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Journal Articles

Oxidation properties of quaternary Zr-based diboride thin films grown by hybrid high-power impulse/DC magnetron co-sputtering

Babak Bakhit
Journal: Journal of Vacuum Science & Technology A
J. Vac. Sci. Technol. A 42, 010401 (2024)
https://doi.org/10.1116/6.0003197
Published: December 2023
View article titled, Oxidation properties of quaternary Zr-based diboride thin films grown by hybrid high-power impulse/DC magnetron co-sputtering
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Journal Articles

Angle resolved x-ray photoelectron spectroscopy assessment of the structure and composition of nanofilms—including uncertainties—through the multilayer model

Alberto Herrera-Gomez, Dulce Maria Guzman-Bucio, Marisol Mayorga-Garay, Orlando Cortazar-Martinez
Journal: Journal of Vacuum Science & Technology A
J. Vac. Sci. Technol. A 41, 063206 (2023)
https://doi.org/10.1116/6.0002981
Published: October 2023
View article titled, Angle resolved x-ray photoelectron spectroscopy assessment of the structure and composition of nanofilms—including uncertainties—through the multilayer model
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Journal Articles

Selective mask deposition using SiCl4 plasma for highly selective etching process

Miyako Matsui, Makoto Miura, Kenichi Kuwahara
Journal: Journal of Vacuum Science & Technology A
J. Vac. Sci. Technol. A 41, 063002 (2023)
https://doi.org/10.1116/6.0002773
Published: September 2023
View article titled, Selective mask deposition using SiCl<sub>4</sub> plasma for highly selective etching process
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Journal Articles

Comparing sputter rates, depth resolution, and ion yields for different gas cluster ion beams (GCIB): A practical guide to choosing the best GCIB for every application

N. Sano, A. Bellew, P. Blenkinsopp
Journal: Journal of Vacuum Science & Technology A
J. Vac. Sci. Technol. A 41, 053204 (2023)
https://doi.org/10.1116/6.0002864
Published: July 2023
View article titled, Comparing sputter rates, depth resolution, and ion yields for different gas cluster ion beams (GCIB): A practical guide to choosing the best GCIB for every application
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Journal Articles

Plasma-enhanced atomic layer deposition of silicon nitride for front-end-of-line applications

Marco Lisker, Mamathamba Kalishettyhalli Mahadevaiah, Keerthi Dorai Swamy Reddy
Journal: Journal of Vacuum Science & Technology A
J. Vac. Sci. Technol. A 41, 042406 (2023)
https://doi.org/10.1116/6.0002424
Published: July 2023
View article titled, Plasma-enhanced atomic layer deposition of silicon nitride for front-end-of-line applications
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Journal Articles

Fundamentals of thin film depth profiling by glow discharge optical emission spectroscopy

Alenka Vesel, Rok Zaplotnik, Gregor Primc, Miran Mozetic
Journal: Journal of Vacuum Science & Technology A
J. Vac. Sci. Technol. A 41, 040801 (2023)
https://doi.org/10.1116/6.0002695
Published: June 2023
View article titled, Fundamentals of thin film depth profiling by glow discharge optical emission spectroscopy
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Journal Articles

Resolving buried interfaces with low energy ion scattering

Adele Valpreda, Jacobus M. Sturm, Andrey E. Yakshin, Marcelo Ackermann
Journal: Journal of Vacuum Science & Technology A
J. Vac. Sci. Technol. A 41, 043203 (2023)
https://doi.org/10.1116/6.0002567
Published: May 2023
View article titled, Resolving buried interfaces with low energy ion scattering
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Journal Articles

XPS investigation of monoatomic and cluster argon sputtering of zirconium dioxide

Michael C. Burrell, Edward Gillman
Journal: Journal of Vacuum Science & Technology A
J. Vac. Sci. Technol. A 41, 043202 (2023)
https://doi.org/10.1116/6.0002630
Published: May 2023
View article titled, XPS investigation of monoatomic and cluster argon sputtering of zirconium dioxide
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Journal Articles

Correlating elemental compositions and charge carrier profiles in ultra-pure GaN/AlGaN stacks grown by molecular beam epitaxy

Stefan Schmult, Pascal Appelt, Claudia Silva, Steffen Wirth, Andre Wachowiak, Andreas Großer, Thomas Mikolajick
Journal: Journal of Vacuum Science & Technology A
J. Vac. Sci. Technol. A 41, 042702 (2023)
https://doi.org/10.1116/6.0002652
Published: May 2023
View article titled, Correlating elemental compositions and charge carrier profiles in ultra-pure GaN/AlGaN stacks grown by molecular beam epitaxy
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Journal Articles

Method for extracting the intrinsic diffusion coefficient from grain boundary diffusion depth profile

Songyou Lian, Antonie J. Fourie, Jiangyong Wang, Hendrik C. Swart, Jacobus Johannes Terblans
Journal: Journal of Vacuum Science & Technology A
J. Vac. Sci. Technol. A 41, 033401 (2023)
https://doi.org/10.1116/6.0002400
Published: March 2023
View article titled, Method for extracting the intrinsic diffusion coefficient from grain boundary diffusion depth profile
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Journal Articles

