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Journal Articles

Modeling of microtrenching and bowing effects in nanoscale Si inductively coupled plasma etching process

Ziyi Hu, Hua Shao, Junjie Li, Panpan Lai, Wenrui Wang, Chen Li, Qi Yan, Xiaobin He, Junfeng Li, Tao Yang, Rui Chen, Yayi Wei
Journal: Journal of Vacuum Science & Technology A
J. Vac. Sci. Technol. A 41, 063113 (2023)
https://doi.org/10.1116/6.0003032
Published: November 2023
View article titled, Modeling of microtrenching and bowing effects in nanoscale Si inductively coupled plasma etching process
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Journal Articles

Simulation studies of floating field plate in β-Ga2O3 power devices and modules

Zhao Han, Guangwei Xu, Xueqiang Xiang, Weibing Hao, Yuanbiao Li, Xuanze Zhou, Xiaobing Yan, Shibing Long
Journal: Journal of Vacuum Science & Technology A
J. Vac. Sci. Technol. A 41, 053102 (2023)
https://doi.org/10.1116/6.0002650
Published: July 2023
View article titled, Simulation studies of floating field plate in <em>β</em>-Ga<sub>2</sub>O<sub>3</sub> power devices and modules
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Journal Articles

Size distribution of clusters and nucleation preference of trimers during SiC (0001) surface epitaxial growth under low coverage

Wensen Ai, Xuejiang Chen
Journal: Journal of Vacuum Science & Technology A
J. Vac. Sci. Technol. A 41, 042713 (2023)
https://doi.org/10.1116/6.0002686
Published: June 2023
View article titled, Size distribution of clusters and nucleation preference of trimers during SiC (0001) surface epitaxial growth under low coverage
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Journal Articles

Theoretical analysis of thermal spikes during ion bombardment of amorphous silicon nitride surfaces

Erik S. Cheng, Peter L. G. Ventzek, Gyeong S. Hwang
Journal: Journal of Vacuum Science & Technology A
J. Vac. Sci. Technol. A 41, 043207 (2023)
https://doi.org/10.1116/6.0002656
Published: June 2023
View article titled, Theoretical analysis of thermal spikes during ion bombardment of amorphous silicon nitride surfaces
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Includes: Supplementary data
Journal Articles

Control of the ion flux and energy distribution of dual-frequency capacitive RF plasmas by the variation of the driving voltages

Hwan Ho Kim, Ji Hyun Shin, Hae June Lee
Journal: Journal of Vacuum Science & Technology A
J. Vac. Sci. Technol. A 41, 023004 (2023)
https://doi.org/10.1116/6.0002242
Published: February 2023
View article titled, Control of the ion flux and energy distribution of dual-frequency capacitive RF plasmas by the variation of the driving voltages
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Journal Articles

Voltage waveform tailoring for high aspect ratio plasma etching of SiO2 using Ar/CF4/O2 mixtures: Consequences of ion and electron distributions on etch profiles

Florian Krüger, Hyunjae Lee, Sang Ki Nam, Mark J. Kushner
Journal: Journal of Vacuum Science & Technology A
J. Vac. Sci. Technol. A 41, 013006 (2023)
https://doi.org/10.1116/6.0002290
Published: December 2022
View article titled, Voltage waveform tailoring for high aspect ratio plasma etching of SiO<sub>2</sub> using Ar/CF<sub>4</sub>/O<sub>2</sub> mixtures: Consequences of ion and electron distributions on etch profiles
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Journal Articles

Coalescence of ultrathin films by atomic layer deposition or chemical vapor deposition: Models of the minimum thickness based on nucleation and growth rates

Diana K. LaFollette, Kinsey L. Canova, Zhejun V. Zhang, John R. Abelson
Journal: Journal of Vacuum Science & Technology A
J. Vac. Sci. Technol. A 40, 023403 (2022)
https://doi.org/10.1116/6.0001562
Published: January 2022
View article titled, Coalescence of ultrathin films by atomic layer deposition or chemical vapor deposition: Models of the minimum thickness based on nucleation and growth rates
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Includes: Supplementary data
Journal Articles

Step barrier effects during early stages of the kinetic roughening of fcc(111) surfaces

Joachim Wollschläger, Mats I. Larsson
Journal: Journal of Vacuum Science & Technology A
J. Vac. Sci. Technol. A 40, 013210 (2022)
https://doi.org/10.1116/6.0001410
Published: December 2021
View article titled, Step barrier effects during early stages of the kinetic roughening of fcc(111) surfaces
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Journal Articles

Betavoltaic cell based on Ni/β-Ga2O3 and 63Ni source

Eugene B. Yakimov, Alexander Y. Polyakov, Stephen J. Pearton
Journal: Journal of Vacuum Science & Technology A
J. Vac. Sci. Technol. A 40, 010401 (2022)
https://doi.org/10.1116/6.0001533
Published: November 2021
View article titled, Betavoltaic cell based on Ni/β-Ga<sub>2</sub>O<sub>3</sub> and <sup>63</sup>Ni source
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Includes: Supplementary data
Journal Articles

Effects of structured electrodes on electron power absorption and plasma uniformity in capacitive RF discharges

