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Journal Articles

Surface modification of Al-15Al2O3-0.3G powder metallurgical alloy induced by high-current pulsed electron beam

Lei Wang, Bo Gao, Huanfeng Zhang, Wenhuan Shen, Zhuang Liu, Haiyang Fu, Xin Lan
Journal: Journal of Vacuum Science & Technology A
J. Vac. Sci. Technol. A 42, 053106 (2024)
https://doi.org/10.1116/6.0003686
Published: August 2024
View article titled, Surface modification of Al-15Al<sub>2</sub>O<sub>3</sub>-0.3G powder metallurgical alloy induced by high-current pulsed electron beam
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Journal Articles

Nitrogen-incorporated tetrahedral amorphous carbon optically transparent thin film electrode

Nina Baule, Lars Haubold, Thomas Schuelke
Journal: Journal of Vacuum Science & Technology A
J. Vac. Sci. Technol. A 42, 053103 (2024)
https://doi.org/10.1116/6.0003786
Published: July 2024
View article titled, Nitrogen-incorporated tetrahedral amorphous carbon optically transparent thin film electrode
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Journal Articles

Precise and practical 3D topography simulation of high aspect ratio contact hole etch by using model optimization algorithm

Tetsuya Nishizuka, Ryo Igosawa, Takahiro Yokoyama, Kaoru Sako, Hironori Moki, Masanobu Honda
Journal: Journal of Vacuum Science & Technology A
J. Vac. Sci. Technol. A 42, 043003 (2024)
https://doi.org/10.1116/6.0003515
Published: June 2024
View article titled, Precise and practical 3D topography simulation of high aspect ratio contact hole etch by using model optimization algorithm
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Journal Articles

Density functional theory and molecular dynamics study on the growth of graphene by chemical vapor deposition on copper substrate

Qihang Li, Jinping Luo, Zaoyang Li, Mark H. Rummeli, Lijun Liu
Journal: Journal of Vacuum Science & Technology A
J. Vac. Sci. Technol. A 42, 042202 (2024)
https://doi.org/10.1116/6.0003667
Published: June 2024
View article titled, Density functional theory and molecular dynamics study on the growth of graphene by chemical vapor deposition on copper substrate
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Journal Articles

Third harmonic generation in monoclinic 2D KNbO3 with high power endurance

Fei Zhou, Yang Li, Haizeng Song, Xianhua Wei, Bo Dai
Journal: Journal of Vacuum Science & Technology A
J. Vac. Sci. Technol. A 42, 042201 (2024)
https://doi.org/10.1116/5.0205350
Published: May 2024
View article titled, Third harmonic generation in monoclinic 2D KNbO<sub>3</sub> with high power endurance
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Includes: Supplementary data
Journal Articles

Investigating different carbon-based target materials: Can we improve ionization in HiPIMS for the deposition of diamondlike carbon films?

Martin Fenker, Martin Balzer, Holger Kaßner
Journal: Journal of Vacuum Science & Technology A
J. Vac. Sci. Technol. A 42, 043402 (2024)
https://doi.org/10.1116/6.0003333
Published: May 2024
View article titled, Investigating different carbon-based target materials: Can we improve ionization in HiPIMS for the deposition of diamondlike carbon films?
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Journal Articles

Production of a high-density hydrogen plasma in a capacitively coupled RF discharge with a hollow cathode enclosed by magnets

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Yasunori Ohtsu, Takeshi Uchida, Ryohei Kuno, Julian Schulze
Journal: Journal of Vacuum Science & Technology A
J. Vac. Sci. Technol. A 42, 033011 (2024)
https://doi.org/10.1116/6.0003448
Published: April 2024
View article titled, Production of a high-density hydrogen plasma in a capacitively coupled RF discharge with a hollow cathode enclosed by magnets
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Journal Articles

Molecular beam epitaxy synthesis of In2Se3 films

Cooper A. Voigt, Matthew Reingold, Alex Dube, Lawrence S. Early, Brent K. Wagner, Eric M. Vogel
Journal: Journal of Vacuum Science & Technology A
J. Vac. Sci. Technol. A 42, 032707 (2024)
https://doi.org/10.1116/6.0003508
Published: April 2024
View article titled, Molecular beam epitaxy synthesis of In<sub>2</sub>Se<sub>3</sub> films
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Includes: Supplementary data
Journal Articles

Catalytic atomic layer deposition of amorphous alumina–silica thin films on carbon microfibers

Editor’s Pick
Elise des Ligneris, Diane Samélor, Abderrahime Sekkat, Claudie Josse, Teresa Hungria, Alessandro Pugliara, Constantin Vahlas, Brigitte Caussat
Journal: Journal of Vacuum Science & Technology A
J. Vac. Sci. Technol. A 42, 032408 (2024)
https://doi.org/10.1116/6.0003422
Published: April 2024
View article titled, Catalytic atomic layer deposition of amorphous alumina–silica thin films on carbon microfibers
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Includes: Supplementary data
Journal Articles

Effect of growth conditions and reactor configuration on the growth uniformity of large-scale graphene by chemical vapor deposition

Qihang Li, Jinping Luo, Zaoyang Li, Mark H. Rummeli, Lijun Liu
Journal: Journal of Vacuum Science & Technology A
J. Vac. Sci. Technol. A 42, 033406 (2024)
https://doi.org/10.1116/6.0003487
Published: April 2024
View article titled, Effect of growth conditions and reactor configuration on the growth uniformity of large-scale graphene by chemical vapor deposition
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Includes: Supplementary data
Journal Articles

Friction and wear behavior of C implanted copper via ion beam-assisted bombardment

