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Journal Articles

Oxidation properties of quaternary Zr-based diboride thin films grown by hybrid high-power impulse/DC magnetron co-sputtering

Babak Bakhit
Journal: Journal of Vacuum Science & Technology A
J. Vac. Sci. Technol. A 42, 010401 (2024)
https://doi.org/10.1116/6.0003197
Published: December 2023
View article titled, Oxidation properties of quaternary Zr-based diboride thin films grown by hybrid high-power impulse/DC magnetron co-sputtering
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Journal Articles

Core-shell metallic nanotube arrays for highly sensitive surface-enhanced Raman scattering (SERS) detection

Jinn P. Chu, Yi-Jui Yeh, Chih-Yu Liu, Yi-Xiang Yang, Alfreda Krisna Altama, Ting-Hao Chang, Wei-Hung Chiang, Pakman Yiu, Kuo-Lun Tung
Journal: Journal of Vacuum Science & Technology A
J. Vac. Sci. Technol. A 41, 063111 (2023)
https://doi.org/10.1116/6.0003055
Published: October 2023
View article titled, Core-shell metallic nanotube arrays for highly sensitive surface-enhanced Raman scattering (SERS) detection
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Journal Articles

Phase composition of polycrystalline HfNx (0.45 ≤ x ≤ 1.60) and effects of low-energy ion irradiation on microstructure, texture, and physical properties

Hwan-Seok Seo, Taeyoon Lee, Hyungjun Kim, Ivan Petrov, J. E. Greene
Journal: Journal of Vacuum Science & Technology A
J. Vac. Sci. Technol. A 41, 063406 (2023)
https://doi.org/10.1116/6.0003072
Published: October 2023
View article titled, Phase composition of polycrystalline HfN<sub>x</sub> (0.45 ≤ x ≤ 1.60) and effects of low-energy ion irradiation on microstructure, texture, and physical properties
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Journal Articles

CuFeO2 prepared by electron cyclotron wave resonance-assisted reactive HiPIMS with two magnetrons and radio frequency magnetron sputtering

A. Písaříková, J. Olejníček, I. Venkrbcová, L. Nožka, S. Cichoň, A. Azinfar, R. Hippler, C. A. Helm, M. Mašláň, L. Machala, Z. Hubička
Journal: Journal of Vacuum Science & Technology A
J. Vac. Sci. Technol. A 41, 063005 (2023)
https://doi.org/10.1116/6.0002902
Published: October 2023
View article titled, CuFeO<sub>2</sub> prepared by electron cyclotron wave resonance-assisted reactive HiPIMS with two magnetrons and radio frequency magnetron sputtering
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Includes: Supplementary data
Journal Articles

Attempt of TiZrVCrAl coating on aerospace bearings—Lower friction coefficient in oil–liquid mixed media

Jiahe Wang, Qunfeng Zeng, Wanjun He, Zhao Wang, Zekun Ning, Chenjie Zheng, Zeming Pang, Xunkai Wei
Journal: Journal of Vacuum Science & Technology A
J. Vac. Sci. Technol. A 41, 053108 (2023)
https://doi.org/10.1116/6.0002843
Published: August 2023
View article titled, Attempt of TiZrVCrAl coating on aerospace bearings—Lower friction coefficient in oil–liquid mixed media
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Journal Articles

Effect of local pressure difference caused by argon flow on properties of DLC films on rubber

Haoran Zeng, Jiaqi Liu, Tao Yang, Qiaoyuan Deng, Feng Wen
Journal: Journal of Vacuum Science & Technology A
J. Vac. Sci. Technol. A 41, 053410 (2023)
https://doi.org/10.1116/6.0002806
Published: July 2023
View article titled, Effect of local pressure difference caused by argon flow on properties of DLC films on rubber
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Includes: Supplementary data
Journal Articles

Reactive plasma sputtering deposition of polycrystalline GaN thin films on silicon substrates at room temperature

