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Journal Articles

Mechanical size effects of novel core-shell structured liquid gallium nanoparticles

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Wuxu Zhang, Jinyun Liu, Zidong He, HuaLi Yang, ShiYing Li, Feng Xu, Qi Zhang, Yiwei Liu, Yuanzao Wu, Baoru Bian, Ji Lin, Jie Shang, Run-Wei Li
Journal: Journal of Vacuum Science & Technology A
J. Vac. Sci. Technol. A 43, 043201 (2025)
https://doi.org/10.1116/6.0004403
Published: May 2025
View articletitled, Mechanical size effects of novel core-shell structured liquid gallium nanoparticles
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Journal Articles

3D numerical modeling and simulation of β-Ga2O3 crystal growth by edge-defined film-fed growth method

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Junlan Wang, Zaoyang Li, Chao Qi, Lijun Liu
Journal: Journal of Vacuum Science & Technology A
J. Vac. Sci. Technol. A 43, 013202 (2025)
https://doi.org/10.1116/6.0004170
Published: January 2025
View articletitled, 3D numerical modeling and simulation of β-Ga2O3 crystal growth by edge-defined film-fed growth method
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Journal Articles

Enhancing erosion resistance of ceramic/metal multilayer coating by crack inhibition design

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Zhaolu Zhang, Yuxin Ren, Guangyu He, Zhufang Yang
Journal: Journal of Vacuum Science & Technology A
J. Vac. Sci. Technol. A 42, 053107 (2024)
https://doi.org/10.1116/6.0003857
Published: August 2024
View articletitled, Enhancing erosion resistance of ceramic/metal multilayer coating by crack inhibition design
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Journal Articles

Impact of sputtering and redeposition on the morphological profile evolution during ion-beam etching of blazed gratings

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Ze-Xuan Liu, Xing-Yu Li, Quan-Zhi Zhang, Julian Schulze, Ruo-Bing Zhang, You-Nian Wang
Journal: Journal of Vacuum Science & Technology A
J. Vac. Sci. Technol. A 42, 053006 (2024)
https://doi.org/10.1116/6.0003745
Published: July 2024
View articletitled, Impact of sputtering and redeposition on the morphological profile evolution during ion-beam etching of blazed gratings
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Journal Articles

Dynamical reverse folding and residual gas expansion models of flexible thin films

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Xiaoheng Wang, Zhihe Xiao, Hongmei Ren, Zepeng He, Haorong Li, Debin Fu
Journal: Journal of Vacuum Science & Technology A
J. Vac. Sci. Technol. A 42, 013403 (2024)
https://doi.org/10.1116/6.0003224
Published: December 2023
View articletitled, Dynamical reverse folding and residual gas expansion models of flexible thin films
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Journal Articles

Study of Al2124-SiC nanocomposites by an improved statistical nanoindentation methodology

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Esteban Broitman, Yuri Kadin, Predrag Andric
Journal: Journal of Vacuum Science & Technology A
J. Vac. Sci. Technol. A 41, 063210 (2023)
https://doi.org/10.1116/6.0003048
Published: November 2023
View articletitled, Study of Al2124-SiC nanocomposites by an improved statistical nanoindentation methodology
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Journal Articles

Band structure and strain distribution of InAs quantum dots encapsulated in (Al)GaAs asymmetric matrixes

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J. P. Olvera-Enríquez, L. I. Espinosa-Vega, I. E. Cortés-Mestizo, C. A. Mercado-Ornelas, F. E. Perea-Parrales, A. Belio-Manzano, C. M. Yee-Rendón, V. H. Méndez-García
Journal: Journal of Vacuum Science & Technology A
J. Vac. Sci. Technol. A 41, 042714 (2023)
https://doi.org/10.1116/6.0002674
Published: July 2023
View articletitled, Band structure and strain distribution of InAs quantum dots encapsulated in (Al)GaAs asymmetric matrixes
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Journal Articles

Determination of stress in thin films using micro-machined buckled membranes

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C. Malhaire, M. Granata, D. Hofman, A. Amato, V. Martinez, G. Cagnoli, A. Lemaitre, N. Shcheblanov
Journal: Journal of Vacuum Science & Technology A
J. Vac. Sci. Technol. A 41, 043401 (2023)
https://doi.org/10.1116/6.0002590
Published: May 2023
View articletitled, Determination of stress in thin films using micro-machined buckled membranes
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Journal Articles

Neutral transport during etching of high aspect ratio features

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Theodoros Panagopoulos, Thorsten Lill
Journal: Journal of Vacuum Science & Technology A
J. Vac. Sci. Technol. A 41, 033006 (2023)
https://doi.org/10.1116/6.0002468
Published: April 2023
View articletitled, Neutral transport during etching of high aspect ratio features
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Journal Articles

Optimization of three-dimensional metamaterials for terahertz energy harvesting

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Shendu Yang, Zachary Thacker, Evan Allison, Patrick Pinhero
Journal: Journal of Vacuum Science & Technology A
J. Vac. Sci. Technol. A 39, 062801 (2021)
https://doi.org/10.1116/6.0001106
Published: September 2021
View articletitled, Optimization of three-dimensional metamaterials for terahertz energy harvesting
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Journal Articles

