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Journal Articles

Reactively sputtered coatings for the protection of a nickel-based alloy against heavy oil corrosion fouling

Fellipy S. Rocha, Pedro R. T. Avila, Fadila Khelfaoui, Luc Vernhes, Gregory S. Patience, Jolanta E. Klemberg-Sapieha, Ludvik Martinu
Journal: Journal of Vacuum Science & Technology A
J. Vac. Sci. Technol. A 43, 033106 (2025)
https://doi.org/10.1116/6.0004343
Published: April 2025
View articletitled, Reactively sputtered coatings for the protection of a nickel-based alloy against heavy oil corrosion fouling
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Journal Articles

Growth of InBi on InSb(100) via molecular beam epitaxy

Molly McDonough, Yuxi Zhang, Nasim Alem, Stephanie Law
Journal: Journal of Vacuum Science & Technology A
J. Vac. Sci. Technol. A 43, 033406 (2025)
https://doi.org/10.1116/6.0004418
Published: April 2025
View articletitled, Growth of InBi on InSb(100) via molecular beam epitaxy
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Journal Articles

Structure and properties of Ta–Ti binary layer as anti-hydrogen embrittlement layer within neutron production target for accelerator-based boron neutron capture therapy (AB-BNCT)

Fanxi Zhang, Yupeng Xie, Yixin Si, Yaru Wang, Qiuyu Sun, Quanxu Jiang, Xuanyu Meng, Yaocheng Hu, Zheng Han, Yifan Yang, Chen Chen, Sheng Wang
Journal: Journal of Vacuum Science & Technology A
J. Vac. Sci. Technol. A 43, 033405 (2025)
https://doi.org/10.1116/6.0004318
Published: April 2025
View articletitled, Structure and properties of Ta–Ti binary layer as anti-hydrogen embrittlement layer within neutron production target for accelerator-based boron neutron capture therapy (AB-BNCT)
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Journal Articles

Atomic layer deposition of AlxTi1−xN via co-evaporation of metal precursors

Pamburayi Mpofu, Pentti Niiranen, Oscar Alm, Jonas Lauridsen, Tommy Larsson, Henrik Pedersen
Journal: Journal of Vacuum Science & Technology A
J. Vac. Sci. Technol. A 43, 032405 (2025)
https://doi.org/10.1116/6.0004420
Published: March 2025
View articletitled, Atomic layer deposition of AlxTi1−xN via co-evaporation of metal precursors
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Journal Articles

Research on the difference in etching rates of SiO2 at the top and bottom of high-aspect-ratio trench in C4F8/Ar/O2 plasma etching

Leyi Zhang, Zhihong Gao, Yongzhi Fang, Dongyu Cen, Maoxiang Liu, Yan Zhang, Chunxia Ma, Enhao Zhao, Wencan Zhu, Wenli Wu, Xudong Wei
Journal: Journal of Vacuum Science & Technology A
J. Vac. Sci. Technol. A 43, 033003 (2025)
https://doi.org/10.1116/6.0004402
Published: March 2025
View articletitled, Research on the difference in etching rates of SiO2 at the top and bottom of high-aspect-ratio trench in C4F8/Ar/O2 plasma etching
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Journal Articles

Study of microstructure and mechanical properties of cBN coatings on nanocrystalline diamond transition layer prepared by magnetron sputtering

Shunxin Liu, Shuai Tian, Kaishan Nie, Zhengyi Zhang
Journal: Journal of Vacuum Science & Technology A
J. Vac. Sci. Technol. A 43, 033402 (2025)
https://doi.org/10.1116/6.0004340
Published: March 2025
View articletitled, Study of microstructure and mechanical properties of cBN coatings on nanocrystalline diamond transition layer prepared by magnetron sputtering
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Journal Articles

SiO2 atomic-layer fluorination-passivation for dual-material molybdenum/polypyrrole area-selective deposition and strategies for surface reactivation

Editor’s Pick
Hwan Oh, Hyuenwoo Yang, Nicholas M. Carroll, Yujin Jang, Gregory N. Parsons
Journal: Journal of Vacuum Science & Technology A
J. Vac. Sci. Technol. A 43, 032401 (2025)
https://doi.org/10.1116/6.0004298
Published: March 2025
View articletitled, SiO2 atomic-layer fluorination-passivation for dual-material molybdenum/polypyrrole area-selective deposition and strategies for surface reactivation
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Journal Articles

