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Journal Articles

Current-carrying tribological behavior of copper alloy matrix and molybdenum alloy coating at high current density

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Yu-jie Zhou, Yang Li, Na Tan, Bing-wen Lu, Wei Yin, Guo-liang Zhang, Meng Liu, Yu-Jun Cai, Qi-yao Deng, Xu Kong
Journal: Journal of Vacuum Science & Technology A
J. Vac. Sci. Technol. A 42, 020402 (2024)
https://doi.org/10.1116/6.0003313
Published: February 2024
View articletitled, Current-carrying tribological behavior of copper alloy matrix and molybdenum alloy coating at high current density
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Journal Articles

Potential for reactive pulsed-dc magnetron sputtering of nanocomposite VOx microbolometer thin films

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Yao O. Jin (金尧), Adem Ozcelik, Mark W. Horn, Thomas N. Jackson
Journal: Journal of Vacuum Science & Technology A
J. Vac. Sci. Technol. A 32, 061501 (2014)
https://doi.org/10.1116/1.4894268
Published: August 2014
View articletitled, Potential for reactive pulsed-dc magnetron sputtering of nanocomposite VOx microbolometer thin films
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Journal Articles

Fabrication of a self-absorbing, self-supported complementary metal-oxide-semiconductor compatible micromachined bolometer

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A. H. Z. Ahmed, R. N. Tait
Journal: Journal of Vacuum Science & Technology A
J. Vac. Sci. Technol. A 22, 842–846 (2004)
https://doi.org/10.1116/1.1722404
Published: May 2004
View articletitled, Fabrication of a self-absorbing, self-supported complementary metal-oxide-semiconductor compatible micromachined bolometer
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Journal Articles

1.5 μm to 0.87 μm optical upconversion using wafer fusion technology

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H. Luo, D. Ban, H. C. Liu, A. J. SpringThorpe, Z. R. Wasilewski, M. Buchanan, R. Glew
Journal: Journal of Vacuum Science & Technology A
J. Vac. Sci. Technol. A 22, 788–791 (2004)
https://doi.org/10.1116/1.1689300
Published: May 2004
View articletitled, 1.5 μm to 0.87 μm optical upconversion using wafer fusion technology
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Journal Articles

Integrated AlN/diamond heat spreaders for silicon device processing

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S. N. Yoganand, K. Jagannadham, A. Karoui, H. Wang
Journal: Journal of Vacuum Science & Technology A
J. Vac. Sci. Technol. A 20, 1974–1982 (2002)
https://doi.org/10.1116/1.1513643
Published: November 2002
View articletitled, Integrated AlN/diamond heat spreaders for silicon device processing
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Journal Articles

Heat transfer in ultrahigh vacuum scanning thermal microscopy

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W. Müller-Hirsch, A. Kraft, M. T. Hirsch, J. Parisi, A. Kittel
Journal: Journal of Vacuum Science & Technology A
J. Vac. Sci. Technol. A 17, 1205–1210 (1999)
https://doi.org/10.1116/1.581796
Published: July 1999
View articletitled, Heat transfer in ultrahigh vacuum scanning thermal microscopy
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Journal Articles

In situ measurement of temperature uniformity of disk substrate in an in‐line sputtering system

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E. Fujita, K. Furusawa, H. Kataoka, N. Tsumita, T. Yonekawa, N. Shige
Journal: Journal of Vacuum Science & Technology A
J. Vac. Sci. Technol. A 10, 1657–1661 (1992)
https://doi.org/10.1116/1.577765
Published: July 1992
View articletitled, In situ measurement of temperature uniformity of disk substrate in an in‐line sputtering system
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Journal Articles

Innovations in helium leak detector systems

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Lyle E. Bergquist, Y. Tito Sasaki
Journal: Journal of Vacuum Science & Technology A
J. Vac. Sci. Technol. A 10, 2650–2654 (1992)
https://doi.org/10.1116/1.577953
Published: July 1992
View articletitled, Innovations in helium leak detector systems
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Journal Articles

Vibrational excitation processes in molecular discharges

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James A. O’Neill
Journal: Journal of Vacuum Science & Technology A
J. Vac. Sci. Technol. A 9, 669–674 (1991)
https://doi.org/10.1116/1.577387
Published: May 1991
View articletitled, Vibrational excitation processes in molecular discharges
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Journal Articles

Infrared thermography of first wall components on the Tandem Mirror Experiment Upgrade

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J. G. Watkins, R. C. Dykhuizen, W. L. Hsu, D. N. Hill, S. L. Allen
Journal: Journal of Vacuum Science & Technology A
J. Vac. Sci. Technol. A 4, 1207–1209 (1986)
https://doi.org/10.1116/1.573396
Published: May 1986
View articletitled, Infrared thermography of first wall components on the Tandem Mirror Experiment Upgrade
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