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Journal Articles

Quantitative characterization on influence of surface particles on corrosion behavior of multiarc ion plated CrAlN coatings

Jintao Zhang, Qinhao Zhang, Hao Wu, Xinyu Lian, Chengjie Ge, Xinkun Suo
Journal: Journal of Vacuum Science & Technology A
J. Vac. Sci. Technol. A 42, 063102 (2024)
https://doi.org/10.1116/6.0003850
Published: September 2024
View article titled, Quantitative characterization on influence of surface particles on corrosion behavior of multiarc ion plated CrAlN coatings
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Journal Articles

Ti-Zr-Nb-(V) refractory alloy coatings deposited by high-power impulse magnetron sputtering: Structure, mechanical properties, oxidation resistance, and thermal stability

A. Fraile, D. Cavaleiro, A. Bondarev, S. C. Middleburgh, W. E. Lee, F. Fernandes
Journal: Journal of Vacuum Science & Technology A
J. Vac. Sci. Technol. A 42, 063101 (2024)
https://doi.org/10.1116/6.0003864
Published: September 2024
View article titled, Ti-Zr-Nb-(V) refractory alloy coatings deposited by high-power impulse magnetron sputtering: Structure, mechanical properties, oxidation resistance, and thermal stability
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Journal Articles

Fracture strain improving via structural austenitic stainless steel-coated 22MnB5 plates

Jiashun Lv, Pengchao Yu, Maoqing Tian, Zhuo Zhao, Yanwen Zhou
Journal: Journal of Vacuum Science & Technology A
J. Vac. Sci. Technol. A 42, 053108 (2024)
https://doi.org/10.1116/6.0003742
Published: September 2024
View article titled, Fracture strain improving via structural austenitic stainless steel-coated 22MnB5 plates
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Journal Articles

Role of the magnetic layer interface, roughness, and thickness in the temperature-dependent magnetic properties of Al2O3/Co/CoO thin films deposited by magnetron sputtering

Aleksandr V. Kobyakov, Gennadiy S. Patrin, Vasiliy I. Yushkov, Nikolay N. Kosyrev, Vasiliy A. Komarov, Yevgeny V. Tomashevich, Roman Yu. Rudenko
Journal: Journal of Vacuum Science & Technology A
J. Vac. Sci. Technol. A 42, 053413 (2024)
https://doi.org/10.1116/6.0003772
Published: September 2024
View article titled, Role of the magnetic layer interface, roughness, and thickness in the temperature-dependent magnetic properties of Al<sub>2</sub>O<sub>3</sub>/Co/CoO thin films deposited by magnetron sputtering
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Journal Articles

Effect of sputtering power and thickness ratios on the materials properties of Cu–W and Cu–Cr bilayer thin films using high power impulse magnetron and DC magnetron sputtering

Tra Anh Khoa Nguyen, Yu Huang, Nhat Minh Dang, Chi-Han Lin, Wei-Chieh Chen, Zhao-Ying Wang, Ming-Tzer Lin
Journal: Journal of Vacuum Science & Technology A
J. Vac. Sci. Technol. A 42, 053410 (2024)
https://doi.org/10.1116/6.0003795
Published: August 2024
View article titled, Effect of sputtering power and thickness ratios on the materials properties of Cu–W and Cu–Cr bilayer thin films using high power impulse magnetron and DC magnetron sputtering
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Journal Articles

Tuning microstructural and oxidative characteristics of direct current- and high-power pulsed magnetron sputtered MoSi2-based thin films

Editor’s Pick
Sophie Richter, Ahmed Bahr, Philip Kutrowatz, Tomasz Wojcik, Szilárd Kolozsvári, Peter Polcik, Carmen Jerg, Jürgen Ramm, Helmut Riedl
Journal: Journal of Vacuum Science & Technology A
J. Vac. Sci. Technol. A 42, 053407 (2024)
https://doi.org/10.1116/6.0003833
Published: August 2024
View article titled, Tuning microstructural and oxidative characteristics of direct current- and high-power pulsed magnetron sputtered MoSi<sub>2</sub>-based thin films
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Journal Articles

