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Journal Articles

Al2O3 atomic layer deposition on a porous matrix of carbon fibers (FiberForm) for oxidation resistance

Jack T. Widmer, Steven M. George
Journal: Journal of Vacuum Science & Technology A
J. Vac. Sci. Technol. A 41, 062412 (2023)
https://doi.org/10.1116/6.0003085
Published: November 2023
View article titled, Al<sub>2</sub>O<sub>3</sub> atomic layer deposition on a porous matrix of carbon fibers (FiberForm) for oxidation resistance
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Journal Articles

Chemical vapor deposition of amorphous boron carbide coatings from mixtures of trimethylboron and triethylboron

Laurent Souqui, Hans Högberg, Henrik Pedersen
Journal: Journal of Vacuum Science & Technology A
J. Vac. Sci. Technol. A 41, 063412 (2023)
https://doi.org/10.1116/6.0003001
Published: November 2023
View article titled, Chemical vapor deposition of amorphous boron carbide coatings from mixtures of trimethylboron and triethylboron
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Includes: Supplementary data
Journal Articles

Standing wave patterns in graphene systems studied using scanning tunneling spectroscopy

Won-Jun Jang, Min Hui Chang, Min Jeong Kang, Young Jae Song, Se-Jong Kahng
Journal: Journal of Vacuum Science & Technology A
J. Vac. Sci. Technol. A 41, 062203 (2023)
https://doi.org/10.1116/6.0003075
Published: October 2023
View article titled, Standing wave patterns in graphene systems studied using scanning tunneling spectroscopy
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Includes: Supplementary data
Journal Articles

Angle resolved x-ray photoelectron spectroscopy assessment of the structure and composition of nanofilms—including uncertainties—through the multilayer model

Alberto Herrera-Gomez, Dulce Maria Guzman-Bucio, Marisol Mayorga-Garay, Orlando Cortazar-Martinez
Journal: Journal of Vacuum Science & Technology A
J. Vac. Sci. Technol. A 41, 063206 (2023)
https://doi.org/10.1116/6.0002981
Published: October 2023
View article titled, Angle resolved x-ray photoelectron spectroscopy assessment of the structure and composition of nanofilms—including uncertainties—through the multilayer model
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Journal Articles

Si-containing interlayer using tetramethylsilene for diamondlike carbon film adhesion on low-alloy steel: The role of the interlayer deposition time

Jennifer Stefani Weber, Vanessa Piroli, Michael Cristian Goldbeck, Bruna Louise Perotti, Carla Daniela Boeira, Newton Kiyoshi Fukumasu, Alexandre Fassini Michels, Carlos Alejandro Figueroa
Journal: Journal of Vacuum Science & Technology A
J. Vac. Sci. Technol. A 41, 063403 (2023)
https://doi.org/10.1116/6.0002911
Published: September 2023
View article titled, Si-containing interlayer using tetramethylsilene for diamondlike carbon film adhesion on low-alloy steel: The role of the interlayer deposition time
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Includes: Supplementary data
Journal Articles

Enhancing the reactivity of clean, defect-free epitaxial graphene by the substrate—Experiment and theory

T. Stach, A. Seif, A. Ambrosetti, P. L. Silvestrelli, U. Burghaus
Journal: Journal of Vacuum Science & Technology A
J. Vac. Sci. Technol. A 41, 062201 (2023)
https://doi.org/10.1116/6.0002948
Published: September 2023
View article titled, Enhancing the reactivity of clean, defect-free epitaxial graphene by the substrate—Experiment and theory
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Includes: Supplementary data
Journal Articles

Work function measurement by ultraviolet photoelectron spectroscopy: Versailles project on advanced materials and standards interlaboratory study

Jeong Won Kim, Ansoon Kim, Hui Ung Hwang, Jun Hyung Kim, Seungwook Choi, Norbert Koch, Dongguen Shin, Zhijuan Zhao, Fen Liu, Minki Choi, Kyu Myung Lee, Yongsup Park
Journal: Journal of Vacuum Science & Technology A
J. Vac. Sci. Technol. A 41, 053211 (2023)
https://doi.org/10.1116/6.0002852
Published: August 2023
View article titled, Work function measurement by ultraviolet photoelectron spectroscopy: Versailles project on advanced materials and standards interlaboratory study
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Journal Articles

