Skip Nav Destination
Update search
Filter
All
- All
- Title
- Author
- Author Affiliations
- Full Text
- Abstract
- Keyword
- DOI
- ISBN
- EISBN
- ISSN
- EISSN
- Issue
- Volume
- References
Filter
All
- All
- Title
- Author
- Author Affiliations
- Full Text
- Abstract
- Keyword
- DOI
- ISBN
- EISBN
- ISSN
- EISSN
- Issue
- Volume
- References
Filter
All
- All
- Title
- Author
- Author Affiliations
- Full Text
- Abstract
- Keyword
- DOI
- ISBN
- EISBN
- ISSN
- EISSN
- Issue
- Volume
- References
Filter
All
- All
- Title
- Author
- Author Affiliations
- Full Text
- Abstract
- Keyword
- DOI
- ISBN
- EISBN
- ISSN
- EISSN
- Issue
- Volume
- References
Filter
All
- All
- Title
- Author
- Author Affiliations
- Full Text
- Abstract
- Keyword
- DOI
- ISBN
- EISBN
- ISSN
- EISSN
- Issue
- Volume
- References
Filter
All
- All
- Title
- Author
- Author Affiliations
- Full Text
- Abstract
- Keyword
- DOI
- ISBN
- EISBN
- ISSN
- EISSN
- Issue
- Volume
- References
NARROW
Format
Collections
Topics
Subjects
Journal
Article Type
Issue Section
Date
Availability
Journal Articles
J. Vac. Sci. Technol. A 43, 013404 (2025)
Published: December 2024
Journal Articles
J. Vac. Sci. Technol. A 43, 013401 (2025)
Published: December 2024
Journal Articles
Sunil Kumar Tiwari, Akula Umamaheswara Rao, Archana Singh Kharb, Piyush Chandra Verma, Paritosh Dubey, Vipin Chawla, Neha Sardana, Sanjeev Kumar, Devesh Kumar Avasthi, Amit Kumar Chawla
J. Vac. Sci. Technol. A 42, 053408 (2024)
Published: August 2024
Journal Articles
I. Campos-Silva, J. Cedeño-Velázquez, A. D. Contla-Pacheco, I. Arzate-Vázquez, L. E. Castillo-Vela, M. Olivares-Luna, J. L. Rosales-Lopez, F. P. Espino-Cortes
J. Vac. Sci. Technol. A 42, 053101 (2024)
Published: July 2024
Journal Articles
J. Vac. Sci. Technol. A 42, 043403 (2024)
Published: May 2024
Journal Articles
J. Vac. Sci. Technol. A 42, 033407 (2024)
Published: April 2024
Journal Articles
J. Vac. Sci. Technol. A 42, 023417 (2024)
Published: February 2024
Journal Articles
Akula Umamaheswara Rao, Sunil Kumar Tiwari, Archana Singh Kharb, Neha Sardana, Vipin Chawla, Sanjeev Kumar, Vikas Saxena, Amit Kumar Chawla
J. Vac. Sci. Technol. A 42, 023408 (2024)
Published: January 2024
Journal Articles
J. Vac. Sci. Technol. A 42, 013103 (2024)
Published: December 2023
Journal Articles
Xunwang Shi, Sam Zhang, Jingchuan Li, Yuhang You, Xiuhan Yu, Deen Sun, Yong Shao, Hongji Du, Dawen Wang, Minghua Zhao, Moshu Zhu, Fengji Li
J. Vac. Sci. Technol. A 42, 013102 (2024)
Published: December 2023
Journal Articles
J. Vac. Sci. Technol. A 42, 013404 (2024)
Published: December 2023
Journal Articles
J. Vac. Sci. Technol. A 41, 063412 (2023)
Published: November 2023
Includes: Supplementary data
Journal Articles
J. Vac. Sci. Technol. A 41, 063210 (2023)
Published: November 2023
Journal Articles
Sunil Kumar Tiwari, Akula Umamaheswara Rao, Archana Singh Kharb, Vipin Chawla, Neha Sardana, Devesh Kumar Avasthi, Amit Kumar Chawla
J. Vac. Sci. Technol. A 41, 063407 (2023)
Published: October 2023
Journal Articles
Brahim Ahammou, Paramita Bhattacharyya, Christophe Levallois, Fahmida Azmi, Jean-Pierre Landesman, Peter Mascher
J. Vac. Sci. Technol. A 41, 053113 (2023)
Published: August 2023
Journal Articles
Lena Patterer, Sabrina Kollmann, Teresa de los Arcos, Leonie Jende, Soheil Karimi Aghda, Damian M. Holzapfel, Sameer A. Salman, Stanislav Mráz, Guido Grundmeier, Jochen M. Schneider
J. Vac. Sci. Technol. A 41, 053112 (2023)
Published: August 2023
Includes: Supplementary data
Journal Articles
J. Vac. Sci. Technol. A 41, 053106 (2023)
Published: July 2023
Journal Articles
J. Vac. Sci. Technol. A 41, 033405 (2023)
Published: April 2023
Journal Articles
Johan Nyman, Grzegorz Greczynski, Muhammad Junaid, Niklas Sarius, Sören Kahl, Jens Birch, Hans Högberg
J. Vac. Sci. Technol. A 41, 023105 (2023)
Published: February 2023
Journal Articles
J. Vac. Sci. Technol. A 41, 013407 (2023)
Published: December 2022
1