Microstructure, mechanical, and tribological properties of transition metal (Nb, V, W) nitride coating on AISI-1045 steel by cathodic cage plasma deposition

E. A. M. Filho, M. Naeem, J. C. Díaz-Guillén, E. M. Sousa, T. H. C. Costa, Javed Iqbal, R. R. M. Sousa
Journal: Journal of Vacuum Science & Technology A
J. Vac. Sci. Technol. A 42, 053105 (2024)
https://doi.org/10.1116/6.0003773
Published: July 2024
View article titled, Microstructure, mechanical, and tribological properties of transition metal (Nb, V, W) nitride coating on AISI-1045 steel by cathodic cage plasma deposition
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Journal Articles

Inhibition of thermochemical erosion by different coatings attached to the barrel chamber at high temperature and supersonic environments

Shuli Li, Guolai Yang, Liqun Wang, Liguo Xue
Journal: Journal of Vacuum Science & Technology A
J. Vac. Sci. Technol. A 42, 053102 (2024)
https://doi.org/10.1116/6.0003752
Published: July 2024
View article titled, Inhibition of thermochemical erosion by different coatings attached to the barrel chamber at high temperature and supersonic environments
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Journal Articles

High power impulse magnetron sputtering of a zirconium target

Featured
Swetha Suresh Babu, Joel Fischer, Kateryna Barynova, Martin Rudolph, Daniel Lundin, Jon Tomas Gudmundsson
Journal: Journal of Vacuum Science & Technology A
J. Vac. Sci. Technol. A 42, 043007 (2024)
https://doi.org/10.1116/6.0003647
Published: June 2024
View article titled, High power impulse magnetron sputtering of a zirconium target
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Journal Articles

Microstructural evolution and strengthening behavior induced by N addition in TiVCrAl medium entropy alloy films

Z. Y. Zhang, L. Wang, Y. J. Ma, Y. W. Zhang, X. C. Shen, X. Hua, G. J. Li, Z. H. Cao
Journal: Journal of Vacuum Science & Technology A
J. Vac. Sci. Technol. A 42, 043410 (2024)
https://doi.org/10.1116/6.0003625
Published: June 2024
View article titled, Microstructural evolution and strengthening behavior induced by N addition in TiVCrAl medium entropy alloy films
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Journal Articles

Bacterial and corrosion resistance of polytetrafluoroethylene-silver composite coatings by magnetron sputtering

Haiwen Li, Zhiwen He, Wei Wu, Long Zheng, Qingfang Xu, Tenghua Gao, Song Zhang, Honglian Dai, Takashi Goto, Rong Tu
Journal: Journal of Vacuum Science & Technology A
J. Vac. Sci. Technol. A 42, 043409 (2024)
https://doi.org/10.1116/6.0003545
Published: June 2024
View article titled, Bacterial and corrosion resistance of polytetrafluoroethylene-silver composite coatings by magnetron sputtering
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Journal Articles

Studies of electrical resistivity and magnetic properties of CuFe and CuNiFe films prepared by magnetron sputtering

Muhammad Saqib Shahzad, Xiao Wang, Yinglin Hu, Xiaona Li, Qiao Jiang, Min Li, ZhuMin Li, Renwei Liu, Rui Zheng, Chuang Dong
Journal: Journal of Vacuum Science & Technology A
J. Vac. Sci. Technol. A 42, 043408 (2024)
https://doi.org/10.1116/6.0003684
Published: June 2024
View article titled, Studies of electrical resistivity and magnetic properties of CuFe and CuNiFe films prepared by magnetron sputtering
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Includes: Supplementary data
Journal Articles

Boron carbide films with reduced nodular defect density deposited by full-face erosion radio-frequency magnetron sputtering

G. V. Taylor, L. B. Bayu Aji, S. J. Shin, J. H. Bae, A. M. Engwall, S. O. Kucheyev
Journal: Journal of Vacuum Science & Technology A
J. Vac. Sci. Technol. A 42, 040401 (2024)
https://doi.org/10.1116/6.0003571
Published: May 2024
View article titled, Boron carbide films with reduced nodular defect density deposited by full-face erosion radio-frequency magnetron sputtering
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Journal Articles

