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Journal Articles

Detailed analysis of impact collision ion scattering spectroscopy of bismuth selenide

Editor’s Pick
Weimin Zhou, Haoshan Zhu, Jory A. Yarmoff
Journal: Journal of Vacuum Science & Technology A
J. Vac. Sci. Technol. A 35, 03E104 (2017)
https://doi.org/10.1116/1.4978253
Published: March 2017
View articletitled, Detailed analysis of impact collision ion scattering spectroscopy of bismuth selenide
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Journal Articles

Effect of substrate composition on atomic layer deposition using self-assembled monolayers as blocking layers

Wenyu Zhang, James R. Engstrom
Journal: Journal of Vacuum Science & Technology A
J. Vac. Sci. Technol. A 34, 01A107 (2016)
https://doi.org/10.1116/1.4931722
Published: September 2015
View articletitled, Effect of substrate composition on atomic layer deposition using self-assembled monolayers as blocking layers
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Includes: Supplementary data
Journal Articles

Investigation of arsenic and antimony capping layers, and half cycle reactions during atomic layer deposition of Al2O3 on GaSb(100)

Dmitry M. Zhernokletov, Hong Dong, Barry Brennan, Jiyoung Kim, Robert M. Wallace, Michael Yakimov, Vadim Tokranov, Serge Oktyabrsky
Journal: Journal of Vacuum Science & Technology A
J. Vac. Sci. Technol. A 31, 060602 (2013)
https://doi.org/10.1116/1.4817496
Published: August 2013
View articletitled, Investigation of arsenic and antimony capping layers, and half cycle reactions during atomic layer deposition of Al2O3 on GaSb(100)
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Journal Articles

Probing ultrathin film continuity and interface abruptness with x-ray photoelectron spectroscopy and low-energy ion scattering

Wenyu Zhang, Rambert K. Nahm, Paul F. Ma, James R. Engstrom
Journal: Journal of Vacuum Science & Technology A
J. Vac. Sci. Technol. A 31, 061101 (2013)
https://doi.org/10.1116/1.4812695
Published: July 2013
View articletitled, Probing ultrathin film continuity and interface abruptness with x-ray photoelectron spectroscopy and low-energy ion scattering
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Includes: Supplementary data
Journal Articles

Cluster size dependence of Pt core-level shifts for mass-selected Pt clusters on TiO 2 ( 110 ) surfaces

Noritake Isomura, Xingyang Wu, Hirohito Hirata, Yoshihide Watanabe
Journal: Journal of Vacuum Science & Technology A
J. Vac. Sci. Technol. A 28, 1141–1144 (2010)
https://doi.org/10.1116/1.3467033
Published: September 2010
View articletitled, Cluster size dependence of Pt core-level shifts for mass-selected Pt clusters on TiO 2 ( 110 ) surfaces
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Journal Articles

Ferroelectric polarization dependent interactions at Pd – Li Nb O 3 ( 0001 ) interfaces

Mosha H. Zhao, Dawn A. Bonnell, John M. Vohs
Journal: Journal of Vacuum Science & Technology A
J. Vac. Sci. Technol. A 27, 1337–1342 (2009)
https://doi.org/10.1116/1.3248268
Published: October 2009
View articletitled, Ferroelectric polarization dependent interactions at Pd – Li Nb O 3 ( 0001 ) interfaces
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Journal Articles

Compact deposition system for device-based ultrathin crystalline film growth

R. E. Lake, J. R. Puls, M. P. Ray, C. E. Sosolik
Journal: Journal of Vacuum Science & Technology A
J. Vac. Sci. Technol. A 27, 1024–1028 (2009)
https://doi.org/10.1116/1.3097859
Published: June 2009
View articletitled, Compact deposition system for device-based ultrathin crystalline film growth
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Journal Articles

Film continuity and interface bonding of thin boron carbonitride films on Ge(100) and Si(100)

P. R. Fitzpatrick, J. G. Ekerdt
Journal: Journal of Vacuum Science & Technology A
J. Vac. Sci. Technol. A 26, 1397–1406 (2008)
https://doi.org/10.1116/1.2976564
Published: October 2008
View articletitled, Film continuity and interface bonding of thin boron carbonitride films on Ge(100) and Si(100)
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Journal Articles

Characterization of TiAlN thin film annealed under O 2 by in situ time of flight direct recoil spectroscopy/mass spectroscopy of recoiled ions and ex situ x-ray photoelectron spectroscopy

A. Tempez, A. Bensaoula, A. Schultz
Journal: Journal of Vacuum Science & Technology A
J. Vac. Sci. Technol. A 20, 1320–1326 (2002)
https://doi.org/10.1116/1.1482711
Published: June 2002
View articletitled, Characterization of TiAlN thin film annealed under O 2 by in situ time of flight direct recoil spectroscopy/mass spectroscopy of recoiled ions and ex situ x-ray photoelectron spectroscopy
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Journal Articles

Effect of buffer-layer engineering on the polarity of GaN films

M. Sumiya, K. Yoshimura, N. Ogusu, S. Fuke, K. Mizuno, M. Yoshimoto, H. Koinuma, L. T. Romano
Journal: Journal of Vacuum Science & Technology A
J. Vac. Sci. Technol. A 20, 456–458 (2002)
https://doi.org/10.1116/1.1450582
Published: March 2002
View articletitled, Effect of buffer-layer engineering on the polarity of GaN films
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Journal Articles

Cyclic voltammetry, x-ray photoelectron spectroscopy, secondary-ion-mass spectrometry, and ion-scattering spectrometry examination of zirconium passive film breakdown in the presence of sulfate

