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Journal Articles

Enhanced structural and optical properties of semipolar ( 11 2 ¯ 2 ) AlGaN film with insertion of AlN/AlGaN superlattice

Xuguang Luo, Xiong Zhang, Ruiting Fang, Lin Chen, Shenyu Xu, Jia Cui, Zhiyi Lou, Yifeng Xu, Shuchang Wang, Guohua Hu
Journal: Journal of Vacuum Science & Technology A
J. Vac. Sci. Technol. A 41, 052705 (2023)
https://doi.org/10.1116/6.0002870
Published: July 2023
View article titled, Enhanced structural and optical properties of semipolar ( 11 2 ¯ 2 ) AlGaN film with insertion of AlN/AlGaN superlattice
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Journal Articles

Performance and stability of Al-doped HfGaO thin-film transistors deposited by vapor cooling condensation system

Hsin-Ying Lee, Guo-Long Zhu, Ching-Ting Lee
Journal: Journal of Vacuum Science & Technology A
J. Vac. Sci. Technol. A 41, 053406 (2023)
https://doi.org/10.1116/6.0002826
Published: July 2023
View article titled, Performance and stability of Al-doped HfGaO thin-film transistors deposited by vapor cooling condensation system
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Journal Articles

Nitrogen centers in single crystal diamond grown by chemical vapor deposition

D. S. Misra
Journal: Journal of Vacuum Science & Technology A
J. Vac. Sci. Technol. A 41, 042703 (2023)
https://doi.org/10.1116/6.0002622
Published: May 2023
View article titled, Nitrogen centers in single crystal diamond grown by chemical vapor deposition
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Journal Articles

InAs quantum emitters at telecommunication wavelengths grown by droplet epitaxy

Margaret A. Stevens, Wayne McKenzie, Gerald Baumgartner, Joel Q. Grim, Samuel G. Carter, Allan S. Bracker
Journal: Journal of Vacuum Science & Technology A
J. Vac. Sci. Technol. A 41, 032703 (2023)
https://doi.org/10.1116/6.0002572
Published: April 2023
View article titled, InAs quantum emitters at telecommunication wavelengths grown by droplet epitaxy
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Journal Articles

Photoresponse of O2 plasma treated WS2 monolayers synthesized by chemical vapor deposition

André do Nascimento Barbosa, Neileth Johanna Stand Figueroa, Cesar Augusto Diaz Mendoza, Fernando Lázaro Freire, Jr.
Journal: Journal of Vacuum Science & Technology A
J. Vac. Sci. Technol. A 41, 022202 (2023)
https://doi.org/10.1116/6.0002202
Published: February 2023
View article titled, Photoresponse of O<sub>2</sub> plasma treated WS<sub>2</sub> monolayers synthesized by chemical vapor deposition
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Journal Articles

Photoluminescence spectroscopy of Cr3+ in β-Ga2O3 and (Al0.1Ga0.9)2O3

Cassandra Remple, Lauren M. Barmore, Jani Jesenovec, John S. McCloy, Matthew D. McCluskey
Journal: Journal of Vacuum Science & Technology A
J. Vac. Sci. Technol. A 41, 022702 (2023)
https://doi.org/10.1116/6.0002340
Published: January 2023
View article titled, Photoluminescence spectroscopy of Cr<sup>3+</sup> in β-Ga<sub>2</sub>O<sub>3</sub> and (Al<sub>0.1</sub>Ga<sub>0.9</sub>)<sub>2</sub>O<sub>3</sub>
Open the PDF for Photoluminescence spectroscopy of Cr<sup>3+</sup> in β-Ga<sub>2</sub>O<sub>3</sub> and (Al<sub>0.1</sub>Ga<sub>0.9</sub>)<sub>2</sub>O<sub>3</sub> in another window
Includes: Supplementary data
Journal Articles

Atomically precise deposition of (Er0.1Y0.9)2SiO5 combined with digitally processed DC sputtering and non-radical oxidation

Ghent Nakamura, Hideo Isshiki
Journal: Journal of Vacuum Science & Technology A
J. Vac. Sci. Technol. A 40, 053406 (2022)
https://doi.org/10.1116/6.0001917
Published: September 2022
View article titled, Atomically precise deposition of (Er<sub>0.1</sub>Y<sub>0.9</sub>)<sub>2</sub>SiO<sub>5</sub> combined with digitally processed DC sputtering and non-radical oxidation
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Includes: Supplementary data
Journal Articles

Tunable emission from Eu:SiOxNy thin films prepared by integrated magnetron sputtering and plasma enhanced chemical vapor deposition

Fahmida Azmi, Yuxuan Gao, Zahra Khatami, Peter Mascher
Journal: Journal of Vacuum Science & Technology A
J. Vac. Sci. Technol. A 40, 043402 (2022)
https://doi.org/10.1116/6.0001761
Published: May 2022
View article titled, Tunable emission from Eu:SiO<sub>x</sub>N<sub>y</sub> thin films prepared by integrated magnetron sputtering and plasma enhanced chemical vapor deposition
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Journal Articles

Modification of β-gallium oxide electronic properties by irradiation with high-energy electrons

T.-Huong Dang, M. Konczykowski, H. Jaffrès, V. I. Safarov, H.-J. Drouhin
Journal: Journal of Vacuum Science & Technology A
J. Vac. Sci. Technol. A 40, 033416 (2022)
https://doi.org/10.1116/6.0001821
Published: May 2022
View article titled, Modification of β-gallium oxide electronic properties by irradiation with high-energy electrons
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Journal Articles

Effect of substrate and substrate temperature on the deposition of MoS2 by radio frequency magnetron sputtering