Low-temperature ALD of metallic cobalt using the CoCOhept precursor: Simulation-assisted process development for deposition on temperature sensitive 3D-structures

Editor’s Pick
Mathias Franz, Linda Jäckel, Xiao Hu, Lysann Kaßner, Camilla Thurm, Dirk Rittrich, Christian Helke, Jörg Schuster, Marcus Daniel, Frank Stahr, Natalia Rüffer, Robert Kretschmer, Stefan E. Schulz
Journal: Journal of Vacuum Science & Technology A
J. Vac. Sci. Technol. A 43, 022412 (2025)
https://doi.org/10.1116/6.0004248
Published: February 2025
View articletitled, Low-temperature ALD of metallic cobalt using the CoCOhept precursor: Simulation-assisted process development for deposition on temperature sensitive 3D-structures
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Journal Articles

Postannealing-induced intermetallic phase formation in NiPt thin films deposited via direct current and high-power impulse magnetron sputtering

Alexander Kühne, Wahyu Diyatmika, Yeliz Unutulmazsoy, Martin Rudolph, Annemarie Finzel, Jürgen W. Gerlach, Andriy Lotnyk, Bernd Abel, André Anders
Journal: Journal of Vacuum Science & Technology A
J. Vac. Sci. Technol. A 43, 023408 (2025)
https://doi.org/10.1116/6.0004249
Published: February 2025
View articletitled, Postannealing-induced intermetallic phase formation in NiPt thin films deposited via direct current and high-power impulse magnetron sputtering
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Journal Articles

Effect of WC particle size on the microstructural evolution and wear resistance of laser cladding Inconel 718/WC-12Co composite coating

Yu Liu, Haiquan Jin, Guohui Li, Zhaofeng Wang, Hui Liang, Dongdong Zhang
Journal: Journal of Vacuum Science & Technology A
J. Vac. Sci. Technol. A 43, 023106 (2025)
https://doi.org/10.1116/6.0004346
Published: February 2025
View articletitled, Effect of WC particle size on the microstructural evolution and wear resistance of laser cladding Inconel 718/WC-12Co composite coating
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Journal Articles

Effect of scanning speed on the organization and properties of CoCrFeNi fusion cladding layer

Featured
Weiqian Zhu, Shanchen Wang, Zitian Zhao, Yunlong Li, Xiaofeng Li, Jianhong Wang
Journal: Journal of Vacuum Science & Technology A
J. Vac. Sci. Technol. A 43, 023105 (2025)
https://doi.org/10.1116/6.0004245
Published: February 2025
View articletitled, Effect of scanning speed on the organization and properties of CoCrFeNi fusion cladding layer
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Journal Articles

Structure and tribological evolution of Ta-N layer by controlling the time of microwave plasma nitriding

Jiacheng Li, Zhigang Xu, Jian Peng, Qiang Shen, Chuanbin Wang
Journal: Journal of Vacuum Science & Technology A
J. Vac. Sci. Technol. A 43, 023103 (2025)
https://doi.org/10.1116/6.0004327
Published: February 2025
View articletitled, Structure and tribological evolution of Ta-N layer by controlling the time of microwave plasma nitriding
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Journal Articles

Comparative study of film quality on c axis oriented AlN deposited by pulsed DC and RF reactive sputtering with optical emission spectroscopy big data analysis

Xue-Li Tseng, Hsuan-Fan Chen, Yu-Shin Chen, Shun-Chien Chiu, Hsiao-Han Lo, Yiin-Kuen Fuh, Tomi T. Li
Journal: Journal of Vacuum Science & Technology A
J. Vac. Sci. Technol. A 43, 023406 (2025)
https://doi.org/10.1116/6.0004001
Published: February 2025
View articletitled, Comparative study of film quality on c axis oriented AlN deposited by pulsed DC and RF reactive sputtering with optical emission spectroscopy big data analysis
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Journal Articles

Enhanced properties of microarc oxide coating by secondary treatment of laser surface remelting

