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Journal Articles

Unveiling interface structure and polarity of wurtzite ZnO film epitaxially grown on a-plane sapphire substrate

Lu Lu, Weiwei Meng, Yingmin Wang, Jianbing Qiang, Shao-Bo Mi

J. Vac. Sci. Technol. A 41, 063211 (2023)

https://doi.org/10.1116/6.0003163

Published: November 2023

View article titled, Unveiling interface structure and polarity of wurtzite ZnO film epitaxially grown on a-plane sapphire substrate

Includes: Supplementary data

Journal Articles

Influence of nitrogen vacancies on the decomposition route and age hardening of wurtzite Ti_1−xAl_xN_y thin films

J. Salamania, A. F. Farhadizadeh, K. M. Calamba Kwick, I. C. Schramm, T. W. Hsu, L. J. S. Johnson, L. Rogström, M. Odén

J. Vac. Sci. Technol. A 41, 063413 (2023)

https://doi.org/10.1116/6.0003074

Published: November 2023

View article titled, Influence of nitrogen vacancies on the decomposition route and age hardening of wurtzite Ti1−xAlxNy thin films

Includes: Supplementary data

Journal Articles

Fabrication of antireflective coatings with self-cleaning function using Si–Ti modified hollow silicon mixed sol

Yufan Li, Yong Zheng, Yuze Du, Xi Zhang, Wangwang Wang, Jin Lv

J. Vac. Sci. Technol. A 41, 063411 (2023)

https://doi.org/10.1116/6.0003082

Published: November 2023

View article titled, Fabrication of antireflective coatings with self-cleaning function using Si–Ti modified hollow silicon mixed sol

Journal Articles

Effect of nitrogen pressure on the fabrication of AlCrFeCoNiCu_0.5 high entropy nitride thin films via cathodic arc deposition

Tenghao Jiang, Hong Zhao, Kostadinos Tsoutas, Lixian Sun, Hongwei Liu, Yanping Liu, Fanjun Xu, Zhong Zheng, Marcela M. Bilek, Zongwen Liu

J. Vac. Sci. Technol. A 41, 063410 (2023)

https://doi.org/10.1116/6.0003064

Published: October 2023

View article titled, Effect of nitrogen pressure on the fabrication of AlCrFeCoNiCu0.5 high entropy nitride thin films via cathodic arc deposition

Includes: Supplementary data

Journal Articles

Phase composition of polycrystalline HfN_x (0.45 ≤ x ≤ 1.60) and effects of low-energy ion irradiation on microstructure, texture, and physical properties

Hwan-Seok Seo, Taeyoon Lee, Hyungjun Kim, Ivan Petrov, J. E. Greene

J. Vac. Sci. Technol. A 41, 063406 (2023)

https://doi.org/10.1116/6.0003072

Published: October 2023

View article titled, Phase composition of polycrystalline HfNx (0.45 ≤ x ≤ 1.60) and effects of low-energy ion irradiation on microstructure, texture, and physical properties

Journal Articles

Effects of duty cycle and nitrogen flow rate on the mechanical properties of (V,Mo)N coatings deposited by high-power pulsed magnetron sputtering

Yiqun Feng, Tsai-Fu Chung, Chien-Nan Hsiao, Jia-Hong Huang

J. Vac. Sci. Technol. A 41, 063109 (2023)

https://doi.org/10.1116/6.0003006

Published: October 2023

View article titled, Effects of duty cycle and nitrogen flow rate on the mechanical properties of (V,Mo)N coatings deposited by high-power pulsed magnetron sputtering

Journal Articles

High-mass metal ion irradiation enables growth of high-entropy sublattice nitride thin films from elemental targets

Vladyslav Rogoz, Oleksandr Pshyk, Bartosz Wicher, Justinas Palisaitis, Jun Lu, Daniel Primetzhofer, Ivan Petrov, Lars Hultman, Grzegorz Greczynski

J. Vac. Sci. Technol. A 41, 063108 (2023)

https://doi.org/10.1116/6.0003065

Published: October 2023

View article titled, High-mass metal ion irradiation enables growth of high-entropy sublattice nitride thin films from elemental targets

Journal Articles

Evolution of β-Ga₂O₃ to γ-Ga₂O₃ solid-solution epitaxial films after high-temperature annealing

Kunyao Jiang, Jingyu Tang, Chengchao Xu, Kelly Xiao, Robert F. Davis, Lisa M. Porter

J. Vac. Sci. Technol. A 41, 062702 (2023)

https://doi.org/10.1116/6.0002962

Published: October 2023

View article titled, Evolution of β-Ga2O3 to γ-Ga2O3 solid-solution epitaxial films after high-temperature annealing

Includes: Supplementary data

Journal Articles

Thermal transport and structural improvements due to annealing of wafer bonded β-Ga₂O₃|4H-SiC

