1-20 of 76
Ion scattering spectroscopy
Close
Save search
Follow your search
Access your saved searches in your account
Close Modal
Sort by
Journal Articles

Detailed analysis of impact collision ion scattering spectroscopy of bismuth selenide

Weimin Zhou, Haoshan Zhu, Jory A. Yarmoff
Journal: Journal of Vacuum Science & Technology A
J. Vac. Sci. Technol. A 35, 03E104 (2017)
https://doi.org/10.1116/1.4978253
Published: March 2017
View article titled, Detailed analysis of impact collision ion scattering spectroscopy of bismuth selenide
Open the PDF for Detailed analysis of impact collision ion scattering spectroscopy of bismuth selenide in another window
Journal Articles

Effect of substrate composition on atomic layer deposition using self-assembled monolayers as blocking layers

Wenyu Zhang, James R. Engstrom
Journal: Journal of Vacuum Science & Technology A
J. Vac. Sci. Technol. A 34, 01A107 (2016)
https://doi.org/10.1116/1.4931722
Published: September 2015
View article titled, Effect of substrate composition on atomic layer deposition using self-assembled monolayers as blocking layers
Open the PDF for Effect of substrate composition on atomic layer deposition using self-assembled monolayers as blocking layers in another window
Includes: Supplementary data
Journal Articles

Investigation of arsenic and antimony capping layers, and half cycle reactions during atomic layer deposition of Al2O3 on GaSb(100)

Dmitry M. Zhernokletov, Hong Dong, Barry Brennan, Jiyoung Kim, Robert M. Wallace, Michael Yakimov, Vadim Tokranov, Serge Oktyabrsky
Journal: Journal of Vacuum Science & Technology A
J. Vac. Sci. Technol. A 31, 060602 (2013)
https://doi.org/10.1116/1.4817496
Published: August 2013
View article titled, Investigation of arsenic and antimony capping layers, and half cycle reactions during atomic layer deposition of Al<sub>2</sub>O<sub>3</sub> on GaSb(100)
Open the PDF for Investigation of arsenic and antimony capping layers, and half cycle reactions during atomic layer deposition of Al<sub>2</sub>O<sub>3</sub> on GaSb(100) in another window
Journal Articles

Probing ultrathin film continuity and interface abruptness with x-ray photoelectron spectroscopy and low-energy ion scattering

Wenyu Zhang, Rambert K. Nahm, Paul F. Ma, James R. Engstrom
Journal: Journal of Vacuum Science & Technology A
J. Vac. Sci. Technol. A 31, 061101 (2013)
https://doi.org/10.1116/1.4812695
Published: July 2013
View article titled, Probing ultrathin film continuity and interface abruptness with x-ray photoelectron spectroscopy and low-energy ion scattering
Open the PDF for Probing ultrathin film continuity and interface abruptness with x-ray photoelectron spectroscopy and low-energy ion scattering in another window
Includes: Supplementary data
Journal Articles

Cluster size dependence of Pt core-level shifts for mass-selected Pt clusters on TiO 2 ( 110 ) surfaces

Noritake Isomura, Xingyang Wu, Hirohito Hirata, Yoshihide Watanabe
Journal: Journal of Vacuum Science & Technology A
J. Vac. Sci. Technol. A 28, 1141–1144 (2010)
https://doi.org/10.1116/1.3467033
Published: September 2010
View article titled, Cluster size dependence of Pt core-level shifts for mass-selected Pt clusters on TiO 2 ( 110 ) surfaces
Open the PDF for Cluster size dependence of Pt core-level shifts for mass-selected Pt clusters on TiO 2 ( 110 ) surfaces in another window
Journal Articles

Ferroelectric polarization dependent interactions at Pd – Li Nb O 3 ( 0001 ) interfaces

Mosha H. Zhao, Dawn A. Bonnell, John M. Vohs
Journal: Journal of Vacuum Science & Technology A
J. Vac. Sci. Technol. A 27, 1337–1342 (2009)
https://doi.org/10.1116/1.3248268
Published: October 2009
View article titled, Ferroelectric polarization dependent interactions at Pd – Li Nb O 3 ( 0001 ) interfaces
Open the PDF for Ferroelectric polarization dependent interactions at Pd – Li Nb O 3 ( 0001 ) interfaces in another window
Journal Articles

Compact deposition system for device-based ultrathin crystalline film growth

R. E. Lake, J. R. Puls, M. P. Ray, C. E. Sosolik
Journal: Journal of Vacuum Science & Technology A
J. Vac. Sci. Technol. A 27, 1024–1028 (2009)
https://doi.org/10.1116/1.3097859
Published: June 2009
View article titled, Compact deposition system for device-based ultrathin crystalline film growth
Open the PDF for Compact deposition system for device-based ultrathin crystalline film growth in another window
Journal Articles

