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Journal Articles
Heta-Elisa Nieminen, Mykhailo Chundak, Mikko J. Heikkilä, Paloma Ruiz Kärkkäinen, Marko Vehkamäki, Matti Putkonen, Mikko Ritala
J. Vac. Sci. Technol. A 41, 022401 (2023)
Published: February 2023
Journal Articles
J. Vac. Sci. Technol. A 40, 032401 (2022)
Published: March 2022
Includes: Supplementary data
Journal Articles
Erik W. Peterson, Huanru Wang, Zongyuan Liu, Tasnim Ara, Sanjaya D. Senanayake, Jose A. Rodriguez, Jing Zhou
J. Vac. Sci. Technol. A 40, 013209 (2022)
Published: December 2021
Journal Articles
J. Vac. Sci. Technol. A 40, 013203 (2022)
Published: December 2021
Includes: Supplementary data
Journal Articles
J. Vac. Sci. Technol. A 39, 063214 (2021)
Published: October 2021
Journal Articles
J. Vac. Sci. Technol. A 39, 053205 (2021)
Published: August 2021
Journal Articles
Marie E. Turano, Ludo B. F. Juurlink, Maxwell Z. Gillum, Elizabeth A. Jamka, George Hildebrandt, Faith Lewis, Daniel R. Killelea
J. Vac. Sci. Technol. A 39, 053201 (2021)
Published: July 2021
Journal Articles
J. Vac. Sci. Technol. A 38, 063201 (2020)
Published: September 2020
Journal Articles
J. Vac. Sci. Technol. A 38, 053205 (2020)
Published: August 2020
Journal Articles
Daniel A. Schlosser, Dariia Yehorova, Hasan Kaleem, Eric M. Maxwell, Jordon S. Baker, Maxwell Z. Gillum, Maria C. DePonte, Kendra Letchworth-Weaver, Ashleigh E. Baber
J. Vac. Sci. Technol. A 38, 033213 (2020)
Published: May 2020
Includes: Supplementary data
Journal Articles
J. Vac. Sci. Technol. A 37, 051401 (2019)
Published: August 2019
Journal Articles
J. Vac. Sci. Technol. A 36, 021402 (2018)
Published: January 2018
Journal Articles
J. Vac. Sci. Technol. A 36, 021401 (2018)
Published: November 2017
Journal Articles
J. Vac. Sci. Technol. A 35, 041401 (2017)
Published: May 2017
Journal Articles
J. Vac. Sci. Technol. A 34, 031601 (2016)
Published: March 2016
Includes: Supplementary data
Journal Articles
J. Vac. Sci. Technol. A 33, 061406 (2015)
Published: October 2015
Journal Articles
J. Vac. Sci. Technol. A 33, 05E115 (2015)
Published: July 2015
Journal Articles
J. Vac. Sci. Technol. A 33, 05E105 (2015)
Published: May 2015
Journal Articles
J. Vac. Sci. Technol. A 33, 01A108 (2015)
Published: October 2014
Journal Articles
J. Vac. Sci. Technol. A 32, 051402 (2014)
Published: July 2014
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