Michael E. Liao, Kenny Huynh, Zhe Cheng, Jingjing Shi, Samuel Graham, Mark S. Goorsky

J. Vac. Sci. Technol. A 41, 063203 (2023)

https://doi.org/10.1116/6.0002693

Published: September 2023

View article titled, Thermal transport and structural improvements due to annealing of wafer bonded β-Ga2O3|4H-SiC

Journal Articles

Plasma-enhanced atomic layer deposition of crystalline GaN thin films on quartz substrates with sharp interfaces

Sanjie Liu, Yangfeng Li, Qing Liu, Jiayou Tao, Xinhe Zheng

J. Vac. Sci. Technol. A 41, 052405 (2023)

https://doi.org/10.1116/6.0002639

Published: August 2023

View article titled, Plasma-enhanced atomic layer deposition of crystalline GaN thin films on quartz substrates with sharp interfaces

Journal Articles

Low-resistivity molybdenum obtained by atomic layer deposition

Kees van der Zouw, Bernhard Y. van der Wel, Antonius A. I. Aarnink, Rob A. M. Wolters, Dirk J. Gravesteijn, Alexey Y. Kovalgin

J. Vac. Sci. Technol. A 41, 052402 (2023)

https://doi.org/10.1116/6.0002804

Published: August 2023

View article titled, Low-resistivity molybdenum obtained by atomic layer deposition

Includes: Supplementary data

Journal Articles

Vertical NiO/β-Ga₂O₃ rectifiers grown by metalorganic chemical vapor deposition

Hsiao-Hsuan Wan, Jian-Sian Li, Chao-Ching Chiang, Fan Ren, Timothy Jinsoo Yoo, Honggyu Kim, Andrei Osinsky, Fikadu Alema, Stephen J. Pearton

J. Vac. Sci. Technol. A 41, 052707 (2023)

https://doi.org/10.1116/6.0002884

Published: August 2023

View article titled, Vertical NiO/β-Ga2O3 rectifiers grown by metalorganic chemical vapor deposition

Journal Articles

Study of the structure, structural transition, interface model, and magnetic moments of CrN grown on MgO(001) by molecular beam epitaxy

Khan Alam, Rodrigo Ponce-Pérez, Kai Sun, Andrew Foley, Noboru Takeuchi, Arthur R. Smith

J. Vac. Sci. Technol. A 41, 053411 (2023)

https://doi.org/10.1116/6.0002546

Published: August 2023

View article titled, Study of the structure, structural transition, interface model, and magnetic moments of CrN grown on MgO(001) by molecular beam epitaxy

Includes: Supplementary data

Journal Articles

Atomic layer deposition of Al₂O₃ interlayer for improving AlN growth on silicon substrates

Rony Saha, Jonathan Anderson, Mark W. Holtz, Edwin L. Piner

J. Vac. Sci. Technol. A 41, 053208 (2023)

https://doi.org/10.1116/6.0002760

Published: August 2023

View article titled, Atomic layer deposition of Al2O3 interlayer for improving AlN growth on silicon substrates

Journal Articles

MBE growth of In_0.53Ga_0.47Sb on In_0.53Ga_0.47As/InP substrates using the interfacial misfit dislocation arrays

Fatih F. Ince, Mega Frost, Subhashree Seth, Darryl Shima, Thomas J. Rotter, Ganesh Balakrishnan

J. Vac. Sci. Technol. A 41, 052704 (2023)

https://doi.org/10.1116/6.0002681

Published: July 2023

View article titled, MBE growth of In0.53Ga0.47Sb on In0.53Ga0.47As/InP substrates using the interfacial misfit dislocation arrays

Journal Articles

Jahn–Teller-driven phase segregation in Mn_xCo_3−xO₄ spinel thin films

Miles D. Blanchet, Bethany E. Matthews, Steven R. Spurgeon, Steve M. Heald, Tamara Isaacs-Smith, Ryan B. Comes

J. Vac. Sci. Technol. A 41, 052703 (2023)

https://doi.org/10.1116/6.0002329

Published: July 2023

View article titled, Jahn–Teller-driven phase segregation in MnxCo3−xO4 spinel thin films

Includes: Supplementary data

Journal Articles

Molecular beam epitaxy and crystal structure of majority a-plane-oriented and substrate-strained Mn₃Sn thin films grown directly on sapphire (0001)

Sneha Upadhyay, Tyler Erickson, Hannah Hall, Ashok Shrestha, David C. Ingram, Kai Sun, Juan Carlos Moreno Hernandez, Gregorio Hernandez Cocoletzi, Noboru Takeuchi, Arthur R. Smith

