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Journal Articles

Electron-enhanced high power impulse magnetron sputtering with a multilevel high power supply: Application to Ar/Cr plasma discharge

J. Zgheib, L. Berthelot, J. Tranchant, N. Ginot, M.-P. Besland, A. Caillard, T. Minea, A. Rhallabi, P.-Y. Jouan
Journal: Journal of Vacuum Science & Technology A
J. Vac. Sci. Technol. A 41, 063003 (2023)
https://doi.org/10.1116/6.0002857
Published: September 2023
View article titled, Electron-enhanced high power impulse magnetron sputtering with a multilevel high power supply: Application to Ar/Cr plasma discharge
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Journal Articles

Growth and optical properties of NiO thin films deposited by pulsed dc reactive magnetron sputtering

Faezeh A. F. Lahiji, Samiran Bairagi, Roger Magnusson, Mauricio A. Sortica, Daniel Primetzhofer, Erik Ekström, Biplab Paul, Arnaud le Febvrier, Per Eklund
Journal: Journal of Vacuum Science & Technology A
J. Vac. Sci. Technol. A 41, 063402 (2023)
https://doi.org/10.1116/6.0002914
Published: September 2023
View article titled, Growth and optical properties of NiO thin films deposited by pulsed dc reactive magnetron sputtering
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Includes: Supplementary data
Journal Articles

Low temperature epitaxial growth of Cantor-nitride thin films by magnetic field assisted magnetron sputtering

Smita G. Rao, Pascal Manuel Illgner, Robert Boyd, Gyula Nagy, Philippe Djemia, Daniel Primetzhofer, Ivan Petrov, Arnaud le Febvrier, Per Eklund
Journal: Journal of Vacuum Science & Technology A
J. Vac. Sci. Technol. A 41, 053415 (2023)
https://doi.org/10.1116/6.0002947
Published: August 2023
View article titled, Low temperature epitaxial growth of Cantor-nitride thin films by magnetic field assisted magnetron sputtering
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Includes: Supplementary data
Journal Articles

Low temperature preparation of YSZ-based thin-film limiting current type oxygen sensor

Yuping Jiang, Jingsong Zhang, Dawei Yan, Wei Tang, Jin Wang, Linhong Cao, Yajun Fu, Lin Shu
Journal: Journal of Vacuum Science & Technology A
J. Vac. Sci. Technol. A 41, 053413 (2023)
https://doi.org/10.1116/6.0002907
Published: August 2023
View article titled, Low temperature preparation of YSZ-based thin-film limiting current type oxygen sensor
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Journal Articles

Large-area deposition of protective (Ti,Al)N coatings onto polycarbonate

Lena Patterer, Sabrina Kollmann, Teresa de los Arcos, Leonie Jende, Soheil Karimi Aghda, Damian M. Holzapfel, Sameer A. Salman, Stanislav Mráz, Guido Grundmeier, Jochen M. Schneider
Journal: Journal of Vacuum Science & Technology A
J. Vac. Sci. Technol. A 41, 053112 (2023)
https://doi.org/10.1116/6.0002921
Published: August 2023
View article titled, Large-area deposition of protective (Ti,Al)N coatings onto polycarbonate
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Includes: Supplementary data
Journal Articles

Attempt of TiZrVCrAl coating on aerospace bearings—Lower friction coefficient in oil–liquid mixed media

Jiahe Wang, Qunfeng Zeng, Wanjun He, Zhao Wang, Zekun Ning, Chenjie Zheng, Zeming Pang, Xunkai Wei
Journal: Journal of Vacuum Science & Technology A
J. Vac. Sci. Technol. A 41, 053108 (2023)
https://doi.org/10.1116/6.0002843
Published: August 2023
View article titled, Attempt of TiZrVCrAl coating on aerospace bearings—Lower friction coefficient in oil–liquid mixed media
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Journal Articles

Characterizing the composition, structure, and mechanical properties of magnetron sputtering physical vapor deposition TiN and TiSiN coatings