Jie Zan, ZiHan Liu, Xingyue Dai, Hanhua Zhu, Guangshen Xu, Hailin Lu
Journal: Journal of Vacuum Science & Technology A
J. Vac. Sci. Technol. A 43, 023102 (2025)
https://doi.org/10.1116/6.0004300
Published: February 2025
View articletitled, Enhanced properties of microarc oxide coating by secondary treatment of laser surface remelting
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Journal Articles

Effect of organic solvent treatments on oCVD-deposited PEDOT thin films

Travis G. Novak, R. Blake Nuwayhid, Battogtokh Jugdersuren, Xiao Liu, Paul A. DeSario, Debra R. Rolison
Journal: Journal of Vacuum Science & Technology A
J. Vac. Sci. Technol. A 43, 022801 (2025)
https://doi.org/10.1116/6.0004304
Published: February 2025
View articletitled, Effect of organic solvent treatments on oCVD-deposited PEDOT thin films
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Journal Articles

Atomic layer deposition of crystalline molybdenum trioxide and suboxide thin films using molybdenum(II) acetate dimer precursor

Editor’s Pick
Alexey Ganzhinov, Miika Mattinen, Kenichiro Mizohata, Mykhailo Chundak, Timo Hatanpää, Mikko Ritala, Matti Putkonen
Journal: Journal of Vacuum Science & Technology A
J. Vac. Sci. Technol. A 43, 022403 (2025)
https://doi.org/10.1116/6.0004240
Published: January 2025
View articletitled, Atomic layer deposition of crystalline molybdenum trioxide and suboxide thin films using molybdenum(II) acetate dimer precursor
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Journal Articles

Atomic layer deposition of nanofilms on porous polymer substrates: Strategies for success

Editor’s Pick
Brian C. Welch, Jeanne Casetta, Rajesh Pathak, Jeffrey W. Elam, Céline Pochat-Bohatier, Philippe Miele, Tamar Segal-Peretz
Journal: Journal of Vacuum Science & Technology A
J. Vac. Sci. Technol. A 43, 022402 (2025)
https://doi.org/10.1116/6.0004187
Published: January 2025
View articletitled, Atomic layer deposition of nanofilms on porous polymer substrates: Strategies for success
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Journal Articles

Ultrahigh purity plasma-enhanced atomic layer deposition and electrical properties of epitaxial scandium nitride

Editor’s Pick
Gilbert B. Rayner, Jr., Noel O’Toole, Bangzhi Liu, Jeffrey Shallenberger, Jiadi Zhu, Tomás Palacios, Piush Behera, Suraj Cheema, Blaine Johs, Nicholas A. Strnad
Journal: Journal of Vacuum Science & Technology A
J. Vac. Sci. Technol. A 43, 020401 (2025)
https://doi.org/10.1116/6.0004180
Published: January 2025
View articletitled, Ultrahigh purity plasma-enhanced atomic layer deposition and electrical properties of epitaxial scandium nitride
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Journal Articles

Research on microstructure and high-temperature wear properties of laser cladding iron-based coatings

Haiyang Long, Xiaoshuo Li, Haijiang Shi, Zhen Dong, Fuhai Li, Xingchen Yan, Zhanshan Ma, Bochao Wang, Tao Wang, Yanfeng Wang, Xueyong Li
Journal: Journal of Vacuum Science & Technology A
J. Vac. Sci. Technol. A 43, 013106 (2025)
https://doi.org/10.1116/6.0004151
Published: January 2025
View articletitled, Research on microstructure and high-temperature wear properties of laser cladding iron-based coatings
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Journal Articles

Effect of the buffer layer on the energy storage performance of Pb0.97La0.02Zr0.5Sn0.5O3 thin film

Xin Liu, Jiawei Wang, Zhongshuai Liang, Weidong Zhao, Ruizhi Wang, Yiwei Tong, Yonghong Cheng
Journal: Journal of Vacuum Science & Technology A
J. Vac. Sci. Technol. A 43, 013403 (2025)
https://doi.org/10.1116/6.0004172
Published: December 2024
View articletitled, Effect of the buffer layer on the energy storage performance of Pb0.97La0.02Zr0.5Sn0.5O3 thin film
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