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Journal Articles
J. Vac. Sci. Technol. A 41, 050802 (2023)
Published: July 2023
Journal Articles
L. B. Bayu Aji, S. J. Shin, J. H. Bae, A. M. Engwall, J. A. Hammons, S. T. Sen-Britain, P. B. Mirkarimi, S. O. Kucheyev
J. Vac. Sci. Technol. A 41, 023407 (2023)
Published: February 2023
Includes: Supplementary data
Journal Articles
Jeffrey M. Woodward, Samantha G. Rosenberg, David R. Boris, Michael J. Johnson, Scott G. Walton, Scooter D. Johnson, Zachary R. Robinson, Neeraj Nepal, Karl F. Ludwig, Jr., Jennifer K. Hite, Charles R. Eddy, Jr.
J. Vac. Sci. Technol. A 40, 062405 (2022)
Published: October 2022
Includes: Supplementary data
Journal Articles
Claudia Lau, Nicholas G. Combs, Evguenia Karapetrova, Juan Jiang, Susanne Stemmer, Charles H. Ahn, Frederick J. Walker
J. Vac. Sci. Technol. A 40, 013411 (2022)
Published: December 2021
Journal Articles
J. Vac. Sci. Technol. A 40, 010804 (2022)
Published: December 2021
Journal Articles
J. Vac. Sci. Technol. A 40, 012401 (2022)
Published: November 2021
Includes: Supplementary data
Journal Articles
Cheng-Hao Chuang, Chieh-Ming Chen, Yu-Cheng Shao, Ping-Hung Yeh, Chih-Ming Chang, Way-Faung Pong, Mukes Kapilashrami, Per-Anders Glans, Sheraz Gul, Gongming Wang, Yat Li, Jin Zhang, Jun Miyawaki, Hideharu Niwa, Yoshihisa Harada, Jin-Ming Chen, Jinghua Guo
J. Vac. Sci. Technol. A 39, 063204 (2021)
Published: September 2021
Journal Articles
Bidesh Biswas, Sanjay Nayak, Vijay Bhatia, Ashalatha Indiradevi Kamalasanan Pillai, Magnus Garbrecht, Mohammed H. Modi, Mukul Gupta, Bivas Saha
J. Vac. Sci. Technol. A 38, 053201 (2020)
Published: July 2020
Journal Articles
Virginia R. Anderson, Neeraj Nepal, Scooter D. Johnson, Zachary R. Robinson, Anindya Nath, Alexander C. Kozen, Syed B. Qadri, Alexander DeMasi, Jennifer K. Hite, Karl F. Ludwig, Jr., Charles R. Eddy, Jr.
J. Vac. Sci. Technol. A 35, 031508 (2017)
Published: March 2017
Journal Articles
Daniel Meljanac, Krunoslav Juraić, Milivoj Plodinec, Zdravko Siketić, Davor Gracin, Nikša Krstulović, Krešimir Salamon, Hrvoje Skenderović, Zlatko Kregar, Iva Šrut Rakić, Sigrid Bernstorff
J. Vac. Sci. Technol. A 34, 021514 (2016)
Published: February 2016
Journal Articles
J. Vac. Sci. Technol. A 33, 031511 (2015)
Published: April 2015
Includes: Supplementary data
Journal Articles
J. Vac. Sci. Technol. A 33, 021519 (2015)
Published: February 2015
Journal Articles
J. Vac. Sci. Technol. A 33, 021406 (2015)
Published: January 2015
Journal Articles
J. Vac. Sci. Technol. A 32, 010801 (2014)
Published: December 2013
Journal Articles
J. Vac. Sci. Technol. A 30, 031510 (2012)
Published: April 2012
Journal Articles
J. Vac. Sci. Technol. A 28, 818–823 (2010)
Published: June 2010
Journal Articles
J. Vac. Sci. Technol. A 28, 679–683 (2010)
Published: June 2010
Journal Articles
Bernhard Gehl, Jan Ingo Flege, Vesna Aleksandrovic, Thomas Schmidt, Andreas Kornowski, Sigrid Bernstorff, Jens Falta, Horst Weller, Marcus Bäumer
J. Vac. Sci. Technol. A 26, 908–912 (2008)
Published: July 2008
Journal Articles
J. Vac. Sci. Technol. A 25, 532–535 (2007)
Published: April 2007
Journal Articles
J. Vac. Sci. Technol. A 24, 1191–1196 (2006)
Published: June 2006
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