Skip Nav Destination
Update search
Filter
All
- All
- Title
- Author
- Author Affiliations
- Full Text
- Abstract
- Keyword
- DOI
- ISBN
- EISBN
- ISSN
- EISSN
- Issue
- Volume
- References
Filter
All
- All
- Title
- Author
- Author Affiliations
- Full Text
- Abstract
- Keyword
- DOI
- ISBN
- EISBN
- ISSN
- EISSN
- Issue
- Volume
- References
Filter
All
- All
- Title
- Author
- Author Affiliations
- Full Text
- Abstract
- Keyword
- DOI
- ISBN
- EISBN
- ISSN
- EISSN
- Issue
- Volume
- References
Filter
All
- All
- Title
- Author
- Author Affiliations
- Full Text
- Abstract
- Keyword
- DOI
- ISBN
- EISBN
- ISSN
- EISSN
- Issue
- Volume
- References
Filter
All
- All
- Title
- Author
- Author Affiliations
- Full Text
- Abstract
- Keyword
- DOI
- ISBN
- EISBN
- ISSN
- EISSN
- Issue
- Volume
- References
Filter
All
- All
- Title
- Author
- Author Affiliations
- Full Text
- Abstract
- Keyword
- DOI
- ISBN
- EISBN
- ISSN
- EISSN
- Issue
- Volume
- References
NARROW
Format
Collections
Topics
Subjects
Journal
Article Type
Issue Section
Date
Availability
Journal Articles
Stefan P. Svensson, Nadeemullah A. Mahadik, Gela Kipshidze, Dmitri Donetski, Jingze Zhao, Gregory Belenky
J. Vac. Sci. Technol. A 41, 040802 (2023)
Published: June 2023
Journal Articles
J. Vac. Sci. Technol. A 7, 314–320 (1989)
Published: March 1989
Journal Articles
J. Vac. Sci. Technol. A 6, 1526–1530 (1988)
Published: May 1988
Journal Articles
J. Vac. Sci. Technol. A 4, 2190–2194 (1986)
Published: July 1986
Journal Articles
J. Vac. Sci. Technol. A 3, 60–66 (1985)
Published: January 1985
Journal Articles
J. Vac. Sci. Technol. A 3, 112–115 (1985)
Published: January 1985
Journal Articles
J. Vac. Sci. Technol. A 1, 1656–1660 (1983)
Published: July 1983