Oblique angle initiated chemical vapor deposition for patterning film growth

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Nicholas A. Welchert, Christine Cheng, Prathamesh Karandikar, Malancha Gupta
Journal: Journal of Vacuum Science & Technology A
J. Vac. Sci. Technol. A 38, 063405 (2020)
https://doi.org/10.1116/6.0000524
Published: October 2020
View articletitled, Oblique angle initiated chemical vapor deposition for patterning film growth
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Journal Articles

Spatially controlled stem cell differentiation via morphogen gradients: A comparison of static and dynamic microfluidic platforms

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Kiara W. Cui, Leeya Engel, Carolyn E. Dundes, Tina C. Nguyen, Kyle M. Loh, Alexander R. Dunn
Journal: Journal of Vacuum Science & Technology A
J. Vac. Sci. Technol. A 38, 033205 (2020)
https://doi.org/10.1116/1.5142012
Published: March 2020
View articletitled, Spatially controlled stem cell differentiation via morphogen gradients: A comparison of static and dynamic microfluidic platforms
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Includes: Supplementary data
Journal Articles

Uniform and smooth molybdenum film produced through picosecond pulsed laser deposition

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Shoujun Dai, Jin Yu, Zeqiang Mo, Jinduo Wang, Jianguo He, Jingjing Meng, Xiaodong Wang
Journal: Journal of Vacuum Science & Technology A
J. Vac. Sci. Technol. A 37, 061506 (2019)
https://doi.org/10.1116/1.5113970
Published: October 2019
View articletitled, Uniform and smooth molybdenum film produced through picosecond pulsed laser deposition
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Journal Articles

Characterization of a pulsed low pressure argon discharge in a cylindrical magnetron reactor by plasma diagnostic and 3D plasma modeling

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Stella Mathioudaki, Cédric Vandenabeele, Romain Tonneau, Andreas Pflug, Stéphane Lucas
Journal: Journal of Vacuum Science & Technology A
J. Vac. Sci. Technol. A 37, 031301 (2019)
https://doi.org/10.1116/1.5064690
Published: March 2019
View articletitled, Characterization of a pulsed low pressure argon discharge in a cylindrical magnetron reactor by plasma diagnostic and 3D plasma modeling
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Journal Articles

Mechanistic modeling study of atomic layer deposition process optimization in a fluidized bed reactor

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Chen-Long Duan, Peng-Hui Zhu, Zhang Deng, Yun Li, Bin Shan, Hai-Sheng Fang, Guang Feng, Rong Chen
Journal: Journal of Vacuum Science & Technology A
J. Vac. Sci. Technol. A 35, 01B102 (2017)
https://doi.org/10.1116/1.4964848
Published: October 2016
View articletitled, Mechanistic modeling study of atomic layer deposition process optimization in a fluidized bed reactor
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Journal Articles

Intense pulsed light annealing of copper zinc tin sulfide nanocrystal coatings

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Bryce A. Williams, Michelle A. Smeaton, Collin S. Holgate, Nancy D. Trejo, Lorraine F. Francis, Eray S. Aydil
Journal: Journal of Vacuum Science & Technology A
J. Vac. Sci. Technol. A 34, 051204 (2016)
https://doi.org/10.1116/1.4961661
Published: August 2016
View articletitled, Intense pulsed light annealing of copper zinc tin sulfide nanocrystal coatings
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Includes: Supplementary data
Journal Articles

Enhanced interfacial thermal transport in pnictogen tellurides metallized with a lead-free solder alloy

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Devender, Kelly Lofgreen, Shankar Devasenathipathy, Johanna Swan, Ravi Mahajan, Theodorian Borca-Tasciuc, Ganpati Ramanath
Journal: Journal of Vacuum Science & Technology A
J. Vac. Sci. Technol. A 33, 060611 (2015)
https://doi.org/10.1116/1.4935446
Published: November 2015
View articletitled, Enhanced interfacial thermal transport in pnictogen tellurides metallized with a lead-free solder alloy
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Journal Articles

Mechanistic modeling study on process optimization and precursor utilization with atmospheric spatial atomic layer deposition

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Zhang Deng, Wenjie He, Chenlong Duan, Rong Chen, Bin Shan
Journal: Journal of Vacuum Science & Technology A
J. Vac. Sci. Technol. A 34, 01A108 (2016)
https://doi.org/10.1116/1.4932564
Published: October 2015
View articletitled, Mechanistic modeling study on process optimization and precursor utilization with atmospheric spatial atomic layer deposition
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Journal Articles

High power pulsed magnetron sputtering: A method to increase deposition rate

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Priya Raman, Ivan A. Shchelkanov, Jake McLain, David N Ruzic
Journal: Journal of Vacuum Science & Technology A
J. Vac. Sci. Technol. A 33, 031304 (2015)
https://doi.org/10.1116/1.4916108
Published: March 2015
View articletitled, High power pulsed magnetron sputtering: A method to increase deposition rate
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Journal Articles

On the physical and chemical details of alumina atomic layer deposition: A combined experimental and numerical approach

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Dongqing Pan, Lulu Ma, Yuanyuan Xie, Tien Chien Jen, Chris Yuan
Journal: Journal of Vacuum Science & Technology A
J. Vac. Sci. Technol. A 33, 021511 (2015)
https://doi.org/10.1116/1.4905726
Published: January 2015
View articletitled, On the physical and chemical details of alumina atomic layer deposition: A combined experimental and numerical approach
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