Tailoring structure, morphology, and tribo-mechanical properties of HiPIMS-deposited CrxNy coatings for enhanced performance in wear and corrosion protection

Nassima Jaghar, Mohamed Lahouij, Hicham Larhlimi, Olayinka Abegunde, Youssef Samih, Mohammed Makha, Jones Alami
Journal: Journal of Vacuum Science & Technology A
J. Vac. Sci. Technol. A 42, 043101 (2024)
https://doi.org/10.1116/6.0003517
Published: May 2024
View article titled, Tailoring structure, morphology, and tribo-mechanical properties of HiPIMS-deposited Cr<sub>x</sub>N<sub>y</sub> coatings for enhanced performance in wear and corrosion protection
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Journal Articles

Investigating different carbon-based target materials: Can we improve ionization in HiPIMS for the deposition of diamondlike carbon films?

Martin Fenker, Martin Balzer, Holger Kaßner
Journal: Journal of Vacuum Science & Technology A
J. Vac. Sci. Technol. A 42, 043402 (2024)
https://doi.org/10.1116/6.0003333
Published: May 2024
View article titled, Investigating different carbon-based target materials: Can we improve ionization in HiPIMS for the deposition of diamondlike carbon films?
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Journal Articles

Design principle of gradient elastic modulus transition layer via substrate mechanical property

Linfan Sun, Yi Ren, Biao Si, Yanwen Zhou
Journal: Journal of Vacuum Science & Technology A
J. Vac. Sci. Technol. A 42, 043403 (2024)
https://doi.org/10.1116/6.0003673
Published: May 2024
View article titled, Design principle of gradient elastic modulus transition layer via substrate mechanical property
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Journal Articles

Microstructure and mechanical properties of Cr films with different orientations before and after plasma nitriding

Jianting Zhang, Dejun Li, Yuanyuan Guo, Deli Shang, Shuqi Liu, Lei Kang, Lin Zhang, Yongjie Yang, Xinggang Wang, Ning Xin
Journal: Journal of Vacuum Science & Technology A
J. Vac. Sci. Technol. A 42, 033104 (2024)
https://doi.org/10.1116/6.0003492
Published: April 2024
View article titled, Microstructure and mechanical properties of Cr films with different orientations before and after plasma nitriding
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Journal Articles

Materials’ properties of low temperature deposited Cu/W and Cu/Cr multilayer thin films using high power impulse magnetron sputtering

Yu Huang, Tra Anh Khoa Nguyen, Nhat Minh Dang, Hao-Yu Wang, Ming-Tzer Lin
Journal: Journal of Vacuum Science & Technology A
J. Vac. Sci. Technol. A 42, 033407 (2024)
https://doi.org/10.1116/6.0003512
Published: April 2024
View article titled, Materials’ properties of low temperature deposited Cu/W and Cu/Cr multilayer thin films using high power impulse magnetron sputtering
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Journal Articles

Surface temperature of a 2 in. Ti target during DC magnetron sputtering

Carlos Ramos, Daniela S. Jacobo-Mora, Julio Cruz, Stephen Muhl
Journal: Journal of Vacuum Science & Technology A
J. Vac. Sci. Technol. A 42, 033002 (2024)
https://doi.org/10.1116/6.0003481
Published: March 2024
View article titled, Surface temperature of a 2 in. Ti target during DC magnetron sputtering
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Journal Articles

High-performance a-Ga2O3 solar-blind photodetectors by pulsed magnetron sputtering deposition

Difei Xue, Peiwen Lv, Kai Peng, Qiang Hu, Chenlong Chen
Journal: Journal of Vacuum Science & Technology A
J. Vac. Sci. Technol. A 42, 033403 (2024)
https://doi.org/10.1116/6.0003442
Published: March 2024
View article titled, High-performance a-Ga<sub>2</sub>O<sub>3</sub> solar-blind photodetectors by pulsed magnetron sputtering deposition
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