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Journal Articles

Structure and tribological evolution of Ta-N layer by controlling the time of microwave plasma nitriding

Jiacheng Li, Zhigang Xu, Jian Peng, Qiang Shen, Chuanbin Wang
Journal: Journal of Vacuum Science & Technology A
J. Vac. Sci. Technol. A 43, 023103 (2025)
https://doi.org/10.1116/6.0004327
Published: February 2025
View article titled, Structure and tribological evolution of Ta-N layer by controlling the time of microwave plasma nitriding
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Journal Articles

Secondary ion mass spectrometry relative sensitivity factor of 69Ga in ZnS

Hayat Soufiani, Mikhail Klimov, Romain Gaume
Journal: Journal of Vacuum Science & Technology A
J. Vac. Sci. Technol. A 43, 023201 (2025)
https://doi.org/10.1116/6.0004165
Published: January 2025
View article titled, Secondary ion mass spectrometry relative sensitivity factor of <sup>69</sup>Ga in ZnS
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Journal Articles

Effect of plasma nitriding on microstructure and wear behavior of electrodeposited FeCoNiCr coating

Meiling Dong, Mingxin He, Chaohui Wang, Xiufang Cui, Guo Jin, Pengwei Liu
Journal: Journal of Vacuum Science & Technology A
J. Vac. Sci. Technol. A 42, 063104 (2024)
https://doi.org/10.1116/6.0003925
Published: October 2024
View article titled, Effect of plasma nitriding on microstructure and wear behavior of electrodeposited FeCoNiCr coating
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Journal Articles

Microstructure, mechanical, and tribological properties of transition metal (Nb, V, W) nitride coating on AISI-1045 steel by cathodic cage plasma deposition

E. A. M. Filho, M. Naeem, J. C. Díaz-Guillén, E. M. Sousa, T. H. C. Costa, Javed Iqbal, R. R. M. Sousa
Journal: Journal of Vacuum Science & Technology A
J. Vac. Sci. Technol. A 42, 053105 (2024)
https://doi.org/10.1116/6.0003773
Published: July 2024
View article titled, Microstructure, mechanical, and tribological properties of transition metal (Nb, V, W) nitride coating on AISI-1045 steel by cathodic cage plasma deposition
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Journal Articles

Microstructure and mechanical properties of Cr films with different orientations before and after plasma nitriding

Jianting Zhang, Dejun Li, Yuanyuan Guo, Deli Shang, Shuqi Liu, Lei Kang, Lin Zhang, Yongjie Yang, Xinggang Wang, Ning Xin
Journal: Journal of Vacuum Science & Technology A
J. Vac. Sci. Technol. A 42, 033104 (2024)
https://doi.org/10.1116/6.0003492
Published: April 2024
View article titled, Microstructure and mechanical properties of Cr films with different orientations before and after plasma nitriding
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Journal Articles

Novel high-efficiency plasma nitriding process utilizing a high power impulse magnetron sputtering discharge

A. P. Ehiasarian, P. Eh. Hovsepian
Journal: Journal of Vacuum Science & Technology A
J. Vac. Sci. Technol. A 42, 023109 (2024)
https://doi.org/10.1116/6.0003277
Published: February 2024
View article titled, Novel high-efficiency plasma nitriding process utilizing a high power impulse magnetron sputtering discharge
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Journal Articles

Impact of the DC intensity and electrode distance on pulsed-DC powder-pack boride layer growth kinetics

I. Campos-Silva, L. E. Castillo-Vela, I. Mejía-Caballero, J. L. Rosales-Lopez, M. Olivares-Luna, K. D. Chaparro-Pérez, F. P. Espino-Cortes, J. M. González-Carmona
Journal: Journal of Vacuum Science & Technology A
J. Vac. Sci. Technol. A 41, 063115 (2023)
https://doi.org/10.1116/6.0003167
Published: November 2023
View article titled, Impact of the DC intensity and electrode distance on pulsed-DC powder-pack boride layer growth kinetics
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Journal Articles

Effect of plasma nitriding substrate current density on the adhesion strength of in situ PVD TiN coatings

Xin Zhang, Xiu-bo Tian, Chun-zhi Gong, Xiang-li Liu, Jin Li
Journal: Journal of Vacuum Science & Technology A
J. Vac. Sci. Technol. A 41, 033405 (2023)
https://doi.org/10.1116/6.0002353
Published: April 2023
View article titled, Effect of plasma nitriding substrate current density on the adhesion strength of <em>in situ</em> PVD TiN coatings
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Journal Articles

Influence of γ'N and ɛ'N phases on the properties of AISI 304L after low-temperature plasma nitrocarburizing

Jeet Vijay Sah, Pravin Kumari Dwivedi, Subroto Mukherjee, Ghanshyam Jhala, Alphonsa Joseph
Journal: Journal of Vacuum Science & Technology A
J. Vac. Sci. Technol. A 41, 033101 (2023)
https://doi.org/10.1116/6.0002346
Published: March 2023
View article titled, Influence of γ'<sub>N</sub> and ɛ'<sub>N</sub> phases on the properties of AISI 304L after low-temperature plasma nitrocarburizing
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Journal Articles

