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Journal Articles
J. Vac. Sci. Technol. A 41, 063103 (2023)
Published: September 2023
Journal Articles
J. Vac. Sci. Technol. A 41, 053107 (2023)
Published: July 2023
Journal Articles
J. Vac. Sci. Technol. A 40, 043001 (2022)
Published: May 2022
Journal Articles
J. Vac. Sci. Technol. A 40, 030801 (2022)
Published: April 2022
Journal Articles
J. Vac. Sci. Technol. A 39, 050801 (2021)
Published: July 2021
Journal Articles
J. Vac. Sci. Technol. A 38, 031201 (2020)
Published: March 2020
Journal Articles
J. Vac. Sci. Technol. A 36, 04F404 (2018)
Published: June 2018
Journal Articles
Sungyool Kwon, Wonjin Ban, Hyuna Lim, Youngsik Seo, Heonyong Park, Eun-Joo Kim, Yong Ki Cho, Sang Gyu Park, Donggeun Jung
J. Vac. Sci. Technol. A 36, 031403 (2018)
Published: May 2018
Journal Articles
J. Vac. Sci. Technol. A 35, 01B134 (2017)
Published: December 2016
Journal Articles
J. Vac. Sci. Technol. A 34, 041403 (2016)
Published: June 2016
Journal Articles
J. Vac. Sci. Technol. A 34, 041402 (2016)
Published: June 2016
Journal Articles
J. Vac. Sci. Technol. A 32, 02B117 (2014)
Published: February 2014
Journal Articles
Xiao Z. Fan, Ekaterina Pomerantseva, Markus Gnerlich, Adam Brown, Konstantinos Gerasopoulos, Matthew McCarthy, James Culver, Reza Ghodssi
J. Vac. Sci. Technol. A 31, 050815 (2013)
Published: August 2013
Journal Articles
J. Vac. Sci. Technol. A 31, 020605 (2013)
Published: February 2013
Journal Articles
J. Vac. Sci. Technol. A 30, 051505 (2012)
Published: July 2012
Journal Articles
Tomi Ryynänen, Laura Ylä-Outinen, Susanna Narkilahti, Jarno M. A. Tanskanen, Jari Hyttinen, Jani Hämäläinen, Markku Leskelä, Jukka Lekkala
J. Vac. Sci. Technol. A 30, 041501 (2012)
Published: April 2012
Journal Articles
J. Vac. Sci. Technol. A 29, 020801 (2011)
Published: March 2011
Journal Articles
J. Vac. Sci. Technol. A 28, 407–410 (2010)
Published: March 2010
Journal Articles
J. Vac. Sci. Technol. A 27, 1281–1288 (2009)
Published: September 2009
Journal Articles
J. Vac. Sci. Technol. A 27, 1183–1187 (2009)
Published: August 2009
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