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Journal Articles (4478)

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Atomic Layer Deposition (ALD) (78)
Special Topic Collection on Atomic Layer Deposition (ALD) (38)
2019 Special Collection on Atomic Layer Deposition (ALD) (28)
2018 Special Collection on Atomic Layer Deposition (ALD) (24)
Gallium Oxide Materials and Devices (24)
Atomic Layer Etching (ALE) (22)
Honoring Dr. Scott Chambers’ 70th Birthday and His Leadership in the Science and Technology of Oxide Thin Films (18)
Celebrating the Achievements and Life of Joe Greene (16)
Functional Coatings (16)
Festschrift Honoring Dr. Steve Rossnagel (14)

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