In-Cu alloy substrates for low-temperature chemical vapor deposition of Mo2C

Katherine T. Young, Colter Smith, Dale A. Hitchcock, Eric M. Vogel
Journal: Journal of Vacuum Science & Technology A
J. Vac. Sci. Technol. A 39, 012201 (2021)
https://doi.org/10.1116/6.0000735
Published: December 2020
View article titled, In-Cu alloy substrates for low-temperature chemical vapor deposition of Mo<sub>2</sub>C
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Includes: Supplementary data
Journal Articles

Cathodic cage plasma deposition of TiN and TiO2 thin films on silicon substrates

Romulo R. M. de Sousa, Patricia S. Sato, Bartolomeu C. Viana, Clodomiro Alves, Jr., Akio Nishimoto, Pedro A. P. Nascente
Journal: Journal of Vacuum Science & Technology A
J. Vac. Sci. Technol. A 33, 041502 (2015)
https://doi.org/10.1116/1.4919770
Published: May 2015
View article titled, Cathodic cage plasma deposition of TiN and TiO<sub>2</sub> thin films on silicon substrates
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Journal Articles

Nitrogen mass transfer models for plasma-based low-energy ion implantation

Bocong Zheng, Kesheng Wang, Zhipeng Zhang, Honglong Che, Mingkai Lei
Journal: Journal of Vacuum Science & Technology A
J. Vac. Sci. Technol. A 33, 021311 (2015)
https://doi.org/10.1116/1.4907713
Published: February 2015
View article titled, Nitrogen mass transfer models for plasma-based low-energy ion implantation
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Journal Articles

Microstructure evolution of Ti 3 SiC 2 compound cathodes during reactive cathodic arc evaporation

J. Q. Zhu, A. O. Eriksson, N. Ghafoor, M. P. Johansson, G. Greczynski, L. Hultman, J. Rosén, M. Odén
Journal: Journal of Vacuum Science & Technology A
J. Vac. Sci. Technol. A 29, 031601 (2011)
https://doi.org/10.1116/1.3569052
Published: March 2011
View article titled, Microstructure evolution of Ti 3 SiC 2 compound cathodes during reactive cathodic arc evaporation
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Journal Articles

Characterization of worn Ti–Si cathodes used for reactive cathodic arc evaporation

J. Q. Zhu, A. Eriksson, N. Ghafoor, M. P. Johansson, J. Sjölén, L. Hultman, J. Rosén, M. Odén
Journal: Journal of Vacuum Science & Technology A
J. Vac. Sci. Technol. A 28, 347–353 (2010)
https://doi.org/10.1116/1.3330767
Published: March 2010
View article titled, Characterization of worn Ti–Si cathodes used for reactive cathodic arc evaporation
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Journal Articles

Gate oxide process control optimization by x-ray photoelectron spectroscopy in a semiconductor fabrication line

A. Le Gouil, N. Cabuil, P. Dupeyrat, B. Dickson, M. Kwan, D. Barge, E. Gurer, O. Doclot, J.-C. Royer
Journal: Journal of Vacuum Science & Technology A
J. Vac. Sci. Technol. A 26, 805–811 (2008)
https://doi.org/10.1116/1.2902966
Published: July 2008
View article titled, Gate oxide process control optimization by x-ray photoelectron spectroscopy in a semiconductor fabrication line
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Journal Articles

Influence of the microstructure on steel hardening in pulsed plasma nitriding

E. A. Ochoa, C. A. Figueroa
Journal: Journal of Vacuum Science & Technology A
J. Vac. Sci. Technol. A 26, 328–332 (2008)
https://doi.org/10.1116/1.2889395
Published: March 2008
View article titled, Influence of the microstructure on steel hardening in pulsed plasma nitriding
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Journal Articles

Nitriding of AISI 4140 steel by a low energy broad ion source

E. A. Ochoa, C. A. Figueroa, F. Alvarez
Journal: Journal of Vacuum Science & Technology A
J. Vac. Sci. Technol. A 24, 2113–2116 (2006)
https://doi.org/10.1116/1.2356480
Published: October 2006
View article titled, Nitriding of AISI 4140 steel by a low energy broad ion source
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Journal Articles

Nitriding of a tool steel with an electron-beam-excited plasma

H. Shoyama, T. Hishida, T. Hara, Y. Dake, T. Mori, H. Nagai, M. Hori, T. Goto
Journal: Journal of Vacuum Science & Technology A
J. Vac. Sci. Technol. A 24, 1999–2002 (2006)
https://doi.org/10.1116/1.2338563
Published: October 2006
View article titled, Nitriding of a tool steel with an electron-beam-excited plasma
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Journal Articles

Previous heat treatment inducing different plasma nitriding behaviors in martensitic stainless steels

C. A. Figueroa, F. Alvarez, D. R. G. Mitchell, G. A. Collins, K. T. Short
Journal: Journal of Vacuum Science & Technology A
J. Vac. Sci. Technol. A 24, 1795–1801 (2006)
https://doi.org/10.1116/1.2219759
Published: August 2006
View article titled, Previous heat treatment inducing different plasma nitriding behaviors in martensitic stainless steels
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Journal Articles

In vacuo substrate pretreatments for enhancing nanodiamond formation in electron cyclotron resonance plasma

Kungen Teii, Yutaka Kouzuma, Kiichiro Uchino
Journal: Journal of Vacuum Science & Technology A
J. Vac. Sci. Technol. A 24, 1802–1806 (2006)
https://doi.org/10.1116/1.2221322
Published: August 2006
View article titled, <em>In vacuo</em> substrate pretreatments for enhancing nanodiamond formation in electron cyclotron resonance plasma
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