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Journal Articles
J. Vac. Sci. Technol. A 43, 022413 (2025)
Published: March 2025
Journal Articles
J. Vac. Sci. Technol. A 42, 061601 (2024)
Published: October 2024
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J. Vac. Sci. Technol. A 42, 053107 (2024)
Published: August 2024
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J. Vac. Sci. Technol. A 42, 053202 (2024)
Published: July 2024
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J. Vac. Sci. Technol. A 42, 053102 (2024)
Published: July 2024
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J. Vac. Sci. Technol. A 42, 043005 (2024)
Published: June 2024
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J. Vac. Sci. Technol. A 42, 043403 (2024)
Published: May 2024
Journal Articles
J. Vac. Sci. Technol. A 42, 033202 (2024)
Published: March 2024
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J. Vac. Sci. Technol. A 42, 033102 (2024)
Published: March 2024
Journal Articles
J. Vac. Sci. Technol. A 42, 023206 (2024)
Published: February 2024
Journal Articles
Changda Zhu, Xi Qiu, Yuanming Li, Wei Zhang, Jian Yang, Yilong Zhong, Jiuguo Deng, Mingyang Zhou, Ning Liu, Jijun Yang
J. Vac. Sci. Technol. A 42, 023203 (2024)
Published: February 2024
Journal Articles
J. Vac. Sci. Technol. A 41, 063210 (2023)
Published: November 2023
Journal Articles
J. Vac. Sci. Technol. A 41, 053108 (2023)
Published: August 2023
Journal Articles
Yinghe Ma, Jinhui Mei, Junxin Ouyang, Peng Wu, Sai Wang, Jianguo Yang, Yanming He, Wenjian Zheng, Huaxin Li, Chuanyang Lu, Sendong Ren, Jianping Xu, Paul K. Chu
J. Vac. Sci. Technol. A 41, 053101 (2023)
Published: July 2023
Journal Articles
J. Vac. Sci. Technol. A 41, 043104 (2023)
Published: June 2023
Journal Articles
William Nunn, Abinash Kumar, Rui Zu, Bailey Nebgen, Shukai Yu, Anusha Kamath Manjeshwar, Venkatraman Gopalan, James M. LeBeau, Richard D. James, Bharat Jalan
J. Vac. Sci. Technol. A 41, 022701 (2023)
Published: January 2023
Includes: Supplementary data
Journal Articles
Shu Xiao, Xinyu Meng, Kejun Shi, Liangliang Liu, Hao Wu, Weiqi Lian, Chilou Zhou, Yunrong Lyu, Paul K. Chu
J. Vac. Sci. Technol. A 40, 060803 (2022)
Published: November 2022
Journal Articles
J. Vac. Sci. Technol. A 40, 042405 (2022)
Published: June 2022
Includes: Supplementary data
Journal Articles
José de Jesús Serralta-Macías, Rodolfo Antonio Rodriguez-Davila, Manuel Quevedo-Lopez, Daniel Olguín, Santos Jesús Castillo, Chadwin D. Young, José Martin Yáñez-Limón
J. Vac. Sci. Technol. A 40, 033417 (2022)
Published: May 2022
Journal Articles
Tomáš Fiantok, Viktor Šroba, Nikola Koutná, Vitalii Izai, Tomáš Roch, Martin Truchlý, Marek Vidiš, Leonid Satrapinskyy, Štefan Nagy, Branislav Grančič, Peter Kúš, Marián Mikula
J. Vac. Sci. Technol. A 40, 033414 (2022)
Published: April 2022
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