Gilad Zorn, Joshua Salisbury, Jae-Hyuk Her, Rachel Rose, Patrick Shower
Journal: Journal of Vacuum Science & Technology A
J. Vac. Sci. Technol. A 41, 053106 (2023)
https://doi.org/10.1116/6.0002805
Published: July 2023
View article titled, Characterizing the composition, structure, and mechanical properties of magnetron sputtering physical vapor deposition TiN and TiSiN coatings
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Journal Articles

Observable color change of Cu2O–Mo–Zr composite films based on rapid oxidation at room temperature and thin film interference behavior

Haoge Zhang, Pengyan Shi, Yuanjiang Lv, Haoliang Sun, Guangxin Wang
Journal: Journal of Vacuum Science & Technology A
J. Vac. Sci. Technol. A 41, 053408 (2023)
https://doi.org/10.1116/6.0002774
Published: July 2023
View article titled, Observable color change of Cu<sub>2</sub>O–Mo–Zr composite films based on rapid oxidation at room temperature and thin film interference behavior
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Includes: Supplementary data
Journal Articles

Deposition and characterization of α-Fe2O3/Pd thin films for neutron reflectometry studies

Hanyu Wang, Ethan C. Self, Sadhvikas J. Addamane, Christopher M. Rouleau, Ryan R. Wixom, Katie L. Browning, Gabriel M. Veith, Liyuan Liang, James F. Browning
Journal: Journal of Vacuum Science & Technology A
J. Vac. Sci. Technol. A 41, 053202 (2023)
https://doi.org/10.1116/6.0002717
Published: July 2023
View article titled, Deposition and characterization of α-Fe<sub>2</sub>O<sub>3</sub>/Pd thin films for neutron reflectometry studies
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Includes: Supplementary data
Journal Articles

Reactive plasma sputtering deposition of polycrystalline GaN thin films on silicon substrates at room temperature

Lakshman Srinivasan, Cyril Jadaud, François Silva, Jean-Charles Vanel, Jean-Luc Maurice, Erik Johnson, Pere Roca i Cabarrocas, Karim Ouaras
Journal: Journal of Vacuum Science & Technology A
J. Vac. Sci. Technol. A 41, 053407 (2023)
https://doi.org/10.1116/6.0002718
Published: July 2023
View article titled, Reactive plasma sputtering deposition of polycrystalline GaN thin films on silicon substrates at room temperature
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Journal Articles

Room temperature magnetron sputtering and laser annealing of ultrathin amorphous sulfur-rich MoSx films

Spencer Gellerup, Corey L. Arnold, Christopher Muratore, Nicholas R. Glavin, Nigel D. Shepherd, Andrey A. Voevodin
Journal: Journal of Vacuum Science & Technology A
J. Vac. Sci. Technol. A 41, 053405 (2023)
https://doi.org/10.1116/6.0002544
Published: July 2023
View article titled, Room temperature magnetron sputtering and laser annealing of ultrathin amorphous sulfur-rich MoS<sub>x</sub> films
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Includes: Supplementary data
Journal Articles

Study of the surface and interface properties of ultrathin nickel film on cerium layer by in situ magnetic sputtering

Tianzuo Fu, Yiqiang Zhong, Lihua Zhou, Shuwen Meng, Zhengang Tian, Yiwu Chen, Tianfu Li, Xiaoyu Zou, Zhengcao Li, Tinggui Yang
Journal: Journal of Vacuum Science & Technology A
J. Vac. Sci. Technol. A 41, 043212 (2023)
https://doi.org/10.1116/6.0002455
Published: July 2023
View article titled, Study of the surface and interface properties of ultrathin nickel film on cerium layer by <em>in situ</em> magnetic sputtering
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Journal Articles

Need for complementary techniques for reliable characterization of MoS2-like layers

Aditya Deshpande, Koki Hojo, Koichi Tanaka, Pedro Arias, Hicham Zaid, Michael Liao, Mark Goorsky, Suneel Kodambaka
Journal: Journal of Vacuum Science & Technology A
J. Vac. Sci. Technol. A 41, 042203 (2023)
https://doi.org/10.1116/6.0002701
Published: June 2023
View article titled, Need for complementary techniques for reliable characterization of MoS<sub>2</sub>-like layers
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Journal Articles

Dependence of persistent photoconductivity on the thickness of β-Ga2O3 thin film photodetectors on c-plane sapphire via magnetron sputtering

