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Journal Articles

Arsenic-flux dependence of surface morphology in InAs homoepitaxy

Akihiro Ohtake, Takuya Kawazu, Takaaki Mano
Journal: Journal of Vacuum Science & Technology A
J. Vac. Sci. Technol. A 42, 062702 (2024)
https://doi.org/10.1116/6.0003957
Published: September 2024
View article titled, Arsenic-flux dependence of surface morphology in InAs homoepitaxy
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Journal Articles

Novel 3D reciprocal space visualization of strain relaxation in InSb on GaAs substrates

Editor’s Pick
T. Blaikie, Y. Shi, M. C. Tam, B. D. Moreno, Z. R. Wasilewski
Journal: Journal of Vacuum Science & Technology A
J. Vac. Sci. Technol. A 42, 032704 (2024)
https://doi.org/10.1116/6.0003455
Published: April 2024
View article titled, Novel 3D reciprocal space visualization of strain relaxation in InSb on GaAs substrates
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Journal Articles

Bismuth surfactant enhancement of surface morphology and film quality of MBE-grown GaSb(100) thin films over a wide range of growth temperatures

T. Pan Menasuta, Kevin A. Grossklaus, John H. McElearney, Thomas E. Vandervelde
Journal: Journal of Vacuum Science & Technology A
J. Vac. Sci. Technol. A 42, 032703 (2024)
https://doi.org/10.1116/6.0003458
Published: April 2024
View article titled, Bismuth surfactant enhancement of surface morphology and film quality of MBE-grown GaSb(100) thin films over a wide range of growth temperatures
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Journal Articles

Homoepitaxial growth of CaWO4

Hanlin Tang, Kidae Shin, Shuhang Pan, Hanshi Li, Frederick J. Walker, Charles H. Ahn
Journal: Journal of Vacuum Science & Technology A
J. Vac. Sci. Technol. A 42, 022701 (2024)
https://doi.org/10.1116/6.0003181
Published: January 2024
View article titled, Homoepitaxial growth of CaWO<sub>4</sub>
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Includes: Supplementary data
Journal Articles

Competition between ion beam sputtering and self-organization of point defects for surface nanostructuring on germanium

Naoto Oishi, Tatsuya Yasuoka, Toshiyuki Kawaharamura, Noriko Nitta
Journal: Journal of Vacuum Science & Technology A
J. Vac. Sci. Technol. A 41, 063101 (2023)
https://doi.org/10.1116/6.0002878
Published: September 2023
View article titled, Competition between ion beam sputtering and self-organization of point defects for surface nanostructuring on germanium
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Includes: Supplementary data
Journal Articles

Evolving surface morphology during epitaxy of NiO on Ag(001)

Hanno D. Goldbach, Joachim Wollschläger
Journal: Journal of Vacuum Science & Technology A
J. Vac. Sci. Technol. A 40, 033403 (2022)
https://doi.org/10.1116/6.0001446
Published: March 2022
View article titled, Evolving surface morphology during epitaxy of NiO on Ag(001)
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Journal Articles

Substitutional Co-mediated island-edge decoration in Co/Cu(001): A kinetic Monte Carlo study

Marvin A. Albao
Journal: Journal of Vacuum Science & Technology A
J. Vac. Sci. Technol. A 39, 063201 (2021)
https://doi.org/10.1116/6.0001323
Published: September 2021
View article titled, Substitutional Co-mediated island-edge decoration in Co/Cu(001): A kinetic Monte Carlo study
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Journal Articles

Effect of nonvertical ion bombardment due to edge effects on polymer surface morphology evolution and etching uniformity

Adam Pranda, Chen Li, Youngsik Seo, Gottlieb S. Oehrlein
Journal: Journal of Vacuum Science & Technology A
J. Vac. Sci. Technol. A 39, 043001 (2021)
https://doi.org/10.1116/6.0001015
Published: May 2021
View article titled, Effect of nonvertical ion bombardment due to edge effects on polymer surface morphology evolution and etching uniformity
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Journal Articles

Influence of W content on microstructure and surface morphology of hard Ni-W films fabricated by magnetron co-sputtering

Amir R. Esmaeili, Noshin Mir, Reza Mohammadi
Journal: Journal of Vacuum Science & Technology A
J. Vac. Sci. Technol. A 39, 033405 (2021)
https://doi.org/10.1116/6.0000915
Published: March 2021
View article titled, Influence of W content on microstructure and surface morphology of hard Ni-W films fabricated by magnetron co-sputtering
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Includes: Supplementary data
Journal Articles

Ultrasmooth cobalt films on SiO2 by chemical vapor deposition using a nucleation promoter and a growth inhibitor

Zhejun V. Zhang, Sumeng Liu, Gregory S. Girolami, John R. Abelson
Journal: Journal of Vacuum Science & Technology A
J. Vac. Sci. Technol. A 39, 023414 (2021)
https://doi.org/10.1116/6.0000688
Published: March 2021
View article titled, Ultrasmooth cobalt films on SiO<sub>2</sub> by chemical vapor deposition using a nucleation promoter and a growth inhibitor
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Includes: Supplementary data
Journal Articles