Lakshman Srinivasan, Cyril Jadaud, François Silva, Jean-Charles Vanel, Jean-Luc Maurice, Erik Johnson, Pere Roca i Cabarrocas, Karim Ouaras
Journal: Journal of Vacuum Science & Technology A
J. Vac. Sci. Technol. A 41, 053407 (2023)
https://doi.org/10.1116/6.0002718
Published: July 2023
View article titled, Reactive plasma sputtering deposition of polycrystalline GaN thin films on silicon substrates at room temperature
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Journal Articles

(AlCrNiTiZr)Nx high-entropy nitride coatings with enhanced hardness via tailoring N2 flow rates for anti-wear applications

Jia Zheng, Cunxiu Zhang, Jingchuan Li, Junyi Chen, Yifan Dong, Sam Zhang, Jian Zhang, Deen Sun
Journal: Journal of Vacuum Science & Technology A
J. Vac. Sci. Technol. A 41, 053404 (2023)
https://doi.org/10.1116/6.0002837
Published: July 2023
View article titled, (AlCrNiTiZr)N<sub>x</sub> high-entropy nitride coatings with enhanced hardness via tailoring N<sub>2</sub> flow rates for anti-wear applications
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Journal Articles

Properties of Schottky barrier diodes on heteroeptixial α-Ga2O3 thin films

S. Köpp, C. Petersen, D. Splith, M. Grundmann, H. von Wenckstern
Journal: Journal of Vacuum Science & Technology A
J. Vac. Sci. Technol. A 41, 043411 (2023)
https://doi.org/10.1116/6.0002651
Published: June 2023
View article titled, Properties of Schottky barrier diodes on heteroeptixial <em>α</em>-<em>Ga</em><sub>2</sub>O<sub>3</sub> thin films
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Includes: Supplementary data
Journal Articles

Determination of stress in thin films using micro-machined buckled membranes

C. Malhaire, M. Granata, D. Hofman, A. Amato, V. Martinez, G. Cagnoli, A. Lemaitre, N. Shcheblanov
Journal: Journal of Vacuum Science & Technology A
J. Vac. Sci. Technol. A 41, 043401 (2023)
https://doi.org/10.1116/6.0002590
Published: May 2023
View article titled, Determination of stress in thin films using micro-machined buckled membranes
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Journal Articles

Influence of boron contents on mechanical properties and high-temperature tribological behavior in (AlCrNbTiB)N coatings

Tzu-Ling Chen, Sheng-Yu Hsu, Yuan-Tai Lai, Shou-Yi Chang, Hsueh-Hsing Hung, Su-Yueh Tsai, Jenq-Gong Duh
Journal: Journal of Vacuum Science & Technology A
J. Vac. Sci. Technol. A 41, 043101 (2023)
https://doi.org/10.1116/6.0002538
Published: May 2023
View article titled, Influence of boron contents on mechanical properties and high-temperature tribological behavior in (AlCrNbTiB)N coatings
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Includes: Supplementary data
Journal Articles

Effect of vacuum heat treatment on tribological properties of metal-doped CuS/MoS2 coating

Ming Cao, Lan Zhao
Journal: Journal of Vacuum Science & Technology A
J. Vac. Sci. Technol. A 41, 033102 (2023)
https://doi.org/10.1116/6.0002360
Published: March 2023
View article titled, Effect of vacuum heat treatment on tribological properties of metal-doped CuS/MoS<sub>2</sub> coating
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Journal Articles

Structure evolution and mechanical properties of Al-alloyed tantalum diboride films prepared by magnetron sputtering co-deposition

Viktor Šroba, Tomáš Fiantok, Martin Truchlý, Tomáš Roch, Branislav Grančič, Katarína Viskupová, Leonid Satrapinskyy, Peter Švec, Jr., Štefan Nagy, Vitalii Izai, Peter Kúš, Marián Mikula
Journal: Journal of Vacuum Science & Technology A
J. Vac. Sci. Technol. A 41, 023410 (2023)
https://doi.org/10.1116/6.0002390
Published: March 2023
View article titled, Structure evolution and mechanical properties of Al-alloyed tantalum diboride films prepared by magnetron sputtering co-deposition
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Journal Articles

