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Journal Articles
J. Vac. Sci. Technol. A 43, 023204 (2025)
Published: February 2025
Journal Articles
J. Vac. Sci. Technol. A 43, 022601 (2025)
Published: February 2025
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J. Vac. Sci. Technol. A 43, 023002 (2025)
Published: February 2025
Journal Articles
J. Vac. Sci. Technol. A 43, 023202 (2025)
Published: January 2025
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J. Vac. Sci. Technol. A 43, 020402 (2025)
Published: January 2025
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J. Vac. Sci. Technol. A 43, 023201 (2025)
Published: January 2025
Journal Articles
Thorsten Lill, Mingmei Wang, Dongjun Wu, Youn-Jin Oh, Tae Won Kim, Mark Wilcoxson, Harmeet Singh, Vahid Ghodsi, Steven M. George, Yuri Barsukov, Igor Kaganovich
J. Vac. Sci. Technol. A 42, 063006 (2024)
Published: November 2024
Journal Articles
J. Vac. Sci. Technol. A 42, 062412 (2024)
Published: November 2024
Journal Articles
J. Vac. Sci. Technol. A 42, 063210 (2024)
Published: October 2024
Journal Articles
Yundong Zhou, Alexis Franquet, Valentina Spampinato, Alex Merkulov, Michael R. Keenan, Paul A. W. van der Heide, Gustavo F. Trindade, Wilfried Vandervorst, Ian S. Gilmore
J. Vac. Sci. Technol. A 42, 053208 (2024)
Published: September 2024