Graphite oxide synthetized by pulsed laser ablation technique used as an antifouling coating to inhibit CaCO3 scale on stainless steel surfaces

Juan P. Cuenca-Vargas, Juan D. Lopez-Vargas, Andre A. Drummond, Marcelo M. Werneck, Dante F. Franceschini, Sergio S. Camargo
Journal: Journal of Vacuum Science & Technology A
J. Vac. Sci. Technol. A 41, 053111 (2023)
https://doi.org/10.1116/6.0002833
Published: August 2023
View article titled, Graphite oxide synthetized by pulsed laser ablation technique used as an antifouling coating to inhibit CaCO<sub>3</sub> scale on stainless steel surfaces
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Includes: Supplementary data
Journal Articles

Effect of local pressure difference caused by argon flow on properties of DLC films on rubber

Haoran Zeng, Jiaqi Liu, Tao Yang, Qiaoyuan Deng, Feng Wen
Journal: Journal of Vacuum Science & Technology A
J. Vac. Sci. Technol. A 41, 053410 (2023)
https://doi.org/10.1116/6.0002806
Published: July 2023
View article titled, Effect of local pressure difference caused by argon flow on properties of DLC films on rubber
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Includes: Supplementary data
Journal Articles

Stages of self-arrangement in growth of nanostructured graphene films related to the flow of ionized species during plasma-enhanced chemical vapor deposition

Algimantas Lukša, Viktorija Nargelienė, Marius Treideris, Virginijus Bukauskas, Martynas Talaikis, Arūnas Šetkus
Journal: Journal of Vacuum Science & Technology A
J. Vac. Sci. Technol. A 41, 053402 (2023)
https://doi.org/10.1116/6.0002694
Published: July 2023
View article titled, Stages of self-arrangement in growth of nanostructured graphene films related to the flow of ionized species during plasma-enhanced chemical vapor deposition
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Journal Articles

Nitrogen centers in single crystal diamond grown by chemical vapor deposition

D. S. Misra
Journal: Journal of Vacuum Science & Technology A
J. Vac. Sci. Technol. A 41, 042703 (2023)
https://doi.org/10.1116/6.0002622
Published: May 2023
View article titled, Nitrogen centers in single crystal diamond grown by chemical vapor deposition
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Journal Articles

Growth mechanisms of interfacial carbon layers at the epitaxial Al2O3(0001)/Cu(111) interface as application for epitaxial film lift-off

Hung-Chieh Tsai, Brecht Marien, François Chancerel, Stefan De Gendt, Steven Brems
Journal: Journal of Vacuum Science & Technology A
J. Vac. Sci. Technol. A 41, 042201 (2023)
https://doi.org/10.1116/6.0002568
Published: May 2023
View article titled, Growth mechanisms of interfacial carbon layers at the epitaxial Al<sub>2</sub>O<sub>3</sub>(0001)/Cu(111) interface as application for epitaxial film lift-off
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Includes: Supplementary data
Journal Articles

Bias-pulsed atomic layer etching of 4H-silicon carbide producing subangstrom surface roughness

J. A. Michaels, N. Delegan, Y. Tsaturyan, J. R. Renzas, D. D. Awschalom, J. G. Eden, F. J. Heremans
Journal: Journal of Vacuum Science & Technology A
J. Vac. Sci. Technol. A 41, 032607 (2023)
https://doi.org/10.1116/6.0002447
Published: May 2023
View article titled, Bias-pulsed atomic layer etching of 4H-silicon carbide producing subangstrom surface roughness
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Includes: Supplementary data
Journal Articles

Enhancement of discharge and mechanical properties of ta-C films by pulse-enhanced cathodic arc deposition

