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Journal Articles

3D numerical modeling and simulation of β-Ga2O3 crystal growth by edge-defined film-fed growth method

Junlan Wang, Zaoyang Li, Chao Qi, Lijun Liu
Journal: Journal of Vacuum Science & Technology A
J. Vac. Sci. Technol. A 43, 013202 (2025)
https://doi.org/10.1116/6.0004170
Published: January 2025
View articletitled, 3D numerical modeling and simulation of β-Ga2O3 crystal growth by edge-defined film-fed growth method
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Journal Articles

3D hybrid simulation of postarc sheath expansion with nonuniform residual plasmas

Zhenxing Wang, Rui Li, Bo Cao, Haopo Liu, Jing Liu, Liqiong Sun, Yingsan Geng, Jianhua Wang
Journal: Journal of Vacuum Science & Technology A
J. Vac. Sci. Technol. A 42, 053008 (2024)
https://doi.org/10.1116/6.0003859
Published: September 2024
View articletitled, 3D hybrid simulation of postarc sheath expansion with nonuniform residual plasmas
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Journal Articles

Effect of growth conditions and reactor configuration on the growth uniformity of large-scale graphene by chemical vapor deposition

Qihang Li, Jinping Luo, Zaoyang Li, Mark H. Rummeli, Lijun Liu
Journal: Journal of Vacuum Science & Technology A
J. Vac. Sci. Technol. A 42, 033406 (2024)
https://doi.org/10.1116/6.0003487
Published: April 2024
View articletitled, Effect of growth conditions and reactor configuration on the growth uniformity of large-scale graphene by chemical vapor deposition
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Includes: Supplementary data
Journal Articles

Selective strategy of reactive hysteresis loop for coatings on alloy substrates with different moduli

Biao Si, Linfan Sun, Zhiwei Su, KaiCe Zhang, Jing Guo, Minqi Hua, Yanwen Zhou
Journal: Journal of Vacuum Science & Technology A
J. Vac. Sci. Technol. A 42, 013405 (2024)
https://doi.org/10.1116/6.0003127
Published: December 2023
View articletitled, Selective strategy of reactive hysteresis loop for coatings on alloy substrates with different moduli
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Journal Articles

Dynamical reverse folding and residual gas expansion models of flexible thin films

Xiaoheng Wang, Zhihe Xiao, Hongmei Ren, Zepeng He, Haorong Li, Debin Fu
Journal: Journal of Vacuum Science & Technology A
J. Vac. Sci. Technol. A 42, 013403 (2024)
https://doi.org/10.1116/6.0003224
Published: December 2023
View articletitled, Dynamical reverse folding and residual gas expansion models of flexible thin films
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Journal Articles

Simulation studies of floating field plate in β-Ga2O3 power devices and modules

Zhao Han, Guangwei Xu, Xueqiang Xiang, Weibing Hao, Yuanbiao Li, Xuanze Zhou, Xiaobing Yan, Shibing Long
Journal: Journal of Vacuum Science & Technology A
J. Vac. Sci. Technol. A 41, 053102 (2023)
https://doi.org/10.1116/6.0002650
Published: July 2023
View articletitled, Simulation studies of floating field plate in β-Ga2O3 power devices and modules
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Journal Articles

Theoretical analysis of thermal spikes during ion bombardment of amorphous silicon nitride surfaces

Erik S. Cheng, Peter L. G. Ventzek, Gyeong S. Hwang
Journal: Journal of Vacuum Science & Technology A
J. Vac. Sci. Technol. A 41, 043207 (2023)
https://doi.org/10.1116/6.0002656
Published: June 2023
View articletitled, Theoretical analysis of thermal spikes during ion bombardment of amorphous silicon nitride surfaces
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Includes: Supplementary data
Journal Articles

Control of the ion flux and energy distribution of dual-frequency capacitive RF plasmas by the variation of the driving voltages

Hwan Ho Kim, Ji Hyun Shin, Hae June Lee
Journal: Journal of Vacuum Science & Technology A
J. Vac. Sci. Technol. A 41, 023004 (2023)
https://doi.org/10.1116/6.0002242
Published: February 2023
View articletitled, Control of the ion flux and energy distribution of dual-frequency capacitive RF plasmas by the variation of the driving voltages
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Journal Articles

Nonlinear effects in low-energy ion sputtering of solids

Yuriy Kudriavtsev, Rene Asomoza, Angelica Hernandez, Dmitry Yu. Kazantsev, Boris Ya. Ber, Alexander N. Gorokhov
Journal: Journal of Vacuum Science & Technology A
J. Vac. Sci. Technol. A 38, 053203 (2020)
https://doi.org/10.1116/6.0000262
Published: July 2020
View articletitled, Nonlinear effects in low-energy ion sputtering of solids
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Journal Articles

Consistency and reproducibility in atomic layer deposition

Editor’s Pick
Henrik H. Sønsteby, Angel Yanguas-Gil, Jeffrey W. Elam
Journal: Journal of Vacuum Science & Technology A
J. Vac. Sci. Technol. A 38, 020804 (2020)
https://doi.org/10.1116/1.5140603
Published: February 2020
View articletitled, Consistency and reproducibility in atomic layer deposition
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Journal Articles