Damanpreet Kaur, Rohit Dahiya, Mukesh Kumar
Journal: Journal of Vacuum Science & Technology A
J. Vac. Sci. Technol. A 41, 043410 (2023)
https://doi.org/10.1116/6.0002646
Published: June 2023
View article titled, Dependence of persistent photoconductivity on the thickness of β-Ga<sub>2</sub>O<sub>3</sub> thin film photodetectors on <em>c</em>-plane sapphire via magnetron sputtering
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Journal Articles

Structural evolution and thermoelectric properties of Mg3SbxBi2−x thin films deposited by magnetron sputtering

Grzegorz Sadowski, Rui Shu, Arnaud le Febvrier, Zhijia Han, Denis Music, Weishu Liu, Per Eklund
Journal: Journal of Vacuum Science & Technology A
J. Vac. Sci. Technol. A 41, 043409 (2023)
https://doi.org/10.1116/6.0002635
Published: June 2023
View article titled, Structural evolution and thermoelectric properties of Mg<sub>3</sub>Sb<sub>x</sub>Bi<sub>2</sub><em><sub>−</sub></em><sub>x</sub> thin films deposited by magnetron sputtering
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Journal Articles

Alternative approach for the growth of a TiB2/TiC multilayer on M2 steel using the duplex method: Cathodic arc physical vapor deposition and cathodic reduction and thermal diffusion boriding

Mehran Karimzadehkhoei, Erkan Kacar, Servet Timur, Mustafa Urgen, Guldem Kartal Sireli
Journal: Journal of Vacuum Science & Technology A
J. Vac. Sci. Technol. A 41, 043104 (2023)
https://doi.org/10.1116/6.0002616
Published: June 2023
View article titled, Alternative approach for the growth of a TiB<sub>2</sub>/TiC multilayer on M2 steel using the duplex method: Cathodic arc physical vapor deposition and cathodic reduction and thermal diffusion boriding
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Journal Articles

Effect of tilted closed-field magnetron design on the microstructure and mechanical properties of TiZrNbTaN coatings

Sanath Kumar Honnali, Charlotte Poterie, Arnaud le Febvrier, Daniel Lundin, Grzegorz Greczynski, Per Eklund
Journal: Journal of Vacuum Science & Technology A
J. Vac. Sci. Technol. A 41, 043402 (2023)
https://doi.org/10.1116/6.0002752
Published: May 2023
View article titled, Effect of tilted closed-field magnetron design on the microstructure and mechanical properties of TiZrNbTaN coatings
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Includes: Supplementary data
Journal Articles

Improvement of antibacterial activity and mechanical properties of titanium alloy by TiAlN/Ag gradient multilayer coatings

Xianglin Fang, Rong Tu, Jiawei Liu, Honglian Dai, Long Zheng, Shaobo Zhu, Song Zhang, Takashi Goto
Journal: Journal of Vacuum Science & Technology A
J. Vac. Sci. Technol. A 41, 033107 (2023)
https://doi.org/10.1116/6.0002552
Published: April 2023
View article titled, Improvement of antibacterial activity and mechanical properties of titanium alloy by TiAlN/Ag gradient multilayer coatings
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Journal Articles

Nanostructured MoS2 thin films: Effect of substrate temperature on microstructure, optical, and electrical properties

Onur Alev, Eda Goldenberg
Journal: Journal of Vacuum Science & Technology A
J. Vac. Sci. Technol. A 41, 033408 (2023)
https://doi.org/10.1116/6.0002627
Published: April 2023
View article titled, Nanostructured MoS<sub>2</sub> thin films: Effect of substrate temperature on microstructure, optical, and electrical properties
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Journal Articles

Angular distribution of titanium ions and neutrals in high-power impulse magnetron sputtering discharges

M. Renner, J. Fischer, H. Hajihoseini, J. T. Gudmundsson, M. Rudolph, D. Lundin
Journal: Journal of Vacuum Science & Technology A
J. Vac. Sci. Technol. A 41, 033009 (2023)
https://doi.org/10.1116/6.0002555
Published: April 2023
View article titled, Angular distribution of titanium ions and neutrals in high-power impulse magnetron sputtering discharges
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