Li Wang, Peter Hartmann, Zoltán Donkó, Yuan-Hong Song, Julian Schulze
Journal: Journal of Vacuum Science & Technology A
J. Vac. Sci. Technol. A 39, 063004 (2021)
https://doi.org/10.1116/6.0001327
Published: October 2021
View article titled, Effects of structured electrodes on electron power absorption and plasma uniformity in capacitive RF discharges
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Journal Articles

Impact of ion species on ion beam sputtered Ta2O5 layer quality parameters and on corresponding process productivity: A preinvestigation for large-area coatings

Wjatscheslaw Sakiew, Philippe Schwerdtner, Marco Jupé, Andreas Pflug, Detlev Ristau
Journal: Journal of Vacuum Science & Technology A
J. Vac. Sci. Technol. A 39, 063402 (2021)
https://doi.org/10.1116/6.0001224
Published: September 2021
View article titled, Impact of ion species on ion beam sputtered Ta<sub>2</sub>O<sub>5</sub> layer quality parameters and on corresponding process productivity: A preinvestigation for large-area coatings
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Journal Articles

Nonadiabatic localization of H2 in the field of two external positive tip charges

W. Schattke, M. A. Van Hove, R. Díez Muiño
Journal: Journal of Vacuum Science & Technology A
J. Vac. Sci. Technol. A 39, 053206 (2021)
https://doi.org/10.1116/6.0001138
Published: August 2021
View article titled, Nonadiabatic localization of H<sub>2</sub> in the field of two external positive tip charges
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Journal Articles

Practical guides for x-ray photoelectron spectroscopy (XPS): Interpreting the carbon 1s spectrum

Thomas R. Gengenbach, George H. Major, Matthew R. Linford, Christopher D. Easton
Journal: Journal of Vacuum Science & Technology A
J. Vac. Sci. Technol. A 39, 013204 (2021)
https://doi.org/10.1116/6.0000682
Published: January 2021
View article titled, Practical guides for x-ray photoelectron spectroscopy (XPS): Interpreting the carbon 1s spectrum
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Journal Articles

Nonlinear effects in low-energy ion sputtering of solids

Yuriy Kudriavtsev, Rene Asomoza, Angelica Hernandez, Dmitry Yu. Kazantsev, Boris Ya. Ber, Alexander N. Gorokhov
Journal: Journal of Vacuum Science & Technology A
J. Vac. Sci. Technol. A 38, 053203 (2020)
https://doi.org/10.1116/6.0000262
Published: July 2020
View article titled, Nonlinear effects in low-energy ion sputtering of solids
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Journal Articles

Improved epitaxial growth of TbAs film on III–V semiconductors

Yuejing Wang, James Bork, Stephanie Law, Joshua M. O. Zide
Journal: Journal of Vacuum Science & Technology A
J. Vac. Sci. Technol. A 38, 033405 (2020)
https://doi.org/10.1116/1.5144999
Published: April 2020
View article titled, Improved epitaxial growth of TbAs film on III–V semiconductors
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Journal Articles

Plasma polymerization of cyclopropylamine in a low-pressure cylindrical magnetron reactor: A PIC-MC study of the roles of ions and radicals

Stella Mathioudaki, Cédric R. Vandenabeele, Romain Tonneau, Andreas Pflug, Jonathan Tennyson, Stéphane Lucas
Journal: Journal of Vacuum Science & Technology A
J. Vac. Sci. Technol. A 38, 033003 (2020)
https://doi.org/10.1116/1.5142913
Published: April 2020
View article titled, Plasma polymerization of cyclopropylamine in a low-pressure cylindrical magnetron reactor: A PIC-MC study of the roles of ions and radicals
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Journal Articles

Modularity optimization for enhancing edge detection in microstructural features using 3D atomic chemical scale imaging

Arpan Mukherjee, Scott Broderick, Krishna Rajan
Journal: Journal of Vacuum Science & Technology A
J. Vac. Sci. Technol. A 38, 033207 (2020)
https://doi.org/10.1116/1.5143017
Published: March 2020
View article titled, Modularity optimization for enhancing edge detection in microstructural features using 3D atomic chemical scale imaging
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Journal Articles

Formation of MoS2 from elemental Mo and S using reactive molecular dynamics simulations

Rimei Chen, Arben Jusufi, Alan Schilowitz, Ashlie Martini
Journal: Journal of Vacuum Science & Technology A
J. Vac. Sci. Technol. A 38, 022201 (2020)
https://doi.org/10.1116/1.5128377
Published: February 2020
View article titled, Formation of MoS<sub>2</sub> from elemental Mo and S using reactive molecular dynamics simulations
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Includes: Supplementary data
Journal Articles

Consistency and reproducibility in atomic layer deposition

Henrik H. Sønsteby, Angel Yanguas-Gil, Jeffrey W. Elam
Journal: Journal of Vacuum Science & Technology A
J. Vac. Sci. Technol. A 38, 020804 (2020)
https://doi.org/10.1116/1.5140603
Published: February 2020
View article titled, Consistency and reproducibility in atomic layer deposition
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Journal Articles

Ion beam sputtering of silicon: Energy distributions of sputtered and scattered ions

Dmitry Kalanov, André Anders, Carsten Bundesmann
Journal: Journal of Vacuum Science & Technology A
J. Vac. Sci. Technol. A 37, 051507 (2019)
https://doi.org/10.1116/1.5114973
Published: August 2019
View article titled, Ion beam sputtering of silicon: Energy distributions of sputtered and scattered ions
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