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Journal Articles
J. Vac. Sci. Technol. A 42, 063206 (2024)
Published: October 2024
Journal Articles
J. Vac. Sci. Technol. A 42, 063201 (2024)
Published: September 2024
Journal Articles
J. Vac. Sci. Technol. A 34, 031603 (2016)
Published: April 2016
Journal Articles
Yusuke Suetsugu, Ken-ichi Kanazawa, Kyo Shibata, Takuya Ishibashi, Hiromi Hisamatsu, Mitsuru Shirai, Shinji Terui
J. Vac. Sci. Technol. A 34, 021605 (2016)
Published: February 2016
Journal Articles
J. Vac. Sci. Technol. A 31, 061312 (2013)
Published: October 2013
Journal Articles
John F. Hulbert, Matthieu Giraud-Carrier, Tom Wall, Aaron R. Hawkins, Scott Bergeson, Jennifer Black, Holger Schmidt
J. Vac. Sci. Technol. A 31, 033001 (2013)
Published: March 2013
Journal Articles
J. Vac. Sci. Technol. A 31, 013201 (2013)
Published: November 2012
Journal Articles
J. Vac. Sci. Technol. A 30, 011503 (2012)
Published: November 2011
Journal Articles
J. Vac. Sci. Technol. A 29, 053001 (2011)
Published: July 2011
Journal Articles
J. Vac. Sci. Technol. A 29, 021002 (2011)
Published: January 2011
Journal Articles
J. R. Chen, G. Y. Hsiung, C. C. Chang, C. L. Chen, C. K. Chan, C. M. Cheng, C. Y. Yang, L. H. Wu, H. P. Hsueh
J. Vac. Sci. Technol. A 28, 942–946 (2010)
Published: June 2010
Journal Articles
Y. Suetsugu, M. Shirai, M. Ohtsuka, T. Nishidono, K. Watanabe, Y. Suzuki, M. Tsuchiya, A. Yonemoto, K. Sennyu, H. Hara
J. Vac. Sci. Technol. A 27, 1303–1309 (2009)
Published: October 2009
Journal Articles
J. Vac. Sci. Technol. A 27, 913–917 (2009)
Published: June 2009
Journal Articles
J. Vac. Sci. Technol. A 26, 1293–1299 (2008)
Published: August 2008
Journal Articles
J. Vac. Sci. Technol. A 25, 54–60 (2007)
Published: January 2007
Journal Articles
J. Vac. Sci. Technol. A 24, L7–L10 (2006)
Published: August 2006
Journal Articles
J. Vac. Sci. Technol. A 24, 1560–1567 (2006)
Published: June 2006
Journal Articles
J. Vac. Sci. Technol. A 22, 602–605 (2004)
Published: April 2004
Journal Articles
J. Vac. Sci. Technol. A 21, 1447–1451 (2003)
Published: July 2003
Journal Articles
J. Vac. Sci. Technol. A 20, 1416–1419 (2002)
Published: June 2002
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