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Journal Articles
J. Vac. Sci. Technol. A 42, 052801 (2024)
Published: July 2024
Journal Articles
J. Vac. Sci. Technol. A 42, 043204 (2024)
Published: July 2024
Journal Articles
J. Vac. Sci. Technol. A 42, 032803 (2024)
Published: April 2024
Journal Articles
J. Vac. Sci. Technol. A 42, 033207 (2024)
Published: April 2024
Includes: Supplementary data
Journal Articles
George H. Major, B. Maxwell Clark, Kevin Cayabyab, Nathan Engel, Christopher D. Easton, Jan Čechal, Donald R. Baer, Jeff Terry, Matthew R. Linford
J. Vac. Sci. Technol. A 41, 043201 (2023)
Published: May 2023
Journal Articles
J. Vac. Sci. Technol. A 40, 053203 (2022)
Published: August 2022
Journal Articles
J. Vac. Sci. Technol. A 39, 063218 (2021)
Published: October 2021
Includes: Supplementary data
Journal Articles
J. Vac. Sci. Technol. A 38, 043206 (2020)
Published: June 2020
Includes: Supplementary data
Journal Articles
J. Vac. Sci. Technol. A 37, 051101 (2019)
Published: August 2019
Journal Articles
J. Vac. Sci. Technol. A 34, 041516 (2016)
Published: June 2016
Includes: Supplementary data
Journal Articles
J. Vac. Sci. Technol. A 31, 01A113 (2013)
Published: October 2012
Journal Articles
J. Vac. Sci. Technol. A 30, 040601 (2012)
Published: May 2012
Journal Articles
J. Vac. Sci. Technol. A 25, 878–885 (2007)
Published: July 2007
Journal Articles
J. Vac. Sci. Technol. A 25, 769–774 (2007)
Published: June 2007
Journal Articles
J. Vac. Sci. Technol. A 24, 953–956 (2006)
Published: May 2006
Journal Articles
J. Vac. Sci. Technol. A 22, 2256–2260 (2004)
Published: October 2004
Journal Articles
J. Vac. Sci. Technol. A 21, 1009–1016 (2003)
Published: June 2003
Journal Articles
J. Vac. Sci. Technol. A 21, 127–133 (2003)
Published: December 2002
Journal Articles
A. L. Martin, C. M. Spalding, V. I. Dimitrova, P. G. Van Patten, M. L. Caldwell, M. E. Kordesch, H. H. Richardson
J. Vac. Sci. Technol. A 19, 1894–1897 (2001)
Published: July 2001
Journal Articles
J. Vac. Sci. Technol. A 11, 3135–3137 (1993)
Published: November 1993
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