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Journal Articles
J. Vac. Sci. Technol. A 40, 031601 (2022)
Published: March 2022
Journal Articles
J. Vac. Sci. Technol. A 40, 010805 (2022)
Published: December 2021
Journal Articles
J. Vac. Sci. Technol. A 40, 013212 (2022)
Published: December 2021
Journal Articles
J. Vac. Sci. Technol. A 40, 012203 (2022)
Published: December 2021
Journal Articles
J. Vac. Sci. Technol. A 40, 013211 (2022)
Published: December 2021
Journal Articles
J. Vac. Sci. Technol. A 27, 1249–1250 (2009)
Published: September 2009
Journal Articles
J. Vac. Sci. Technol. A 8, 3455–3459 (1990)
Published: July 1990
Journal Articles
J. Vac. Sci. Technol. A 5, 1733–1734 (1987)
Published: July 1987
Journal Articles
J. Vac. Sci. Technol. A 3, 2141–2146 (1985)
Published: November 1985