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Journal Articles

Chemical vapor deposition of zirconium(IV) sulfide on flexible polymers

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Jesse W. Cohan, Abigail D. Berube, Daniela Chavez, Luke M. Davis
Journal: Journal of Vacuum Science & Technology A
J. Vac. Sci. Technol. A 43, 053402 (2025)
https://doi.org/10.1116/6.0004710
Published: July 2025
View article titled, Chemical vapor deposition of zirconium(IV) sulfide on flexible polymers
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Journal Articles

Energy distribution of positively and negatively charged plasma ions of a pulsed magnetron sputtering discharge in an argon/oxygen gas mixture and deposition of functional ZnO films

Open Access
Rainer Hippler, Anna Kapran, Harm Wulff, Natalia Nepomniashchaia, Zdenek Remes, Jiri Olejnicek, Martin Cada, Zdenek Hubicka
Journal: Journal of Vacuum Science & Technology A
J. Vac. Sci. Technol. A 43, 053002 (2025)
https://doi.org/10.1116/6.0004722
Published: July 2025
View article titled, Energy distribution of positively and negatively charged plasma ions of a pulsed magnetron sputtering discharge in an argon/oxygen gas mixture and deposition of functional ZnO films
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Journal Articles

Atomic layer etching of niobium nitride using sequential exposures of O2 and H2/SF6 plasmas

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Azmain A. Hossain, Sela Murphy, David S. Catherall, Anthony J. Ardizzi, Austin J. Minnich
Journal: Journal of Vacuum Science & Technology A
J. Vac. Sci. Technol. A 43, 042605 (2025)
https://doi.org/10.1116/6.0004548
Published: July 2025
View article titled, Atomic layer etching of niobium nitride using sequential exposures of O2 and H2/SF6 plasmas
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Journal Articles

Photoelectron spectroscopy study of Pu thin films on Si

Open Access
Ladislav Havela, Thomas Gouder
Journal: Journal of Vacuum Science & Technology A
J. Vac. Sci. Technol. A 43, 043414 (2025)
https://doi.org/10.1116/6.0004503
Published: July 2025
View article titled, Photoelectron spectroscopy study of Pu thin films on Si
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Journal Articles

Combining molecular beam epitaxy and low-energy electron microscopy with in situ magnetic susceptibility measurements within an integrated ultrahigh vacuum system

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Rongting Wu, Ivan Bespalov, Xi He, Jin Zhao, Shenglong Li, Ivan Božović
Journal: Journal of Vacuum Science & Technology A
J. Vac. Sci. Technol. A 43, 042703 (2025)
https://doi.org/10.1116/6.0004699
Published: July 2025
View article titled, Combining molecular beam epitaxy and low-energy electron microscopy with in situ magnetic susceptibility measurements within an integrated ultrahigh vacuum system
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Journal Articles

Evaluation of electrical characteristics through band alignment and defect analysis of ultrathin Pt/ZrO2–Al2O3–ZrO2/TiN DRAM metal–insulator–metal capacitors

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Suwan Lee, Junmo Kim, Beomho Won, Jiyeong Park, Ashshi Kumar, Jiye Baek, Jin Su Lee, Chang-Hwa Jung, Hanjin Lim, Hyungtak Seo
Journal: Journal of Vacuum Science & Technology A
J. Vac. Sci. Technol. A 43, 043210 (2025)
https://doi.org/10.1116/6.0004387
Published: July 2025
View article titled, Evaluation of electrical characteristics through band alignment and defect analysis of ultrathin Pt/ZrO2–Al2O3–ZrO2/TiN DRAM metal–insulator–metal capacitors
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Journal Articles

Metalorganic chemical vapor deposition epitaxy of β-Ga2O3 films on (001) Ga2O3 substrates with fast growth rates

