1.1861935

Published: June 2005

View articletitled, Maximum likelihood principal component analysis of time-of-flight secondary ion mass spectrometry spectral images

Journal Articles

Plasma etching endpoint detection using multiple wavelengths for small open-area wafers

H. Henry Yue, S. Joe Qin, Joseph Wiseman, Anthony Toprac

J. Vac. Sci. Technol. A 19, 66–75 (2001)

https://doi.org/10.1116/1.1331294

Published: January 2001

View articletitled, Plasma etching endpoint detection using multiple wavelengths for small open-area wafers

Journal Articles

Improvements to the analysis of x-ray photoelectron spectra using a maximum entropy method for deconvolution

N. S. McIntyre, T. Do, H. Piao, S. J. Splinter

J. Vac. Sci. Technol. A 17, 1116–1121 (1999)

https://doi.org/10.1116/1.581783

Published: July 1999

View articletitled, Improvements to the analysis of x-ray photoelectron spectra using a maximum entropy method for deconvolution

Journal Articles

Quantitative analysis of sputtered α- and α+β-brass surfaces by using Auger electron spectroscopy with principal component analysis-target factor analysis

G. E. Hammer

J. Vac. Sci. Technol. A 17, 895–898 (1999)

https://doi.org/10.1116/1.582033

Published: May 1999

View articletitled, Quantitative analysis of sputtered α- and α+β-brass surfaces by using Auger electron spectroscopy with principal component analysis-target factor analysis

Journal Articles

Principal component analysis with integral Auger electron spectroscopy spectra

N. H. Turner, J. H. Wandass, F. L. Hutson

J. Vac. Sci. Technol. A 8, 4033–4038 (1990)

https://doi.org/10.1116/1.576472

Published: November 1990

View articletitled, Principal component analysis with integral Auger electron spectroscopy spectra

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Machine-learning-enabled on-the-fly analysis of RHEED patterns during thin film deposition by molecular beam epitaxy

Improvement of data analytics techniques in reflection high-energy electron diffraction to enable machine learning

Practical guide on chemometrics/informatics in x-ray photoelectron spectroscopy (XPS). II. Example applications of multiple methods to the degradation of cellulose and tartaric acid

Experimental design and analysis of activators regenerated by electron transfer-atom transfer radical polymerization experimental conditions for grafting sodium styrene sulfonate from titanium substrates

Surface characterization of plasma-polymerized cyclohexane thin film

Topography in secondary ion mass spectroscopy images

Time-of-flight secondary ion mass spectrometry chemical imaging analysis of micropatterns of streptavidin and cells without labeling

Maximum likelihood principal component analysis of time-of-flight secondary ion mass spectrometry spectral images

Plasma etching endpoint detection using multiple wavelengths for small open-area wafers

Improvements to the analysis of x-ray photoelectron spectra using a maximum entropy method for deconvolution

Quantitative analysis of sputtered α- and α+β-brass surfaces by using Auger electron spectroscopy with principal component analysis-target factor analysis

Principal component analysis with integral Auger electron spectroscopy spectra

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