R. Schennach, A. Mamun, N. Kunamneni, D. L. Cocke
Journal: Journal of Vacuum Science & Technology A
J. Vac. Sci. Technol. A 18, 1478–1483 (2000)
https://doi.org/10.1116/1.582372
Published: July 2000
View articletitled, Cyclic voltammetry, x-ray photoelectron spectroscopy, secondary-ion-mass spectrometry, and ion-scattering spectrometry examination of zirconium passive film breakdown in the presence of sulfate
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Journal Articles

Studies of heteroepitaxial growth of thin II–VI semiconductor layers by sequential ultrahigh vacuum dosing

Y. Luo, M. Han, D. A. Slater, R. M. Osgood, Jr.
Journal: Journal of Vacuum Science & Technology A
J. Vac. Sci. Technol. A 18, 438–449 (2000)
https://doi.org/10.1116/1.582206
Published: March 2000
View articletitled, Studies of heteroepitaxial growth of thin II–VI semiconductor layers by sequential ultrahigh vacuum dosing
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Journal Articles

Ordered binary oxide films of V 2 O 3 (0001) on Al 2 O 3

Q. Guo, D. Y. Kim, S. C. Street, D. W. Goodman
Journal: Journal of Vacuum Science & Technology A
J. Vac. Sci. Technol. A 17, 1887–1892 (1999)
https://doi.org/10.1116/1.581699
Published: July 1999
View articletitled, Ordered binary oxide films of V 2 O 3 (0001) on Al 2 O 3
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Journal Articles

Mass spectroscopy of recoiled ions, secondary ion mass spectroscopy, and Auger electron spectroscopy investigation of Y 2 O 3 -stabilized ZrO 2 (100) and (110)

G. S. Herman, M. A. Henderson, K. A. Starkweather, E. P. McDaniel
Journal: Journal of Vacuum Science & Technology A
J. Vac. Sci. Technol. A 17, 939–944 (1999)
https://doi.org/10.1116/1.581668
Published: May 1999
View articletitled, Mass spectroscopy of recoiled ions, secondary ion mass spectroscopy, and Auger electron spectroscopy investigation of Y 2 O 3 -stabilized ZrO 2 (100) and (110)
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Journal Articles

Room-temperature growth of ZrO 2 thin films using a novel hyperthermal oxygen-atom source

Elmar Wisotzki, Adam G. Balogh, Horst Hahn, John T. Wolan, Gar B. Hoflund
Journal: Journal of Vacuum Science & Technology A
J. Vac. Sci. Technol. A 17, 14–18 (1999)
https://doi.org/10.1116/1.581547
Published: January 1999
View articletitled, Room-temperature growth of ZrO 2 thin films using a novel hyperthermal oxygen-atom source
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Journal Articles

Chemical alteration of the native oxide layer on LiGaO 2 (001) by exposure to hyperthermal atomic hydrogen

John T. Wolan, Gar B. Hoflund
Journal: Journal of Vacuum Science & Technology A
J. Vac. Sci. Technol. A 16, 3414–3419 (1998)
https://doi.org/10.1116/1.581495
Published: November 1998
View articletitled, Chemical alteration of the native oxide layer on LiGaO 2 (001) by exposure to hyperthermal atomic hydrogen
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Journal Articles

Chemical alteration of the native oxide layer on InP(111) by exposure to hyperthermal atomic hydrogen

John T. Wolan, Gar B. Hoflund
Journal: Journal of Vacuum Science & Technology A
J. Vac. Sci. Technol. A 16, 2546–2552 (1998)
https://doi.org/10.1116/1.581379
Published: July 1998
View articletitled, Chemical alteration of the native oxide layer on InP(111) by exposure to hyperthermal atomic hydrogen
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Journal Articles

Use of reactive ion sputtering to produce clean germanium surfaces in a carbon rich environment—an ion scattering study

V. S. Smentkowski, J. C. Holecek, J. A. Schultz, A. R. Krauss, D. M. Gruen
Journal: Journal of Vacuum Science & Technology A
J. Vac. Sci. Technol. A 16, 1779–1784 (1998)
https://doi.org/10.1116/1.581106
Published: May 1998
View articletitled, Use of reactive ion sputtering to produce clean germanium surfaces in a carbon rich environment—an ion scattering study
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Journal Articles

Chemical reactions induced by the room temperature interaction of hyperthermal atomic hydrogen with the native oxide layer on GaAs(001) surfaces studied by ion scattering spectroscopy and x-ray photoelectron spectroscopy

John T. Wolan, Charles K. Mount, Gar B. Hoflund
Journal: Journal of Vacuum Science & Technology A
J. Vac. Sci. Technol. A 15, 2502–2507 (1997)
https://doi.org/10.1116/1.580761
Published: September 1997
View articletitled, Chemical reactions induced by the room temperature interaction of hyperthermal atomic hydrogen with the native oxide layer on GaAs(001) surfaces studied by ion scattering spectroscopy and x-ray photoelectron spectroscopy
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Journal Articles

Preparation and characterization of epitaxial titanium oxide films on Mo(100)

W. S. Oh, C. Xu, D. Y. Kim, D. W. Goodman
Journal: Journal of Vacuum Science & Technology A
J. Vac. Sci. Technol. A 15, 1710–1716 (1997)
https://doi.org/10.1116/1.580925
Published: May 1997
View articletitled, Preparation and characterization of epitaxial titanium oxide films on Mo(100)
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