XPS characterization of a PuGa-7 at. % alloy

P. Roussel, S. C. Hernandez, J. J. Joyce, K. S. Graham, T. Venhaus
Journal: Journal of Vacuum Science & Technology A
J. Vac. Sci. Technol. A 41, 023204 (2023)
https://doi.org/10.1116/6.0002365
Published: February 2023
View article titled, XPS characterization of a PuGa-7 at. % alloy
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Includes: Supplementary data
Journal Articles

Dynamic character of compositional sputter depth profiling by SIMS: A comparison of different models for quantitative profile evaluation

Siegfried Hofmann, Feng-Min Zhong, Hao Yang, Jiang-Yong Wang, Cong-Kang Xu
Journal: Journal of Vacuum Science & Technology A
J. Vac. Sci. Technol. A 41, 013408 (2023)
https://doi.org/10.1116/6.0002233
Published: January 2023
View article titled, Dynamic character of compositional sputter depth profiling by SIMS: A comparison of different models for quantitative profile evaluation
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Journal Articles

Practical guide on chemometrics/informatics in x-ray photoelectron spectroscopy (XPS). I. Introduction to methods useful for large or complex datasets

Tahereh G. Avval, Neal Gallagher, David Morgan, Pascal Bargiela, Neal Fairley, Vincent Fernandez, Matthew R. Linford
Journal: Journal of Vacuum Science & Technology A
J. Vac. Sci. Technol. A 40, 063206 (2022)
https://doi.org/10.1116/6.0002082
Published: November 2022
View article titled, Practical guide on chemometrics/informatics in x-ray photoelectron spectroscopy (XPS). I. Introduction to methods useful for large or complex datasets
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Journal Articles

Growth of (SmxGa1−x)2O3 by molecular beam epitaxy

Anthony D. Stewart, Brent P. Gila, Cammy R. Abernathy, S. J. Pearton
Journal: Journal of Vacuum Science & Technology A
J. Vac. Sci. Technol. A 40, 062701 (2022)
https://doi.org/10.1116/6.0002135
Published: October 2022
View article titled, Growth of (Sm<sub>x</sub>Ga<sub>1−x</sub>)<sub>2</sub>O<sub>3</sub> by molecular beam epitaxy
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Includes: Supplementary data
Journal Articles

Growth and characterization of (Sc2O3)x(Ga2O3)1−x by molecular beam epitaxy

Mark S. Hlad, Brent P. Gila, Cammy R. Abernathy, Fan Ren, S. J. Pearton
Journal: Journal of Vacuum Science & Technology A
J. Vac. Sci. Technol. A 40, 043403 (2022)
https://doi.org/10.1116/6.0001805
Published: May 2022
View article titled, Growth and characterization of (Sc<sub>2</sub>O<sub>3</sub>)<sub>x</sub>(Ga<sub>2</sub>O<sub>3</sub>)<sub>1−x</sub> by molecular beam epitaxy
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Journal Articles

Atomic layer etching of Al2O3 with NF3 plasma fluorination and trimethylaluminum ligand exchange

Jihyun Kim, Dahee Shim, Yongjae Kim, Heeyeop Chae
Journal: Journal of Vacuum Science & Technology A
J. Vac. Sci. Technol. A 40, 032603 (2022)
https://doi.org/10.1116/6.0001616
Published: April 2022
View article titled, Atomic layer etching of Al<sub>2</sub>O<sub>3</sub> with NF<sub>3</sub> plasma fluorination and trimethylaluminum ligand exchange
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Journal Articles

Properties of gallium oxide thin films grown by ion beam sputter deposition at room temperature

Dmitry Kalanov, Yeliz Unutulmazsoy, Daniel Spemann, Jens Bauer, André Anders, Carsten Bundesmann
Journal: Journal of Vacuum Science & Technology A
J. Vac. Sci. Technol. A 40, 033409 (2022)
https://doi.org/10.1116/6.0001825
Published: April 2022
View article titled, Properties of gallium oxide thin films grown by ion beam sputter deposition at room temperature
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Journal Articles

All-dry free radical polymerization inside nanopores: Ion-milling-enabled coating thickness profiling revealed “necking” phenomena

Yifan Cheng, Alexandra Khlyustova, Rong Yang
Journal: Journal of Vacuum Science & Technology A
J. Vac. Sci. Technol. A 40, 033406 (2022)
https://doi.org/10.1116/6.0001718
Published: April 2022
View article titled, All-dry free radical polymerization inside nanopores: Ion-milling-enabled coating thickness profiling revealed “necking” phenomena
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Includes: Supplementary data
Journal Articles

Atomic layer etching of titanium nitride with surface modification by Cl radicals and rapid thermal annealing

Nobuya Miyoshi, Nicholas McDowell, Hiroyuki Kobayashi
Journal: Journal of Vacuum Science & Technology A
J. Vac. Sci. Technol. A 40, 032601 (2022)
https://doi.org/10.1116/6.0001827
Published: April 2022
View article titled, Atomic layer etching of titanium nitride with surface modification by Cl radicals and rapid thermal annealing
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Includes: Supplementary data
Journal Articles

Probing the polar-nonpolar oxide interfaces using resonant x-ray standing wave techniques

Cheng-Tai Kuo, Shih-Chieh Lin, Yi-De Chuang
Journal: Journal of Vacuum Science & Technology A
J. Vac. Sci. Technol. A 40, 010804 (2022)
https://doi.org/10.1116/6.0001484
Published: December 2021
View article titled, Probing the polar-nonpolar oxide interfaces using resonant x-ray standing wave techniques
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