Film continuity and interface bonding of thin boron carbonitride films on Ge(100) and Si(100)

P. R. Fitzpatrick, J. G. Ekerdt
Journal: Journal of Vacuum Science & Technology A
J. Vac. Sci. Technol. A 26, 1397–1406 (2008)
https://doi.org/10.1116/1.2976564
Published: October 2008
View article titled, Film continuity and interface bonding of thin boron carbonitride films on Ge(100) and Si(100)
Open the PDF for Film continuity and interface bonding of thin boron carbonitride films on Ge(100) and Si(100) in another window
Journal Articles

Characterization of TiAlN thin film annealed under O 2 by in situ time of flight direct recoil spectroscopy/mass spectroscopy of recoiled ions and ex situ x-ray photoelectron spectroscopy

A. Tempez, A. Bensaoula, A. Schultz
Journal: Journal of Vacuum Science & Technology A
J. Vac. Sci. Technol. A 20, 1320–1326 (2002)
https://doi.org/10.1116/1.1482711
Published: June 2002
View article titled, Characterization of TiAlN thin film annealed under O 2 by <em>in situ</em> time of flight direct recoil spectroscopy/mass spectroscopy of recoiled ions and <em>ex situ</em> x-ray photoelectron spectroscopy
Open the PDF for Characterization of TiAlN thin film annealed under O 2 by <em>in situ</em> time of flight direct recoil spectroscopy/mass spectroscopy of recoiled ions and <em>ex situ</em> x-ray photoelectron spectroscopy in another window
Journal Articles

Effect of buffer-layer engineering on the polarity of GaN films

M. Sumiya, K. Yoshimura, N. Ogusu, S. Fuke, K. Mizuno, M. Yoshimoto, H. Koinuma, L. T. Romano
Journal: Journal of Vacuum Science & Technology A
J. Vac. Sci. Technol. A 20, 456–458 (2002)
https://doi.org/10.1116/1.1450582
Published: March 2002
View article titled, Effect of buffer-layer engineering on the polarity of GaN films
Open the PDF for Effect of buffer-layer engineering on the polarity of GaN films in another window
Journal Articles

Cyclic voltammetry, x-ray photoelectron spectroscopy, secondary-ion-mass spectrometry, and ion-scattering spectrometry examination of zirconium passive film breakdown in the presence of sulfate

R. Schennach, A. Mamun, N. Kunamneni, D. L. Cocke
Journal: Journal of Vacuum Science & Technology A
J. Vac. Sci. Technol. A 18, 1478–1483 (2000)
https://doi.org/10.1116/1.582372
Published: July 2000
View article titled, Cyclic voltammetry, x-ray photoelectron spectroscopy, secondary-ion-mass spectrometry, and ion-scattering spectrometry examination of zirconium passive film breakdown in the presence of sulfate
Open the PDF for Cyclic voltammetry, x-ray photoelectron spectroscopy, secondary-ion-mass spectrometry, and ion-scattering spectrometry examination of zirconium passive film breakdown in the presence of sulfate in another window
Journal Articles

Studies of heteroepitaxial growth of thin II–VI semiconductor layers by sequential ultrahigh vacuum dosing

Y. Luo, M. Han, D. A. Slater, R. M. Osgood, Jr.
Journal: Journal of Vacuum Science & Technology A
J. Vac. Sci. Technol. A 18, 438–449 (2000)
https://doi.org/10.1116/1.582206
Published: March 2000
View article titled, Studies of heteroepitaxial growth of thin II–VI semiconductor layers by sequential ultrahigh vacuum dosing
Open the PDF for Studies of heteroepitaxial growth of thin II–VI semiconductor layers by sequential ultrahigh vacuum dosing in another window
Journal Articles

Ordered binary oxide films of V 2 O 3 (0001) on Al 2 O 3

Q. Guo, D. Y. Kim, S. C. Street, D. W. Goodman
Journal: Journal of Vacuum Science & Technology A
J. Vac. Sci. Technol. A 17, 1887–1892 (1999)
https://doi.org/10.1116/1.581699
Published: July 1999
View article titled, Ordered binary oxide films of V 2 O 3 (0001) on Al 2 O 3
Open the PDF for Ordered binary oxide films of V 2 O 3 (0001) on Al 2 O 3 in another window
Journal Articles

Mass spectroscopy of recoiled ions, secondary ion mass spectroscopy, and Auger electron spectroscopy investigation of Y 2 O 3 -stabilized ZrO 2 (100) and (110)

