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Journal Articles
J. Vac. Sci. Technol. A 41, 063208 (2023)
Published: October 2023
Journal Articles
J. Vac. Sci. Technol. A 41, 033201 (2023)
Published: March 2023
Journal Articles
J. Vac. Sci. Technol. A 40, 063204 (2022)
Published: October 2022
Includes: Supplementary data
Journal Articles
Alessandro R. Mazza, Xingyao Gao, Daniel J. Rossi, Brianna L. Musico, Tyler W. Valentine, Zachary Kennedy, Jie Zhang, Jason Lapano, Veerle Keppens, Robert G. Moore, Matthew Brahlek, Christina M. Rost, Thomas Z. Ward
J. Vac. Sci. Technol. A 40, 013404 (2022)
Published: November 2021
Includes: Supplementary data
Journal Articles
J. Vac. Sci. Technol. A 39, 063203 (2021)
Published: September 2021
Journal Articles
J. Vac. Sci. Technol. A 39, 063401 (2021)
Published: September 2021
Journal Articles
J. Vac. Sci. Technol. A 39, 040801 (2021)
Published: June 2021
Journal Articles
J. G. Tobin, S. Nowak, S.-W. Yu, P. Roussel, R. Alonso-Mori, T. Kroll, D. Nordlund, T.-C. Weng, D. Sokaras
J. Vac. Sci. Technol. A 39, 043205 (2021)
Published: June 2021
Journal Articles
J. Vac. Sci. Technol. A 38, 036001 (2020)
Published: May 2020
Journal Articles
J. Vac. Sci. Technol. A 33, 033001 (2015)
Published: March 2015
Journal Articles
J. Vac. Sci. Technol. A 32, 01A125 (2014)
Published: December 2013
Journal Articles
Andrew Short, Leila Jewell, Sage Doshay, Carena Church, Trevor Keiber, Frank Bridges, Sue Carter, Glenn Alers
J. Vac. Sci. Technol. A 31, 01A138 (2013)
Published: December 2012
Journal Articles
F. S. Aguirre-Tostado, A. Herrera-Gómez, J. C. Woicik, R. Droopad, Z. Yu, D. G. Schlom, J. Karapetrova, P. Zschack, P. Pianetta
J. Vac. Sci. Technol. A 22, 1356–1360 (2004)
Published: July 2004
Journal Articles
Dmitry A. Kukuruznyak, Sang-Wook Han, Moon-Hwan Lee, Kimberly A. Omland, Michael C. Gregg, Edward A. Stern, Fumio S. Ohuchi
J. Vac. Sci. Technol. A 19, 1923–1928 (2001)
Published: July 2001
Journal Articles
J. Vac. Sci. Technol. A 19, 136–144 (2001)
Published: January 2001
Journal Articles
J. Vac. Sci. Technol. A 15, 284–291 (1997)
Published: March 1997
Journal Articles
J. Vac. Sci. Technol. A 11, 1823–1829 (1993)
Published: July 1993
Journal Articles
J. Vac. Sci. Technol. A 11, 58–65 (1993)
Published: January 1993
Journal Articles
J. C. Woicik, T. Kendelewicz, K. E. Miyano, P. L. Cowan, M. Richter, B. A. Karlin, C. E. Bouldin, P. Pianetta, W. E. Spicer
J. Vac. Sci. Technol. A 10, 2041–2045 (1992)
Published: July 1992
Journal Articles
J. Vac. Sci. Technol. A 9, 430–433 (1991)
Published: May 1991
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