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Journal Articles
J. Vac. Sci. Technol. A 40, 053204 (2022)
Published: September 2022
Includes: Supplementary data
Journal Articles
Ryuto Machida, Ryusuke Toda, Shinsuke Hara, Issei Watanabe, Kouichi Akahane, Sachie Fujikawa, Akifumi Kasamatsu, Hiroki I. Fujishiro
J. Vac. Sci. Technol. A 40, 032703 (2022)
Published: May 2022
Journal Articles
Hiroyuki Morita, Takumi Matsushima, Kisho Nakamura, Kenta Kaneko, Satoru Kaneko, Akifumi Matsuda, Mamoru Yoshimoto
J. Vac. Sci. Technol. A 39, 043414 (2021)
Published: June 2021
Journal Articles
J. Vac. Sci. Technol. A 34, 020603 (2016)
Published: February 2016
Journal Articles
J. Vac. Sci. Technol. A 32, 021306 (2014)
Published: February 2014
Journal Articles
J. Vac. Sci. Technol. A 32, 01A125 (2014)
Published: December 2013
Journal Articles
J. Vac. Sci. Technol. A 30, 051305 (2012)
Published: July 2012
Journal Articles
J. Vac. Sci. Technol. A 29, 021014 (2011)
Published: February 2011
Journal Articles
J. Vac. Sci. Technol. A 29, 031001 (2011)
Published: January 2011
Journal Articles
J. Vac. Sci. Technol. A 27, 1196–1203 (2009)
Published: August 2009
Journal Articles
J. Vac. Sci. Technol. A 27, 1107–1125 (2009)
Published: July 2009
Journal Articles
J. Vac. Sci. Technol. A 26, 1058–1061 (2008)
Published: July 2008
Journal Articles
J. Vac. Sci. Technol. A 20, 153–159 (2002)
Published: January 2002
Journal Articles
J. Vac. Sci. Technol. A 19, 700–702 (2001)
Published: March 2001
Journal Articles
J. Vac. Sci. Technol. A 16, 1449–1453 (1998)
Published: May 1998
Journal Articles
J. Vac. Sci. Technol. A 14, 2709–2720 (1996)
Published: September 1996
Journal Articles
J. Vac. Sci. Technol. A 14, 2547–2550 (1996)
Published: July 1996
Journal Articles
J. Vac. Sci. Technol. A 12, 1114–1119 (1994)
Published: July 1994
Journal Articles
K. M. Choudhary, P. S. Mangat, D. Kilday, G. Margaritondo, P. Soukiassian, H. I. Starnberg, Z. Hurych
J. Vac. Sci. Technol. A 7, 2024–2029 (1989)
Published: May 1989
Journal Articles
J. Vac. Sci. Technol. A 7, 1177–1180 (1989)
Published: May 1989
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