Valiyaparambil J. Cicily Rigi, Madambi K. Jayaraj, Kachirayil J. Saji
Journal: Journal of Vacuum Science & Technology A
J. Vac. Sci. Technol. A 40, 032201 (2022)
https://doi.org/10.1116/6.0001685
Published: March 2022
View article titled, Effect of substrate and substrate temperature on the deposition of MoS<sub>2</sub> by radio frequency magnetron sputtering
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Includes: Supplementary data
Journal Articles

Homoepitaxial GaN micropillar array by plasma-free photo-enhanced metal-assisted chemical etching

Clarence Y. Chan, Shunya Namiki, Jennifer K. Hite, Michael A. Mastro, Syed B. Qadri, Xiuling Li
Journal: Journal of Vacuum Science & Technology A
J. Vac. Sci. Technol. A 39, 053212 (2021)
https://doi.org/10.1116/6.0001231
Published: August 2021
View article titled, Homoepitaxial GaN micropillar array by plasma-free photo-enhanced metal-assisted chemical etching
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Includes: Supplementary data
Journal Articles

Efficacy of boron nitride encapsulation against plasma-processing of 2D semiconductor layers

Pawan Kumar, Kelotchi S. Figueroa, Alexandre C. Foucher, Kiyoung Jo, Natalia Acero, Eric A. Stach, Deep Jariwala
Journal: Journal of Vacuum Science & Technology A
J. Vac. Sci. Technol. A 39, 032201 (2021)
https://doi.org/10.1116/6.0000874
Published: March 2021
View article titled, Efficacy of boron nitride encapsulation against plasma-processing of 2D semiconductor layers
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Includes: Supplementary data
Journal Articles

Multi-technique investigation of Ni-doped ZnO thin films on sapphire by metalorganic chemical vapor deposition

Jiwei Chen, Jiabin Wang, Vishal Saravade, Ian T. Ferguson, Weiguo Hu, Zhe Chuan Feng, Lingyu Wan
Journal: Journal of Vacuum Science & Technology A
J. Vac. Sci. Technol. A 39, 023408 (2021)
https://doi.org/10.1116/6.0000816
Published: February 2021
View article titled, Multi-technique investigation of Ni-doped ZnO thin films on sapphire by metalorganic chemical vapor deposition
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Journal Articles

Atmospheric-pressure spatial chemical vapor deposition of tungsten oxide

Travis Wen-Kai Yeow, Kissan Mistry, Ahmed Shahin, Mustafa Yavuz, Kevin P. Musselman
Journal: Journal of Vacuum Science & Technology A
J. Vac. Sci. Technol. A 38, 052411 (2020)
https://doi.org/10.1116/6.0000347
Published: September 2020
View article titled, Atmospheric-pressure spatial chemical vapor deposition of tungsten oxide
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Journal Articles

Structural and optical properties of (Zn,Mn)O thin films prepared by atomic layer deposition

Amirhossein Ghods, Chuanle Zhou, Ian T. Ferguson
Journal: Journal of Vacuum Science & Technology A
J. Vac. Sci. Technol. A 38, 042408 (2020)
https://doi.org/10.1116/6.0000141
Published: June 2020
View article titled, Structural and optical properties of (Zn,Mn)O thin films prepared by atomic layer deposition
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Journal Articles

Tunable light emission from chemical vapor deposited two-dimensional MoSe2 by layer variation and S incorporation

Vineeta Singh, Dattatray J. Late, Shyama Rath
Journal: Journal of Vacuum Science & Technology A
J. Vac. Sci. Technol. A 38, 023402 (2020)
https://doi.org/10.1116/1.5124998
Published: January 2020
View article titled, Tunable light emission from chemical vapor deposited two-dimensional MoSe<sub>2</sub> by layer variation and S incorporation
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Journal Articles

Identification of defect species in ZnO thin films through process modification and monitoring of photoluminescent properties

Housei Akazawa
Journal: Journal of Vacuum Science & Technology A
J. Vac. Sci. Technol. A 37, 061514 (2019)
https://doi.org/10.1116/1.5121439
Published: November 2019
View article titled, Identification of defect species in ZnO thin films through process modification and monitoring of photoluminescent properties
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Journal Articles

Growth of S-doped MoO2 nanosheets with a controlled bandgap by chemical vapor deposition

Long Feng, Hui Yan, Rukang Zhang, Jiwen Liu
Journal: Journal of Vacuum Science & Technology A
J. Vac. Sci. Technol. A 36, 05G507 (2018)
https://doi.org/10.1116/1.5027148
Published: August 2018
View article titled, Growth of S-doped MoO<sub>2</sub> nanosheets with a controlled bandgap by chemical vapor deposition
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Journal Articles

Identification and tuning of zinc-site nitrogen-related complexes in ZnO material

Zhonghua Xu, Kun Tang, Shunming Zhu, Jingrui Ma, Jiandong Ye, Shulin Gu
Journal: Journal of Vacuum Science & Technology A
J. Vac. Sci. Technol. A 36, 021503 (2018)
https://doi.org/10.1116/1.4996617
Published: December 2017
View article titled, Identification and tuning of zinc-site nitrogen-related complexes in ZnO material
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Journal Articles

Catalyst free growth of highly crystalline ZnO nanopillars on c-GaN/sapphire templates by chemical vapor deposition technique

Rajendra K. Saroj, Barun K. Barick, Shubhabrata Dhar
Journal: Journal of Vacuum Science & Technology A
J. Vac. Sci. Technol. A 35, 041501 (2017)
https://doi.org/10.1116/1.4983209
Published: May 2017
View article titled, Catalyst free growth of highly crystalline ZnO nanopillars on c-GaN/sapphire templates by chemical vapor deposition technique
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