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Journal Articles

High-capacity rotary drum for atomic layer deposition onto powders and small mechanical parts in a hot-walled viscous flow reactor

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Matthew W. Coile, Matthias J. Young, Joseph A. Libera, Anil U. Mane, Jeffrey W. Elam
Journal: Journal of Vacuum Science & Technology A
J. Vac. Sci. Technol. A 38, 052403 (2020)
https://doi.org/10.1116/6.0000274
Published: July 2020
View articletitled, High-capacity rotary drum for atomic layer deposition onto powders and small mechanical parts in a hot-walled viscous flow reactor
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Journal Articles

Review Article: Recommended reading list of early publications on atomic layer deposition—Outcome of the “Virtual Project on the History of ALD”

Esko Ahvenniemi, Andrew R. Akbashev, Saima Ali, Mikhael Bechelany, Maria Berdova, Stefan Boyadjiev, David C. Cameron, Rong Chen, Mikhail Chubarov, Veronique Cremers, Anjana Devi, Viktor Drozd, Liliya Elnikova, Gloria Gottardi, Kestutis Grigoras, Dennis M. Hausmann, Cheol Seong Hwang, Shih-Hui Jen, Tanja Kallio, Jaana Kanervo, Ivan Khmelnitskiy, Do Han Kim, Lev Klibanov, Yury Koshtyal, A. Outi I. Krause, Jakob Kuhs, Irina Kärkkänen, Marja-Leena Kääriäinen, Tommi Kääriäinen, Luca Lamagna, Adam A. Łapicki, Markku Leskelä, Harri Lipsanen, Jussi Lyytinen, Anatoly Malkov, Anatoly Malygin, Abdelkader Mennad, Christian Militzer, Jyrki Molarius, Małgorzata Norek, Çağla Özgit-Akgün, Mikhail Panov, Henrik Pedersen, Fabien Piallat, Georgi Popov, Riikka L. Puurunen, Geert Rampelberg, Robin H. A. Ras, Erwan Rauwel, Fred Roozeboom, Timo Sajavaara, Hossein Salami, Hele Savin, Nathanaelle Schneider, Thomas E. Seidel, Jonas Sundqvist, Dmitry B. Suyatin, Tobias Törndahl, J. Ruud van Ommen, Claudia Wiemer, Oili M. E. Ylivaara, Oksana Yurkevich
Journal: Journal of Vacuum Science & Technology A
J. Vac. Sci. Technol. A 35, 010801 (2017)
https://doi.org/10.1116/1.4971389
Published: December 2016
View articletitled, Review Article: Recommended reading list of early publications on atomic layer deposition—Outcome of the “Virtual Project on the History of ALD”
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Includes: Supplementary data
Journal Articles

Novel nanoporous carbon materials for adsorption gibberellic acid from solution

Jin Li, Jin-Tong Xia, Jun-Hua Zhang, Tao Liang
Journal: Journal of Vacuum Science & Technology A
J. Vac. Sci. Technol. A 28, 658–661 (2010)
https://doi.org/10.1116/1.3453699
Published: June 2010
View articletitled, Novel nanoporous carbon materials for adsorption gibberellic acid from solution
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Journal Articles

Processing and characterization of nanometer sized copper sulfide particles

S. Seal, L. Bracho, S. Shukla, J. Morgiel
Journal: Journal of Vacuum Science & Technology A
J. Vac. Sci. Technol. A 17, 2950–2956 (1999)
https://doi.org/10.1116/1.581966
Published: September 1999
View articletitled, Processing and characterization of nanometer sized copper sulfide particles
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Journal Articles

A versatile low‐pressure ozone source

E. Coleman, T. Siegrist, D. A. Mixon, P. L. Trevor, D. J. Trevor
Journal: Journal of Vacuum Science & Technology A
J. Vac. Sci. Technol. A 9, 2408–2409 (1991)
https://doi.org/10.1116/1.577288
Published: July 1991
View articletitled, A versatile low‐pressure ozone source
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