Skip Nav Destination
Update search
Filter
All
- All
- Title
- Author
- Author Affiliations
- Full Text
- Abstract
- Keyword
- DOI
- ISBN
- EISBN
- ISSN
- EISSN
- Issue
- Volume
- References
Filter
All
- All
- Title
- Author
- Author Affiliations
- Full Text
- Abstract
- Keyword
- DOI
- ISBN
- EISBN
- ISSN
- EISSN
- Issue
- Volume
- References
Filter
All
- All
- Title
- Author
- Author Affiliations
- Full Text
- Abstract
- Keyword
- DOI
- ISBN
- EISBN
- ISSN
- EISSN
- Issue
- Volume
- References
Filter
All
- All
- Title
- Author
- Author Affiliations
- Full Text
- Abstract
- Keyword
- DOI
- ISBN
- EISBN
- ISSN
- EISSN
- Issue
- Volume
- References
Filter
All
- All
- Title
- Author
- Author Affiliations
- Full Text
- Abstract
- Keyword
- DOI
- ISBN
- EISBN
- ISSN
- EISSN
- Issue
- Volume
- References
Filter
All
- All
- Title
- Author
- Author Affiliations
- Full Text
- Abstract
- Keyword
- DOI
- ISBN
- EISBN
- ISSN
- EISSN
- Issue
- Volume
- References
NARROW
Format
Collections
Topics
Subjects
Journal
Article Type
Issue Section
Date
Availability
Journal Articles
Joan Weng, Hyungki Shin, Simon Godin, Mohamed Oudah, Ronny Sutarto, Rebecca Pons, Bruce A. Davidson, Ke Zou
J. Vac. Sci. Technol. A 41, 062703 (2023)
Published: October 2023
Includes: Supplementary data
Journal Articles
J. Vac. Sci. Technol. A 41, 063208 (2023)
Published: October 2023
Journal Articles
Miles D. Blanchet, Bethany E. Matthews, Steven R. Spurgeon, Steve M. Heald, Tamara Isaacs-Smith, Ryan B. Comes
J. Vac. Sci. Technol. A 41, 052703 (2023)
Published: July 2023
Includes: Supplementary data
Journal Articles
Zhe Chuan Feng, Deng Xie, Manika Tun Nafisa, Hao-Hsiung Lin, Weijie Lu, Jin-Ming Chen, Jeffrey Yiin, Kuei-Hsien Chen, Li-Chyong Chen, Benjamin Klein, Ian T. Ferguson
J. Vac. Sci. Technol. A 41, 053401 (2023)
Published: July 2023
Journal Articles
J. Vac. Sci. Technol. A 41, 033201 (2023)
Published: March 2023
Journal Articles
J. Vac. Sci. Technol. A 40, 063204 (2022)
Published: October 2022
Includes: Supplementary data
Journal Articles
J. Vac. Sci. Technol. A 40, 053205 (2022)
Published: September 2022
Journal Articles
Alex S. Ditter, Joseph I. Pacold, Zurong Dai, M. Lee Davisson, David Vine, Scott B. Donald, Brandon W. Chung, David K. Shuh
J. Vac. Sci. Technol. A 40, 043202 (2022)
Published: May 2022
Includes: Supplementary data
Journal Articles
J. G. Tobin, S. Nowak, S.-W. Yu, P. Roussel, R. Alonso-Mori, T. Kroll, D. Nordlund, T.-C. Weng, D. Sokaras
J. Vac. Sci. Technol. A 40, 033205 (2022)
Published: April 2022
Journal Articles
J. Vac. Sci. Technol. A 40, 023410 (2022)
Published: February 2022
Journal Articles
J. Vac. Sci. Technol. A 40, 010804 (2022)
Published: December 2021
Journal Articles
Jingwei Shi, Li Zeng, Shayla Nikzad, David M. Koshy, Arun S. Asundi, Callisto MacIsaac, Stacey F. Bent
J. Vac. Sci. Technol. A 40, 012402 (2022)
Published: December 2021
Includes: Supplementary data
Journal Articles
Alessandro R. Mazza, Xingyao Gao, Daniel J. Rossi, Brianna L. Musico, Tyler W. Valentine, Zachary Kennedy, Jie Zhang, Jason Lapano, Veerle Keppens, Robert G. Moore, Matthew Brahlek, Christina M. Rost, Thomas Z. Ward
J. Vac. Sci. Technol. A 40, 013404 (2022)
Published: November 2021
Includes: Supplementary data
Journal Articles
Cheng-Hao Chuang, Chieh-Ming Chen, Yu-Cheng Shao, Ping-Hung Yeh, Chih-Ming Chang, Way-Faung Pong, Mukes Kapilashrami, Per-Anders Glans, Sheraz Gul, Gongming Wang, Yat Li, Jin Zhang, Jun Miyawaki, Hideharu Niwa, Yoshihisa Harada, Jin-Ming Chen, Jinghua Guo
J. Vac. Sci. Technol. A 39, 063204 (2021)
Published: September 2021
Journal Articles
J. Vac. Sci. Technol. A 39, 063203 (2021)
Published: September 2021
Journal Articles
J. Vac. Sci. Technol. A 39, 063401 (2021)
Published: September 2021
Journal Articles
Trevor M. Willey, Jonathan R. I. Lee, Daniel Brehmer, Oscar A. Paredes Mellone, Lasse Landt, Peter R. Schreiner, Andrey A. Fokin, Boryslav A. Tkachenko, Armin de Meijere, Sergei Kozhushkov, Anthony W. van Buuren
J. Vac. Sci. Technol. A 39, 053208 (2021)
Published: August 2021
Journal Articles
J. Vac. Sci. Technol. A 39, 040802 (2021)
Published: June 2021
Journal Articles
J. Vac. Sci. Technol. A 39, 040801 (2021)
Published: June 2021
Journal Articles
J. G. Tobin, S. Nowak, S.-W. Yu, P. Roussel, R. Alonso-Mori, T. Kroll, D. Nordlund, T.-C. Weng, D. Sokaras
J. Vac. Sci. Technol. A 39, 043205 (2021)
Published: June 2021
1