Formation of MoS2 from elemental Mo and S using reactive molecular dynamics simulations

Rimei Chen, Arben Jusufi, Alan Schilowitz, Ashlie Martini
Journal: Journal of Vacuum Science & Technology A
J. Vac. Sci. Technol. A 38, 022201 (2020)
https://doi.org/10.1116/1.5128377
Published: February 2020
View articletitled, Formation of MoS2 from elemental Mo and S using reactive molecular dynamics simulations
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Includes: Supplementary data
Journal Articles

Ion beam sputtering of silicon: Energy distributions of sputtered and scattered ions

Dmitry Kalanov, André Anders, Carsten Bundesmann
Journal: Journal of Vacuum Science & Technology A
J. Vac. Sci. Technol. A 37, 051507 (2019)
https://doi.org/10.1116/1.5114973
Published: August 2019
View articletitled, Ion beam sputtering of silicon: Energy distributions of sputtered and scattered ions
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Journal Articles

Argon clustering in silicon under low-energy irradiation: Molecular dynamics simulation with different Ar–Si potentials

Anastasia A. Sycheva, Ekaterina N. Voronina, Tatyana V. Rakhimova, Alexander T. Rakhimov
Journal: Journal of Vacuum Science & Technology A
J. Vac. Sci. Technol. A 36, 061303 (2018)
https://doi.org/10.1116/1.5050325
Published: November 2018
View articletitled, Argon clustering in silicon under low-energy irradiation: Molecular dynamics simulation with different Ar–Si potentials
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Journal Articles

Measurement and simulation of rarefied Couette Poiseuille flow with variable cross section

Christopher Huck, Heiko Pleskun, Andreas Brümmer
Journal: Journal of Vacuum Science & Technology A
J. Vac. Sci. Technol. A 36, 031606 (2018)
https://doi.org/10.1116/1.5024899
Published: May 2018
View articletitled, Measurement and simulation of rarefied Couette Poiseuille flow with variable cross section
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Journal Articles

Experimental and simulation approach for process optimization of atomic layer deposited thin films in high aspect ratio 3D structures

Matthias C. Schwille, Timo Schössler, Jonas Barth, Martin Knaut, Florian Schön, Arnim Höchst, Martin Oettel, Johann W. Bartha
Journal: Journal of Vacuum Science & Technology A
J. Vac. Sci. Technol. A 35, 01B118 (2017)
https://doi.org/10.1116/1.4971196
Published: December 2016
View articletitled, Experimental and simulation approach for process optimization of atomic layer deposited thin films in high aspect ratio 3D structures
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Journal Articles

Fluid simulation of the bias effect in inductive/capacitive discharges

Yu-Ru Zhang, Fei Gao, Xue-Chun Li, Annemie Bogaerts, You-Nian Wang
Journal: Journal of Vacuum Science & Technology A
J. Vac. Sci. Technol. A 33, 061303 (2015)
https://doi.org/10.1116/1.4928033
Published: August 2015
View articletitled, Fluid simulation of the bias effect in inductive/capacitive discharges
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Journal Articles

Nucleation of diindenoperylene and pentacene at thermal and hyperthermal incident kinetic energies

Edward R. Kish, Tushar V. Desai, Douglas R. Greer, Arthur R. Woll, James R. Engstrom
Journal: Journal of Vacuum Science & Technology A
J. Vac. Sci. Technol. A 33, 031511 (2015)
https://doi.org/10.1116/1.4916885
Published: April 2015
View articletitled, Nucleation of diindenoperylene and pentacene at thermal and hyperthermal incident kinetic energies
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Includes: Supplementary data
Journal Articles

Measurements and modeling of the impact of weak magnetic fields on the plasma properties of a planar slot antenna driven plasma source

Jun Yoshikawa, Yoshio Susa, Peter L. G. Ventzek
Journal: Journal of Vacuum Science & Technology A
J. Vac. Sci. Technol. A 33, 031303 (2015)
https://doi.org/10.1116/1.4916018
Published: March 2015
View articletitled, Measurements and modeling of the impact of weak magnetic fields on the plasma properties of a planar slot antenna driven plasma source
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Journal Articles

Molecular dynamic simulation of damage formation at Si vertical walls by grazing incidence of energetic ions in gate etching processes

Kohei Mizotani, Michiro Isobe, Satoshi Hamaguchi
Journal: Journal of Vacuum Science & Technology A
J. Vac. Sci. Technol. A 33, 021313 (2015)
https://doi.org/10.1116/1.4907724
Published: February 2015
View articletitled, Molecular dynamic simulation of damage formation at Si vertical walls by grazing incidence of energetic ions in gate etching processes
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Journal Articles

On the physical and chemical details of alumina atomic layer deposition: A combined experimental and numerical approach

Dongqing Pan, Lulu Ma, Yuanyuan Xie, Tien Chien Jen, Chris Yuan
Journal: Journal of Vacuum Science & Technology A
J. Vac. Sci. Technol. A 33, 021511 (2015)
https://doi.org/10.1116/1.4905726
Published: January 2015
View articletitled, On the physical and chemical details of alumina atomic layer deposition: A combined experimental and numerical approach
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