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Journal Articles

Oxidation properties of quaternary Zr-based diboride thin films grown by hybrid high-power impulse/DC magnetron co-sputtering

Babak Bakhit
Journal: Journal of Vacuum Science & Technology A
J. Vac. Sci. Technol. A 42, 010401 (2024)
https://doi.org/10.1116/6.0003197
Published: December 2023
View article titled, Oxidation properties of quaternary Zr-based diboride thin films grown by hybrid high-power impulse/DC magnetron co-sputtering
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Journal Articles

Impact of the DC intensity and electrode distance on pulsed-DC powder-pack boride layer growth kinetics

I. Campos-Silva, L. E. Castillo-Vela, I. Mejía-Caballero, J. L. Rosales-Lopez, M. Olivares-Luna, K. D. Chaparro-Pérez, F. P. Espino-Cortes, J. M. González-Carmona
Journal: Journal of Vacuum Science & Technology A
J. Vac. Sci. Technol. A 41, 063115 (2023)
https://doi.org/10.1116/6.0003167
Published: November 2023
View article titled, Impact of the DC intensity and electrode distance on pulsed-DC powder-pack boride layer growth kinetics
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Journal Articles

Study of Al2124-SiC nanocomposites by an improved statistical nanoindentation methodology

Esteban Broitman, Yuri Kadin, Predrag Andric
Journal: Journal of Vacuum Science & Technology A
J. Vac. Sci. Technol. A 41, 063210 (2023)
https://doi.org/10.1116/6.0003048
Published: November 2023
View article titled, Study of Al2124-SiC nanocomposites by an improved statistical nanoindentation methodology
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Journal Articles

Materials characterization: Can artificial intelligence be used to address reproducibility challenges?

Miu Lun Lau, Abraham Burleigh, Jeff Terry, Min Long
Journal: Journal of Vacuum Science & Technology A
J. Vac. Sci. Technol. A 41, 060801 (2023)
https://doi.org/10.1116/6.0002809
Published: November 2023
View article titled, Materials characterization: Can artificial intelligence be used to address reproducibility challenges?
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Journal Articles

Electron-enhanced atomic layer deposition of Ru thin films using Ru(DMBD)(CO)3 and effect of forming gas anneal

Michael A. Collings, Marcel Junige, Andrew S. Cavanagh, Victor Wang, Andrew C. Kummel, Steven M. George
Journal: Journal of Vacuum Science & Technology A
J. Vac. Sci. Technol. A 41, 062408 (2023)
https://doi.org/10.1116/6.0002938
Published: November 2023
View article titled, Electron-enhanced atomic layer deposition of Ru thin films using Ru(DMBD)(CO)<sub>3</sub> and effect of forming gas anneal
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Journal Articles

Electrochromic properties of NiO films prepared by atomic layer deposition

Xi Su, Zexin Tu, Liwei Ji, Hao Wu, Hongxing Xu, Chang Liu
Journal: Journal of Vacuum Science & Technology A
J. Vac. Sci. Technol. A 41, 062407 (2023)
https://doi.org/10.1116/6.0003040
Published: October 2023
View article titled, Electrochromic properties of NiO films prepared by atomic layer deposition
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Journal Articles

Ternary Ga–Sn–O and quaternary In–Ga–Sn–O channel based thin film transistors fabricated by plasma-enhanced atomic layer deposition

Jong Hyeon Won, Hyeonhui Jo, Pil Ju Youn, Bo Keun Park, Taek-Mo Chung, Jeong Hwan Han
Journal: Journal of Vacuum Science & Technology A
J. Vac. Sci. Technol. A 41, 062406 (2023)
https://doi.org/10.1116/6.0003004
Published: October 2023
View article titled, Ternary Ga–Sn–O and quaternary In–Ga–Sn–O channel based thin film transistors fabricated by plasma-enhanced atomic layer deposition
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Includes: Supplementary data
Journal Articles

Ordered deficient perovskite La2/3TiO3 films grown via molecular beam epitaxy

Joan Weng, Hyungki Shin, Simon Godin, Mohamed Oudah, Ronny Sutarto, Rebecca Pons, Bruce A. Davidson, Ke Zou
Journal: Journal of Vacuum Science & Technology A
J. Vac. Sci. Technol. A 41, 062703 (2023)
https://doi.org/10.1116/6.0003091
Published: October 2023
View article titled, Ordered deficient perovskite La<sub>2/3</sub>TiO<sub>3</sub> films grown via molecular beam epitaxy
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Includes: Supplementary data
Journal Articles

Formation of thin films via cold-rolled/annealed nickel sputtering targets

Sixie Li, Ming Wen, Chuanjun Wang, Yiqing Wang, Yue Shen
Journal: Journal of Vacuum Science & Technology A
J. Vac. Sci. Technol. A 41, 063405 (2023)
https://doi.org/10.1116/6.0003033
Published: October 2023
View article titled, Formation of thin films via cold-rolled/annealed nickel sputtering targets
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Journal Articles

Phase composition of polycrystalline HfNx (0.45 ≤ x ≤ 1.60) and effects of low-energy ion irradiation on microstructure, texture, and physical properties

Hwan-Seok Seo, Taeyoon Lee, Hyungjun Kim, Ivan Petrov, J. E. Greene
Journal: Journal of Vacuum Science & Technology A
J. Vac. Sci. Technol. A 41, 063406 (2023)
https://doi.org/10.1116/6.0003072
Published: October 2023
View article titled, Phase composition of polycrystalline HfN<sub>x</sub> (0.45 ≤ x ≤ 1.60) and effects of low-energy ion irradiation on microstructure, texture, and physical properties
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Journal Articles

Stabilization of the tetragonal phase in ZrO2 thin films according to ozone concentration using atomic layer deposition

Seokhwi Song, Eungju Kim, Kyunghoo Kim, Jangho Bae, Jinho Lee, Chang Hwa Jung, Hanjin Lim, Hyeongtag Jeon
Journal: Journal of Vacuum Science & Technology A
J. Vac. Sci. Technol. A 41, 062404 (2023)
https://doi.org/10.1116/6.0002901
Published: October 2023
View article titled, Stabilization of the tetragonal phase in ZrO<sub>2</sub> thin films according to ozone concentration using atomic layer deposition
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Journal Articles

Effects of duty cycle and nitrogen flow rate on the mechanical properties of (V,Mo)N coatings deposited by high-power pulsed magnetron sputtering

Yiqun Feng, Tsai-Fu Chung, Chien-Nan Hsiao, Jia-Hong Huang
Journal: Journal of Vacuum Science & Technology A
J. Vac. Sci. Technol. A 41, 063109 (2023)
https://doi.org/10.1116/6.0003006
Published: October 2023
View article titled, Effects of duty cycle and nitrogen flow rate on the mechanical properties of (V,Mo)N coatings deposited by high-power pulsed magnetron sputtering
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Journal Articles

High-mass metal ion irradiation enables growth of high-entropy sublattice nitride thin films from elemental targets

Vladyslav Rogoz, Oleksandr Pshyk, Bartosz Wicher, Justinas Palisaitis, Jun Lu, Daniel Primetzhofer, Ivan Petrov, Lars Hultman, Grzegorz Greczynski
Journal: Journal of Vacuum Science & Technology A
J. Vac. Sci. Technol. A 41, 063108 (2023)
https://doi.org/10.1116/6.0003065
Published: October 2023
View article titled, High-mass metal ion irradiation enables growth of high-entropy sublattice nitride thin films from elemental targets
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