G. S. Herman, M. A. Henderson, K. A. Starkweather, E. P. McDaniel
Journal: Journal of Vacuum Science & Technology A
J. Vac. Sci. Technol. A 17, 939–944 (1999)
https://doi.org/10.1116/1.581668
Published: May 1999
View article titled, Mass spectroscopy of recoiled ions, secondary ion mass spectroscopy, and Auger electron spectroscopy investigation of Y 2 O 3 -stabilized ZrO 2 (100) and (110)
Open the PDF for Mass spectroscopy of recoiled ions, secondary ion mass spectroscopy, and Auger electron spectroscopy investigation of Y 2 O 3 -stabilized ZrO 2 (100) and (110) in another window
Journal Articles

Room-temperature growth of ZrO 2 thin films using a novel hyperthermal oxygen-atom source

Elmar Wisotzki, Adam G. Balogh, Horst Hahn, John T. Wolan, Gar B. Hoflund
Journal: Journal of Vacuum Science & Technology A
J. Vac. Sci. Technol. A 17, 14–18 (1999)
https://doi.org/10.1116/1.581547
Published: January 1999
View article titled, Room-temperature growth of ZrO 2 thin films using a novel hyperthermal oxygen-atom source
Open the PDF for Room-temperature growth of ZrO 2 thin films using a novel hyperthermal oxygen-atom source in another window
Journal Articles

Chemical alteration of the native oxide layer on LiGaO 2 (001) by exposure to hyperthermal atomic hydrogen

John T. Wolan, Gar B. Hoflund
Journal: Journal of Vacuum Science & Technology A
J. Vac. Sci. Technol. A 16, 3414–3419 (1998)
https://doi.org/10.1116/1.581495
Published: November 1998
View article titled, Chemical alteration of the native oxide layer on LiGaO 2 (001) by exposure to hyperthermal atomic hydrogen
Open the PDF for Chemical alteration of the native oxide layer on LiGaO 2 (001) by exposure to hyperthermal atomic hydrogen in another window
Journal Articles

Chemical alteration of the native oxide layer on InP(111) by exposure to hyperthermal atomic hydrogen

John T. Wolan, Gar B. Hoflund
Journal: Journal of Vacuum Science & Technology A
J. Vac. Sci. Technol. A 16, 2546–2552 (1998)
https://doi.org/10.1116/1.581379
Published: July 1998
View article titled, Chemical alteration of the native oxide layer on InP(111) by exposure to hyperthermal atomic hydrogen
Open the PDF for Chemical alteration of the native oxide layer on InP(111) by exposure to hyperthermal atomic hydrogen in another window
Journal Articles

Use of reactive ion sputtering to produce clean germanium surfaces in a carbon rich environment—an ion scattering study

V. S. Smentkowski, J. C. Holecek, J. A. Schultz, A. R. Krauss, D. M. Gruen
Journal: Journal of Vacuum Science & Technology A
J. Vac. Sci. Technol. A 16, 1779–1784 (1998)
https://doi.org/10.1116/1.581106
Published: May 1998
View article titled, Use of reactive ion sputtering to produce clean germanium surfaces in a carbon rich environment—an ion scattering study
Open the PDF for Use of reactive ion sputtering to produce clean germanium surfaces in a carbon rich environment—an ion scattering study in another window
Journal Articles

Chemical reactions induced by the room temperature interaction of hyperthermal atomic hydrogen with the native oxide layer on GaAs(001) surfaces studied by ion scattering spectroscopy and x-ray photoelectron spectroscopy

John T. Wolan, Charles K. Mount, Gar B. Hoflund
Journal: Journal of Vacuum Science & Technology A
J. Vac. Sci. Technol. A 15, 2502–2507 (1997)
https://doi.org/10.1116/1.580761
Published: September 1997
View article titled, Chemical reactions induced by the room temperature interaction of hyperthermal atomic hydrogen with the native oxide layer on GaAs(001) surfaces studied by ion scattering spectroscopy and x-ray photoelectron spectroscopy
Open the PDF for Chemical reactions induced by the room temperature interaction of hyperthermal atomic hydrogen with the native oxide layer on GaAs(001) surfaces studied by ion scattering spectroscopy and x-ray photoelectron spectroscopy in another window
Journal Articles

Metal overlayers on organic functional groups of self-organized molecular assemblies: VII. Ion scattering spectroscopy and x-ray photoelectron spectroscopy of Cu/CH 3 and Cu/COOCH 3

G. C. Herdt, A. W. Czanderna
Journal: Journal of Vacuum Science & Technology A
J. Vac. Sci. Technol. A 15, 513–519 (1997)
https://doi.org/10.1116/1.580882
Published: May 1997
View article titled, Metal overlayers on organic functional groups of self-organized molecular assemblies: VII. Ion scattering spectroscopy and x-ray photoelectron spectroscopy of Cu/CH 3 and Cu/COOCH 3
Open the PDF for Metal overlayers on organic functional groups of self-organized molecular assemblies: VII. Ion scattering spectroscopy and x-ray photoelectron spectroscopy of Cu/CH 3 and Cu/COOCH 3 in another window