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Lingyu Meng, Dong Su Yu, Md Mosarof Hossain Sarkar, Hongping Zhao
Journal: Journal of Vacuum Science & Technology A
J. Vac. Sci. Technol. A 43, 042702 (2025)
https://doi.org/10.1116/6.0004575
Published: June 2025
View article titled, Metalorganic chemical vapor deposition epitaxy of β-Ga2O3 films on (001) Ga2O3 substrates with fast growth rates
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Journal Articles

Plasma dynamics of modulated pulsed power magnetron sputtered Cr target in an Ar-He atmosphere

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Y. G. Li, G. Z. Ouyang, L. Cui, Z. Y. Zhou
Journal: Journal of Vacuum Science & Technology A
J. Vac. Sci. Technol. A 43, 043109 (2025)
https://doi.org/10.1116/6.0004623
Published: June 2025
View article titled, Plasma dynamics of modulated pulsed power magnetron sputtered Cr target in an Ar-He atmosphere
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Journal Articles

Plasma enhanced atomic layer deposition of HfO2—A potential gate dielectric for GaN-based devices

Open Access
Pallabi Paul, Enrico Brusaterra, Ina Ostermay, Eldad Bahat Treidel, Frank Brunner, Anna Mogilatenko, Kashyap Udas, Jos Boschker, Oliver Hilt, Olaf Krüger
Journal: Journal of Vacuum Science & Technology A
J. Vac. Sci. Technol. A 43, 042406 (2025)
https://doi.org/10.1116/6.0004564
Published: June 2025
View article titled, Plasma enhanced atomic layer deposition of HfO2—A potential gate dielectric for GaN-based devices
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Journal Articles

Polycrystalline morphology and anomalous Hall effect in RF-sputtered Co2MnGa films

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Carter E. Wade, Sunny Phan, Katherine E. Coffin, Gabe J. Paynter, Ty J. Cawein, Kurt G. Eyink, Andrei Kogan, Joseph P. Corbett
Journal: Journal of Vacuum Science & Technology A
J. Vac. Sci. Technol. A 43, 043412 (2025)
https://doi.org/10.1116/6.0004556
Published: June 2025
View article titled, Polycrystalline morphology and anomalous Hall effect in RF-sputtered Co2MnGa films
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Journal Articles

Chemical reactions and crystallization behavior in thermal ALD of BaTiO3 thin films from bis-(1,2,4 triisopropylcyclopentadienyl)-barium and titanium isopropoxide precursors

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Jiayi Chen, Zekai Wang, Typher Yom, Chengyang Zhang, Mark D. Losego, Asif I. Khan
Journal: Journal of Vacuum Science & Technology A
J. Vac. Sci. Technol. A 43, 042405 (2025)
https://doi.org/10.1116/6.0004385
Published: June 2025
View article titled, Chemical reactions and crystallization behavior in thermal ALD of BaTiO3 thin films from bis-(1,2,4 triisopropylcyclopentadienyl)-barium and titanium isopropoxide precursors
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Journal Articles

Growth and properties of Sn-doped sol-gel Ga2O3 thin films

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Kate M. Wislang, Rodrigo Martinez-Gazoni, Roger J. Reeves, Martin W. Allen
Journal: Journal of Vacuum Science & Technology A
J. Vac. Sci. Technol. A 43, 043410 (2025)
https://doi.org/10.1116/6.0004540
Published: June 2025
View article titled, Growth and properties of Sn-doped sol-gel Ga2O3 thin films
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Journal Articles

Effect of the repeated application of First Contact™ polymer on xenon-difluoride passivated lithium fluoride on aluminum surfaces for space telescopes

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Joshua Vawdrey, James Hamilton, Drew Watson, Lauren Miner, Osemudiamhen Destiny Amienghemhen, Walter Paxton, David Allred
Journal: Journal of Vacuum Science & Technology A
J. Vac. Sci. Technol. A 43, 043408 (2025)
https://doi.org/10.1116/6.0004601
Published: May 2025
View article titled, Effect of the repeated application of First Contact™ polymer on xenon-difluoride passivated lithium fluoride on aluminum surfaces for space telescopes
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Journal Articles