Changhui Li, Jiajun Zhu, Juanrui Hu, Leilei Hao, Bin Ji, Licai Fu, Wulin Yang, Lingping Zhou
Journal: Journal of Vacuum Science & Technology A
J. Vac. Sci. Technol. A 42, 033205 (2024)
https://doi.org/10.1116/6.0003495
Published: April 2024
View article titled, Friction and wear behavior of C implanted copper via ion beam-assisted bombardment
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Journal Articles

Transient-assisted plasma etching (TAPE): Concept, mechanism, and prospects

Editor’s Pick
Atefeh Fathzadeh, Philippe Bezard, Maxime Darnon, Inge Manders, Thierry Conard, Ilse Hoflijk, Frederic Lazzarino, Stefan de Gendt
Journal: Journal of Vacuum Science & Technology A
J. Vac. Sci. Technol. A 42, 033006 (2024)
https://doi.org/10.1116/6.0003380
Published: April 2024
View article titled, Transient-assisted plasma etching (TAPE): Concept, mechanism, and prospects
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Journal Articles

Bias voltage influence on the a-SiCx:H interlayer deposition using tetramethylsilane: Decorative applications of a-C:H thin films on steel

Michael C. Goldbeck, Vanessa Piroli, Jennifer S. Weber, Carla D. Boeira, Bruna L. Perotti, Newton K. Fukumasu, Fernando Alvarez, Carlos A. Figueroa, Alexandre F. Michels
Journal: Journal of Vacuum Science & Technology A
J. Vac. Sci. Technol. A 42, 023007 (2024)
https://doi.org/10.1116/6.0003328
Published: February 2024
View article titled, Bias voltage influence on the a-SiCx:H interlayer deposition using tetramethylsilane: Decorative applications of a-C:H thin films on steel
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Includes: Supplementary data
Journal Articles

Preparation and tribological properties of Ni/DLC multilayer film

Yanxia Wu, Jiawei Qi, Ke Li, Xiaoyan Zhou, Shengwang Yu, Caili Zhang, Ying Liu
Journal: Journal of Vacuum Science & Technology A
J. Vac. Sci. Technol. A 42, 023419 (2024)
https://doi.org/10.1116/6.0003431
Published: February 2024
View article titled, Preparation and tribological properties of Ni/DLC multilayer film
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Journal Articles

Role of the codeposited C and W element on the tribological performance of WS2 coating

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Weiming Niu, Yizhuo Xu, Yuting Li, Guojuan Liu, Yifan Yao, Hao Li, Xiaojun Xu, Yan Zhou, Minhao Zhu
Journal: Journal of Vacuum Science & Technology A
J. Vac. Sci. Technol. A 42, 023417 (2024)
https://doi.org/10.1116/6.0003231
Published: February 2024
View article titled, Role of the codeposited C and W element on the tribological performance of WS<sub>2</sub> coating
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Journal Articles

Micromechanical properties of micro- and nanocrystalline CVD diamond thin films with gradient microstructures and stresses

Editor’s Pick
M. Meindlhumer, T. Ziegelwanger, J. Grau, H. Sternschulte, M. Sztucki, D. Steinmüller-Nethl, J. Keckes
Journal: Journal of Vacuum Science & Technology A
J. Vac. Sci. Technol. A 42, 023401 (2024)
https://doi.org/10.1116/6.0003235
Published: January 2024
View article titled, Micromechanical properties of micro- and nanocrystalline CVD diamond thin films with gradient microstructures and stresses
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Includes: Supplementary data
Journal Articles

Effects of electron irradiation on graphene drums

Ibikunle Ojo, Evan Hathaway, Jianchao Li, Roberto Gonzalez, Yan Jiang, Jingbiao Cui, Jose Perez
Journal: Journal of Vacuum Science & Technology A
J. Vac. Sci. Technol. A 42, 012201 (2024)
https://doi.org/10.1116/6.0003159
Published: December 2023
View article titled, Effects of electron irradiation on graphene drums
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Includes: Supplementary data
Journal Articles

Mechanical and tribological properties of diamondlike carbon-coated polycarbonate

Alexander S. Grenadyorov, Yuriy N. Yuriev, Аndrey А. Solovyev, Artem A. Runts, Konstantin V. Oskomov, Vyacheslav A. Semenov, Vladimir S. Sypchenko
Journal: Journal of Vacuum Science & Technology A
J. Vac. Sci. Technol. A 42, 010402 (2024)
https://doi.org/10.1116/6.0003131
Published: December 2023
View article titled, Mechanical and tribological properties of diamondlike carbon-coated polycarbonate
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Includes: Supplementary data
Journal Articles

Al2O3 atomic layer deposition on a porous matrix of carbon fibers (FiberForm) for oxidation resistance

Editor’s Pick
Jack T. Widmer, Steven M. George
Journal: Journal of Vacuum Science & Technology A
J. Vac. Sci. Technol. A 41, 062412 (2023)
https://doi.org/10.1116/6.0003085
Published: November 2023
View article titled, Al<sub>2</sub>O<sub>3</sub> atomic layer deposition on a porous matrix of carbon fibers (FiberForm) for oxidation resistance
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Journal Articles

Chemical vapor deposition of amorphous boron carbide coatings from mixtures of trimethylboron and triethylboron

Editor’s Pick
Laurent Souqui, Hans Högberg, Henrik Pedersen
Journal: Journal of Vacuum Science & Technology A
J. Vac. Sci. Technol. A 41, 063412 (2023)
https://doi.org/10.1116/6.0003001
Published: November 2023
View article titled, Chemical vapor deposition of amorphous boron carbide coatings from mixtures of trimethylboron and triethylboron
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Includes: Supplementary data