Radio-frequency magnetron sputter deposition of ultrathick boron carbide films

L. B. Bayu Aji, S. J. Shin, J. H. Bae, A. M. Engwall, J. A. Hammons, S. T. Sen-Britain, P. B. Mirkarimi, S. O. Kucheyev
Journal: Journal of Vacuum Science & Technology A
J. Vac. Sci. Technol. A 41, 023407 (2023)
https://doi.org/10.1116/6.0002211
Published: February 2023
View article titled, Radio-frequency magnetron sputter deposition of ultrathick boron carbide films
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Includes: Supplementary data
Journal Articles

Determining role of W+ ions in the densification of TiAlWN thin films grown by hybrid HiPIMS/DCMS technique with no external heating

Xiao Li, Ivan Petrov, Lars Hultman, Grzegorz Greczynski
Journal: Journal of Vacuum Science & Technology A
J. Vac. Sci. Technol. A 41, 013407 (2023)
https://doi.org/10.1116/6.0002320
Published: December 2022
View article titled, Determining role of W<sup>+</sup> ions in the densification of TiAlWN thin films grown by hybrid HiPIMS/DCMS technique with no external heating
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Journal Articles

Investigation of the magnetron balancing effect on the ionized flux fraction and deposition rate of sputtered titanium species for the high-power impulse magnetron sputtering pulses of different lengths

Anna Kapran, Vinicius G. Antunes, Zdeněk Hubička, Charles Ballage, Tiberiu Minea
Journal: Journal of Vacuum Science & Technology A
J. Vac. Sci. Technol. A 41, 013003 (2023)
https://doi.org/10.1116/6.0002309
Published: December 2022
View article titled, Investigation of the magnetron balancing effect on the ionized flux fraction and deposition rate of sputtered titanium species for the high-power impulse magnetron sputtering pulses of different lengths
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Journal Articles

Target ion and neutral spread in high power impulse magnetron sputtering

H. Hajihoseini, N. Brenning, M. Rudolph, M. A. Raadu, D. Lundin, J. Fischer, T. M. Minea, J. T. Gudmundsson
Journal: Journal of Vacuum Science & Technology A
J. Vac. Sci. Technol. A 41, 013002 (2023)
https://doi.org/10.1116/6.0002292
Published: December 2022
View article titled, Target ion and neutral spread in high power impulse magnetron sputtering
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Journal Articles

Zn dots coherently grown as the seed and buffer layers on Si(111) for ZnO thin film: Mechanism, in situ analysis, and simulation

Wei-Ting Chen, Pei-Cheng Fang, Yen-Wei Chen, Shang-Jui Chiu, Ching-Shun Ku, Sanjaya Brahma, Kuang-Yao Lo
Journal: Journal of Vacuum Science & Technology A
J. Vac. Sci. Technol. A 40, 063403 (2022)
https://doi.org/10.1116/5.0106583
Published: October 2022
View article titled, Zn dots coherently grown as the seed and buffer layers on Si(111) for ZnO thin film: Mechanism, <em>in situ</em> analysis, and simulation
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Includes: Supplementary data
Journal Articles

Atomically precise deposition of (Er0.1Y0.9)2SiO5 combined with digitally processed DC sputtering and non-radical oxidation

Ghent Nakamura, Hideo Isshiki
Journal: Journal of Vacuum Science & Technology A
J. Vac. Sci. Technol. A 40, 053406 (2022)
https://doi.org/10.1116/6.0001917
Published: September 2022
View article titled, Atomically precise deposition of (Er<sub>0.1</sub>Y<sub>0.9</sub>)<sub>2</sub>SiO<sub>5</sub> combined with digitally processed DC sputtering and non-radical oxidation
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Includes: Supplementary data
Journal Articles

Dependence of film structure on the film structure-independent equivalent film thickness in magnetron sputtering deposition of Ag thin films

Eiji Kusano
Journal: Journal of Vacuum Science & Technology A
J. Vac. Sci. Technol. A 40, 053405 (2022)
https://doi.org/10.1116/6.0001989
Published: September 2022
View article titled, Dependence of film structure on the film structure-independent equivalent film thickness in magnetron sputtering deposition of Ag thin films
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