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Journal Articles
J. Vac. Sci. Technol. A 42, 023113 (2024)
Published: February 2024
Includes: Supplementary data
Journal Articles
J. Vac. Sci. Technol. A 42, 023111 (2024)
Published: February 2024
Journal Articles
Hanjörg Wagner, Valentin Ripka, Andrea Dellith, Jan Dellith, Florian Wittkämper, Uwe Hübner, Mario Ziegler
J. Vac. Sci. Technol. A 41, 053209 (2023)
Published: August 2023
Includes: Supplementary data
Journal Articles
J. Vac. Sci. Technol. A 41, 053410 (2023)
Published: July 2023
Includes: Supplementary data
Journal Articles
Lauri Kilpi, Oili M. E. Ylivaara, Antti Vaajoki, Jari Malm, Sakari Sintonen, Marko Tuominen, Riikka L. Puurunen, Helena Ronkainen
J. Vac. Sci. Technol. A 34, 01A124 (2016)
Published: November 2015
Journal Articles
J. Vac. Sci. Technol. A 32, 01A131 (2014)
Published: December 2013
Journal Articles
J. Vac. Sci. Technol. A 32, 01A102 (2014)
Published: October 2013
Journal Articles
J. Vac. Sci. Technol. A 28, 431–437 (2010)
Published: March 2010
Journal Articles
J. Vac. Sci. Technol. A 25, 1003–1012 (2007)
Published: July 2007
Journal Articles
J. Vac. Sci. Technol. A 23, 862–868 (2005)
Published: June 2005
Journal Articles
J. Vac. Sci. Technol. A 14, 727–732 (1996)
Published: May 1996
Journal Articles
J. Vac. Sci. Technol. A 12, 1487–1490 (1994)
Published: July 1994
Journal Articles
J. Vac. Sci. Technol. A 5, 2706–2708 (1987)
Published: July 1987
Journal Articles
J. Vac. Sci. Technol. A 4, 2618–2623 (1986)
Published: November 1986
Journal Articles
J. Vac. Sci. Technol. A 4, 2797–2800 (1986)
Published: November 1986
Journal Articles
J. Vac. Sci. Technol. A 4, 3019–3022 (1986)
Published: November 1986
Journal Articles
J. Vac. Sci. Technol. A 4, 3007–3014 (1986)
Published: November 1986