Silver film etching using halogen gas plasma

Toshiyuki Sasaki, Kenichi Yoshikawa, Kazuhito Furumoto, Itsuko Sakai, Hisataka Hayashi, Makoto Sekine, Masaru Hori
Journal: Journal of Vacuum Science & Technology A
J. Vac. Sci. Technol. A 38, 053006 (2020)
https://doi.org/10.1116/6.0000286
Published: August 2020
View article titled, Silver film etching using halogen gas plasma
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Journal Articles

Nonlinear effects in low-energy ion sputtering of solids

Yuriy Kudriavtsev, Rene Asomoza, Angelica Hernandez, Dmitry Yu. Kazantsev, Boris Ya. Ber, Alexander N. Gorokhov
Journal: Journal of Vacuum Science & Technology A
J. Vac. Sci. Technol. A 38, 053203 (2020)
https://doi.org/10.1116/6.0000262
Published: July 2020
View article titled, Nonlinear effects in low-energy ion sputtering of solids
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Journal Articles

Effect of forming gas annealing on hydrogen content and surface morphology of titanium oxide coated crystalline silicon heterocontacts

Yuta Nakagawa, Kazuhiro Gotoh, Markus Wilde, Shohei Ogura, Yasuyoshi Kurokawa, Katsuyuki Fukutani, Noritaka Usami
Journal: Journal of Vacuum Science & Technology A
J. Vac. Sci. Technol. A 38, 022415 (2020)
https://doi.org/10.1116/1.5134719
Published: February 2020
View article titled, Effect of forming gas annealing on hydrogen content and surface morphology of titanium oxide coated crystalline silicon heterocontacts
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Journal Articles

Role of sulfur in catalyzing fluorine atom fast etching of silicon with smooth surface morphology

Priyanka Arora, Tam Nguyen, Aseem Chawla, Sang-Ki Nam, Vincent M. Donnelly
Journal: Journal of Vacuum Science & Technology A
J. Vac. Sci. Technol. A 37, 061303 (2019)
https://doi.org/10.1116/1.5125266
Published: November 2019
View article titled, Role of sulfur in catalyzing fluorine atom fast etching of silicon with smooth surface morphology
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Journal Articles

Atomic layer germanium etching for 3D Fin-FET using chlorine neutral beam

Editor’s Pick
Daisuke Ohori, Takuya Fujii, Shuichi Noda, Wataru Mizubayashi, Kazuhiko Endo, En-Tzu Lee, Yiming Li, Yao-Jen Lee, Takuya Ozaki, Seiji Samukawa
Journal: Journal of Vacuum Science & Technology A
J. Vac. Sci. Technol. A 37, 021003 (2019)
https://doi.org/10.1116/1.5079692
Published: January 2019
View article titled, Atomic layer germanium etching for 3D Fin-FET using chlorine neutral beam
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Journal Articles

Study of plasma induced nanostructure formation and surface morphology changes on tungsten and stainless steel at atmospheric pressure

Yao E. Kovach, Feifei Zhang, Fei Gao, John E. Foster
Journal: Journal of Vacuum Science & Technology A
J. Vac. Sci. Technol. A 37, 011301 (2019)
https://doi.org/10.1116/1.5030887
Published: December 2018
View article titled, Study of plasma induced nanostructure formation and surface morphology changes on tungsten and stainless steel at atmospheric pressure
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Journal Articles

Impact of surface morphology of Si substrate on performance of Si/ZnO heterojunction devices grown by atomic layer deposition technique

Purnima Hazra, Satyendra Kumar Singh, Satyabrata Jit
Journal: Journal of Vacuum Science & Technology A
J. Vac. Sci. Technol. A 33, 01A114 (2015)
https://doi.org/10.1116/1.4900719
Published: October 2014
View article titled, Impact of surface morphology of Si substrate on performance of Si/ZnO heterojunction devices grown by atomic layer deposition technique
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Journal Articles

Investigation of microstructure, surface morphology, and hardness properties of PtIr films by magnetron sputtering

Chao-Te Lee, Bo-Heng Liu, Chun-Ming Chang, Yu-Wei Lin
Journal: Journal of Vacuum Science & Technology A
J. Vac. Sci. Technol. A 28, 1089–1091 (2010)
https://doi.org/10.1116/1.3457490
Published: September 2010
View article titled, Investigation of microstructure, surface morphology, and hardness properties of PtIr films by magnetron sputtering
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Journal Articles

Surface morphology of Kr + -polished amorphous Si layers

A. J. R. van den Boogaard, E. Louis, E. Zoethout, S. Müllender, F. Bijkerk
Journal: Journal of Vacuum Science & Technology A
J. Vac. Sci. Technol. A 28, 552–558 (2010)
https://doi.org/10.1116/1.3428545
Published: June 2010
View article titled, Surface morphology of Kr + -polished amorphous Si layers
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Journal Articles

Effect of anion-to-cation supplying ratio on the surface morphology of AlN films grown on ZnO substrates at low temperature

Inho Im, Mina Jung, Jieun Koo, Hyunjae Lee, Jinsub Park, Tsutomu Minegishi, Seunghwan Park, Katsushi Fujii, Takafumi Yao, Gyungsuk Kil, Takashi Hanada, Jiho Chang
Journal: Journal of Vacuum Science & Technology A
J. Vac. Sci. Technol. A 28, 61–64 (2010)
https://doi.org/10.1116/1.3264479
Published: November 2009
View article titled, Effect of anion-to-cation supplying ratio on the surface morphology of AlN films grown on ZnO substrates at low temperature
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