Benfu Wang, Xiubo Tian, Jian Hu, Chunzhi Gong, Xiangli Liu, Jin Li
Journal: Journal of Vacuum Science & Technology A
J. Vac. Sci. Technol. A 41, 033003 (2023)
https://doi.org/10.1116/6.0002352
Published: March 2023
View article titled, Enhancement of discharge and mechanical properties of ta-C films by pulse-enhanced cathodic arc deposition
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Journal Articles

Zn:DLC films via PECVD-HIPIMS: Evaluation of antimicrobial activity and cytotoxicity to mammalian cells

Rebeca F. B. de O. Correia, Aline G. Sampaio, Noala V. M. Milhan, Ariel Capote, Holger Gerdes, Kristina Lachmann, Vladimir J. Trava-Airoldi, Cristiane Yumi Koga-Ito, Ralf Bandorf
Journal: Journal of Vacuum Science & Technology A
J. Vac. Sci. Technol. A 41, 033103 (2023)
https://doi.org/10.1116/6.0002354
Published: March 2023
View article titled, Zn:DLC films via PECVD-HIPIMS: Evaluation of antimicrobial activity and cytotoxicity to mammalian cells
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Journal Articles

Applications and mechanisms of anisotropic two-step Si3N4 etching with hydrogen plasma conditioning

Ying Rui, Meng-Hsien Chen, Sumeet Pandey, Lan Li
Journal: Journal of Vacuum Science & Technology A
J. Vac. Sci. Technol. A 41, 022601 (2023)
https://doi.org/10.1116/6.0002139
Published: February 2023
View article titled, Applications and mechanisms of anisotropic two-step Si<sub>3</sub>N<sub>4</sub> etching with hydrogen plasma conditioning
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Journal Articles

Hydrogen molecule adsorption and sensing on lanthanide (La) doped/decorated carbon nanotube and graphene structures

Numan Yuksel, Ahmet Kose, Derya Düzenli, M. Ferdi Fellah
Journal: Journal of Vacuum Science & Technology A
J. Vac. Sci. Technol. A 41, 023202 (2023)
https://doi.org/10.1116/6.0002229
Published: February 2023
View article titled, Hydrogen molecule adsorption and sensing on lanthanide (La) doped/decorated carbon nanotube and graphene structures
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Includes: Supplementary data
Journal Articles

Aluminum nitride crystal-based photodetector with bias polarity-dependent spectral selectivity

Zelong Fan, Zuoyan Qin, Lei Jin, Yuan Cao, Zhongyu Yue, Baikui Li, Honglei Wu, Zhenhua Sun
Journal: Journal of Vacuum Science & Technology A
J. Vac. Sci. Technol. A 41, 013204 (2023)
https://doi.org/10.1116/5.0133162
Published: December 2022
View article titled, Aluminum nitride crystal-based photodetector with bias polarity-dependent spectral selectivity
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Includes: Supplementary data
Journal Articles

Effects on graphene of electron irradiation at 25 keV and dosages up to 1018 electrons/cm2

I. A. Ojo, E. Hathaway, R. R. Gonzalez, P. R. Adhikari, V. Sathish, B. Kunam, Y. Khalid, J. Cui, W. Choi, J. M. Perez
Journal: Journal of Vacuum Science & Technology A
J. Vac. Sci. Technol. A 41, 012201 (2023)
https://doi.org/10.1116/6.0002209
Published: December 2022
View article titled, Effects on graphene of electron irradiation at 25 keV and dosages up to 10<sup>18</sup> electrons/cm<sup>2</sup>
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Includes: Supplementary data
Journal Articles

Practical guide to understanding goodness-of-fit metrics used in chemical state modeling of x-ray photoelectron spectroscopy data by synthetic line shapes using nylon as an example

Neal Fairley, Pascal Bargiela, Adam Roberts, Vincent Fernandez, Jonas Baltrusaitis
Journal: Journal of Vacuum Science & Technology A
J. Vac. Sci. Technol. A 41, 013203 (2023)
https://doi.org/10.1116/6.0002196
Published: December 2022
View article titled, Practical guide to understanding goodness-of-fit metrics used in chemical state modeling of x-ray photoelectron spectroscopy data by synthetic line shapes using nylon as an example
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Includes: Supplementary data