Hard x-ray detection by using β-Ga2O3 devices fabricated through radiofrequency sputtering

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Venkatesh Narasihman, Deveshwar Sasikumar, Balaji Gururajan, Wei-Sheng Liu, Sheng Hsiang Kao, Ting-Rui Hsu
Journal: Journal of Vacuum Science & Technology A
J. Vac. Sci. Technol. A 43, 043407 (2025)
https://doi.org/10.1116/6.0004537
Published: May 2025
View article titled, Hard x-ray detection by using β-Ga2O3 devices fabricated through radiofrequency sputtering
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Journal Articles

John Ekerdt – the man, the myth, the legend…

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Stacey F. Bent, Jane P. Chang
Journal: Journal of Vacuum Science & Technology A
J. Vac. Sci. Technol. A 43, 041601 (2025)
https://doi.org/10.1116/6.0004700
Published: May 2025
View article titled, John Ekerdt – the man, the myth, the legend…
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Journal Articles

Self-limiting deposition of copper from copper beta-diketonates and plasma electrons

Open Access
Premrudee Promdet, Pentti Niiranen, Simon Lagerkvist, Daniel Lundin, Henrik Pedersen
Journal: Journal of Vacuum Science & Technology A
J. Vac. Sci. Technol. A 43, 040402 (2025)
https://doi.org/10.1116/6.0004410
Published: May 2025
View article titled, Self-limiting deposition of copper from copper beta-diketonates and plasma electrons
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Journal Articles

Detection of low levels of oxygen in reactive materials by x-ray photoelectron spectroscopy (XPS)

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Jeffrey R. Shallenberger, Robert W. Hengstebeck, Gilbert B. Rayner
Journal: Journal of Vacuum Science & Technology A
J. Vac. Sci. Technol. A 43, 042404 (2025)
https://doi.org/10.1116/6.0004652
Published: May 2025
View article titled, Detection of low levels of oxygen in reactive materials by x-ray photoelectron spectroscopy (XPS)
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Journal Articles

Role of trace moisture in low temperature thermal ALD of titanium dioxide using tetrakis(dimethylamido) titanium (IV) and molecular oxygen

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Harshdeep S. Bhatia, Gregory Jursich, Christos G. Takoudis
Journal: Journal of Vacuum Science & Technology A
J. Vac. Sci. Technol. A 43, 042403 (2025)
https://doi.org/10.1116/6.0004434
Published: May 2025
View article titled, Role of trace moisture in low temperature thermal ALD of titanium dioxide using tetrakis(dimethylamido) titanium (IV) and molecular oxygen
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Journal Articles

In situ, simultaneous spectroscopic ellipsometry and quadrupole mass spectrometry studies of ZnO etching using Hacac and O2 plasma

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Terrick McNealy-James, Ruthlyn Mangroo, S. Novia Berriel, Luis Tomar, Eric Bissell, Taylor M. Currie, Justin Moore, Titel Jurca, Parag Banerjee
Journal: Journal of Vacuum Science & Technology A
J. Vac. Sci. Technol. A 43, 042602 (2025)
https://doi.org/10.1116/6.0004417
Published: May 2025
View article titled, In situ, simultaneous spectroscopic ellipsometry and quadrupole mass spectrometry studies of ZnO etching using Hacac and O2 plasma
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Journal Articles

Atomic layer deposition of entropy stabilized Zr2Ta2O9 and light activated self-rectifying resistive switching

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Shane M. W. Witsell, Konner E. K. Holden, Dustin Z. Austin, John F. Conley, Jr.
Journal: Journal of Vacuum Science & Technology A
J. Vac. Sci. Technol. A 43, 042402 (2025)
https://doi.org/10.1116/6.0004512
Published: May 2025
View article titled, Atomic layer deposition of entropy stabilized Zr2Ta2O9 and light activated self-rectifying resistive switching
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