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Journal Articles

Plasma-enhanced atomic layer deposition of molybdenum carbide and carbonitride films using bis(isopropylcyclopentadienyl)molybdenum(IV) dihydride and an H2/N2/Ar plasma

Wangu Kang, Ji Sang Ahn, Jeong Hwan Han
Journal: Journal of Vacuum Science & Technology A
J. Vac. Sci. Technol. A 41, 062401 (2023)
https://doi.org/10.1116/6.0002970
Published: September 2023
View article titled, Plasma-enhanced atomic layer deposition of molybdenum carbide and carbonitride films using bis(isopropylcyclopentadienyl)molybdenum(IV) dihydride and an H<sub>2</sub>/N<sub>2</sub>/Ar plasma
Open the PDF for Plasma-enhanced atomic layer deposition of molybdenum carbide and carbonitride films using bis(isopropylcyclopentadienyl)molybdenum(IV) dihydride and an H<sub>2</sub>/N<sub>2</sub>/Ar plasma in another window
Includes: Supplementary data
Journal Articles

Low-resistivity molybdenum obtained by atomic layer deposition

Kees van der Zouw, Bernhard Y. van der Wel, Antonius A. I. Aarnink, Rob A. M. Wolters, Dirk J. Gravesteijn, Alexey Y. Kovalgin
Journal: Journal of Vacuum Science & Technology A
J. Vac. Sci. Technol. A 41, 052402 (2023)
https://doi.org/10.1116/6.0002804
Published: August 2023
View article titled, Low-resistivity molybdenum obtained by atomic layer deposition
Open the PDF for Low-resistivity molybdenum obtained by atomic layer deposition in another window
Includes: Supplementary data
Journal Articles

Vertical NiO/β-Ga2O3 rectifiers grown by metalorganic chemical vapor deposition

Hsiao-Hsuan Wan, Jian-Sian Li, Chao-Ching Chiang, Fan Ren, Timothy Jinsoo Yoo, Honggyu Kim, Andrei Osinsky, Fikadu Alema, Stephen J. Pearton
Journal: Journal of Vacuum Science & Technology A
J. Vac. Sci. Technol. A 41, 052707 (2023)
https://doi.org/10.1116/6.0002884
Published: August 2023
View article titled, Vertical NiO/β-Ga<sub>2</sub>O<sub>3</sub> rectifiers grown by metalorganic chemical vapor deposition
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Journal Articles

Mechanical and optical properties of amorphous silicon nitride-based films prepared by electron cyclotron resonance plasma-enhanced chemical vapor deposition

Brahim Ahammou, Paramita Bhattacharyya, Christophe Levallois, Fahmida Azmi, Jean-Pierre Landesman, Peter Mascher
Journal: Journal of Vacuum Science & Technology A
J. Vac. Sci. Technol. A 41, 053113 (2023)
https://doi.org/10.1116/6.0002896
Published: August 2023
View article titled, Mechanical and optical properties of amorphous silicon nitride-based films prepared by electron cyclotron resonance plasma-enhanced chemical vapor deposition
Open the PDF for Mechanical and optical properties of amorphous silicon nitride-based films prepared by electron cyclotron resonance plasma-enhanced chemical vapor deposition in another window
Journal Articles

Impacts of specific element-treated three-dimensional GaN layer on characteristics of nonpolar a-plane GaN film

Yifeng Xu, Xiong Zhang, Ruiting Fang, Xuguang Luo, Lin Chen, Shenyu Xu, Zhiyi Lou, Jia Cui, Guohua Hu
Journal: Journal of Vacuum Science & Technology A
J. Vac. Sci. Technol. A 41, 052706 (2023)
https://doi.org/10.1116/6.0002834
Published: August 2023
View article titled, Impacts of specific element-treated three-dimensional GaN layer on characteristics of nonpolar <em>a</em>-plane GaN film
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Journal Articles

Atomic layer deposition of Al2O3 interlayer for improving AlN growth on silicon substrates

Rony Saha, Jonathan Anderson, Mark W. Holtz, Edwin L. Piner
Journal: Journal of Vacuum Science & Technology A
J. Vac. Sci. Technol. A 41, 053208 (2023)
https://doi.org/10.1116/6.0002760
Published: August 2023
View article titled, Atomic layer deposition of Al<sub>2</sub>O<sub>3</sub> interlayer for improving AlN growth on silicon substrates
Open the PDF for Atomic layer deposition of Al<sub>2</sub>O<sub>3</sub> interlayer for improving AlN growth on silicon substrates in another window
Journal Articles

Plasmonic black coatings with broadband absorption for space applications

Hanjörg Wagner, Valentin Ripka, Andrea Dellith, Jan Dellith, Florian Wittkämper, Uwe Hübner, Mario Ziegler
Journal: Journal of Vacuum Science & Technology A
J. Vac. Sci. Technol. A 41, 053209 (2023)
https://doi.org/10.1116/6.0002821
Published: August 2023
View article titled, Plasmonic black coatings with broadband absorption for space applications
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Includes: Supplementary data
Journal Articles

Enhanced structural and optical properties of semipolar ( 11 2 ¯ 2 ) AlGaN film with insertion of AlN/AlGaN superlattice

Xuguang Luo, Xiong Zhang, Ruiting Fang, Lin Chen, Shenyu Xu, Jia Cui, Zhiyi Lou, Yifeng Xu, Shuchang Wang, Guohua Hu
Journal: Journal of Vacuum Science & Technology A
J. Vac. Sci. Technol. A 41, 052705 (2023)
https://doi.org/10.1116/6.0002870
Published: July 2023
View article titled, Enhanced structural and optical properties of semipolar ( 11 2 ¯ 2 ) AlGaN film with insertion of AlN/AlGaN superlattice
Open the PDF for Enhanced structural and optical properties of semipolar ( 11 2 ¯ 2 ) AlGaN film with insertion of AlN/AlGaN superlattice in another window
Journal Articles

Plasma deposited carbon containing zirconia films as thermal barriers

Vitali Bedarev, Philipp A. Maaß, Anna Thewes, Marc Böke, Achim von Keudell
Journal: Journal of Vacuum Science & Technology A
J. Vac. Sci. Technol. A 41, 053001 (2023)
https://doi.org/10.1116/6.0002745
Published: July 2023
View article titled, Plasma deposited carbon containing zirconia films as thermal barriers
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Journal Articles

Stages of self-arrangement in growth of nanostructured graphene films related to the flow of ionized species during plasma-enhanced chemical vapor deposition

Algimantas Lukša, Viktorija Nargelienė, Marius Treideris, Virginijus Bukauskas, Martynas Talaikis, Arūnas Šetkus