J. Vac. Sci. Technol. A 41, 042710 (2023)

https://doi.org/10.1116/6.0002535

Published: June 2023

View article titled, Molecular beam epitaxy and crystal structure of majority a-plane-oriented and substrate-strained Mn3Sn thin films grown directly on sapphire (0001)

Journal Articles

Investigation of the transition of amorphous Ti-thiolate prepared by hybrid atomic layer deposition/molecular layer deposition into titanium disulfide ultrathin film

Petros Abi Younes, Ashok-Kumar Yadav, Medet Zhukush, Van-Hoan Le, Hervé Roussel, Marie-Ingrid Richard, Clément Camp, Kai Szeto, Gianluca Ciatto, Nathanaelle Schneider, Elsje Alessandra Quadrelli, Hubert Renevier, Nicolas Gauthier

J. Vac. Sci. Technol. A 41, 042403 (2023)

https://doi.org/10.1116/6.0002448

Published: June 2023

View article titled, Investigation of the transition of amorphous Ti-thiolate prepared by hybrid atomic layer deposition/molecular layer deposition into titanium disulfide ultrathin film

Includes: Supplementary data

Journal Articles

The growth of self-intercalated Nb_1+xSe₂ by molecular beam epitaxy: The effect of processing conditions on the structure and electrical resistivity

Peter M. Litwin, Samantha T. Jaszewski, Wendy L. Sarney, Asher C. Leff, Sergiy Krylyuk, Albert V. Davydov, Jon F. Ihlefeld, Stephen J. McDonnell

J. Vac. Sci. Technol. A 41, 042707 (2023)

https://doi.org/10.1116/6.0002593

Published: June 2023

View article titled, The growth of self-intercalated Nb1+xSe2 by molecular beam epitaxy: The effect of processing conditions on the structure and electrical resistivity

Includes: Supplementary data

Journal Articles

Structural characterization of epitaxial γ-Ta₂N thin films and AlN/γ-Ta₂N heterostructures on SiC substrates

Neeraj Nepal, D. Scott Katzer, Andrew C. Lang, Brian P. Downey, Matthew T. Hardy, David J. Meyer

J. Vac. Sci. Technol. A 41, 042706 (2023)

https://doi.org/10.1116/6.0002530

Published: June 2023

View article titled, Structural characterization of epitaxial γ-Ta2N thin films and AlN/γ-Ta2N heterostructures on SiC substrates

NARROW

Topics

Unveiling interface structure and polarity of wurtzite ZnO film epitaxially grown on a-plane sapphire substrate

Influence of nitrogen vacancies on the decomposition route and age hardening of wurtzite Ti_1−xAl_xN_y thin films

Fabrication of antireflective coatings with self-cleaning function using Si–Ti modified hollow silicon mixed sol

Effect of nitrogen pressure on the fabrication of AlCrFeCoNiCu_0.5 high entropy nitride thin films via cathodic arc deposition

Phase composition of polycrystalline HfN_x (0.45 ≤ x ≤ 1.60) and effects of low-energy ion irradiation on microstructure, texture, and physical properties

Effects of duty cycle and nitrogen flow rate on the mechanical properties of (V,Mo)N coatings deposited by high-power pulsed magnetron sputtering

High-mass metal ion irradiation enables growth of high-entropy sublattice nitride thin films from elemental targets

Evolution of β-Ga₂O₃ to γ-Ga₂O₃ solid-solution epitaxial films after high-temperature annealing

Thermal transport and structural improvements due to annealing of wafer bonded β-Ga₂O₃|4H-SiC

Plasma-enhanced atomic layer deposition of crystalline GaN thin films on quartz substrates with sharp interfaces

Low-resistivity molybdenum obtained by atomic layer deposition

Vertical NiO/β-Ga₂O₃ rectifiers grown by metalorganic chemical vapor deposition

Study of the structure, structural transition, interface model, and magnetic moments of CrN grown on MgO(001) by molecular beam epitaxy

Atomic layer deposition of Al₂O₃ interlayer for improving AlN growth on silicon substrates

MBE growth of In_0.53Ga_0.47Sb on In_0.53Ga_0.47As/InP substrates using the interfacial misfit dislocation arrays

Jahn–Teller-driven phase segregation in Mn_xCo_3−xO₄ spinel thin films

Molecular beam epitaxy and crystal structure of majority a-plane-oriented and substrate-strained Mn₃Sn thin films grown directly on sapphire (0001)

Investigation of the transition of amorphous Ti-thiolate prepared by hybrid atomic layer deposition/molecular layer deposition into titanium disulfide ultrathin film

The growth of self-intercalated Nb_1+xSe₂ by molecular beam epitaxy: The effect of processing conditions on the structure and electrical resistivity

Structural characterization of epitaxial γ-Ta₂N thin films and AlN/γ-Ta₂N heterostructures on SiC substrates

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