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Journal Articles

Enhanced plasma resistance of uniform ALD-Y2O3 thin films for chamber components’ coatings

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Jun-Hyeok Jeon, Sun Gil Kim, Hyun-Mi Kim, Hye-Young Kim, Chang-sub Park, Yong Soo Lee, Seul-Gi Kim, Hyeongkeun Kim, Jae-Boong Choi
Journal: Journal of Vacuum Science & Technology A
J. Vac. Sci. Technol. A 43, 032408 (2025)
https://doi.org/10.1116/6.0004256
Published: April 2025
View articletitled, Enhanced plasma resistance of uniform ALD-Y2O3 thin films for chamber components’ coatings
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Journal Articles

Enhanced properties of microarc oxide coating by secondary treatment of laser surface remelting

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Jie Zan, ZiHan Liu, Xingyue Dai, Hanhua Zhu, Guangshen Xu, Hailin Lu
Journal: Journal of Vacuum Science & Technology A
J. Vac. Sci. Technol. A 43, 023102 (2025)
https://doi.org/10.1116/6.0004300
Published: February 2025
View articletitled, Enhanced properties of microarc oxide coating by secondary treatment of laser surface remelting
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Journal Articles

Intrinsic and extrinsic contributions in the ferroelectric response of chemically synthesized BiFeO3-xPbTiO3 thin films

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Layiq Zia, Eesha Tur Razia, G. Hassnain Jaffari, S. Ismat Shah
Journal: Journal of Vacuum Science & Technology A
J. Vac. Sci. Technol. A 42, 023114 (2024)
https://doi.org/10.1116/6.0003371
Published: February 2024
View articletitled, Intrinsic and extrinsic contributions in the ferroelectric response of chemically synthesized BiFeO3-xPbTiO3 thin films
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Journal Articles

Control of microstructure and composition of reactively sputtered vanadium nitride thin films based on hysteresis curves and application to microsupercapacitors

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Allan Lebreton, Marie-Paule Besland, Pierre-Yves Jouan, Tatiana Signe, Cédric Mannequin, Mireille Richard-Plouet, Maryline Le Granvalet, Christophe Lethien, Thierry Brousse, Jérémy Barbé
Journal: Journal of Vacuum Science & Technology A
J. Vac. Sci. Technol. A 42, 023405 (2024)
https://doi.org/10.1116/5.0177028
Published: January 2024
View articletitled, Control of microstructure and composition of reactively sputtered vanadium nitride thin films based on hysteresis curves and application to microsupercapacitors
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Journal Articles

Al2O3 atomic layer deposition on a porous matrix of carbon fibers (FiberForm) for oxidation resistance

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Jack T. Widmer, Steven M. George
Journal: Journal of Vacuum Science & Technology A
J. Vac. Sci. Technol. A 41, 062412 (2023)
https://doi.org/10.1116/6.0003085
Published: November 2023
View articletitled, Al2O3 atomic layer deposition on a porous matrix of carbon fibers (FiberForm) for oxidation resistance
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Journal Articles

Ion track formation and porosity in InSb induced by swift heavy ion irradiation

Editor’s PickOpen Access
Taleb Alwadi, Christian Notthoff, Shankar Dutt, Jessica Wierbik, Nahid Afrin, Alexander Kiy, Patrick Kluth
Journal: Journal of Vacuum Science & Technology A
J. Vac. Sci. Technol. A 41, 063404 (2023)
https://doi.org/10.1116/6.0003007
Published: October 2023
View articletitled, Ion track formation and porosity in InSb induced by swift heavy ion irradiation
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Journal Articles

Challenges in porosity characterization of thin films: Cross-evaluation of different techniques

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Mikhail R. Baklanov, Konstantin P. Mogilnikov, Alexey S. Vishnevskiy
Journal: Journal of Vacuum Science & Technology A
J. Vac. Sci. Technol. A 41, 050802 (2023)
https://doi.org/10.1116/6.0002793
Published: July 2023
View articletitled, Challenges in porosity characterization of thin films: Cross-evaluation of different techniques
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Journal Articles

Surface functionalization of microporous carbon fibers by vapor phase methods for CO2 capture

Open Access
Stephan Prünte, Gerben van Straaten, Dries van Eyck, Oscar Diaz-Morales, Jeroen Van Dijck, Hans de Neve, Mariadriana Creatore
Journal: Journal of Vacuum Science & Technology A
J. Vac. Sci. Technol. A 41, 032403 (2023)
https://doi.org/10.1116/6.0002419
Published: March 2023
View articletitled, Surface functionalization of microporous carbon fibers by vapor phase methods for CO2 capture
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Includes: Supplementary data
Journal Articles

Elaboration and characterization of porous ultrathin gold films grown by ion beam assisted deposition

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A. Aassime, M. Duquennoy, F. Hamouda, T. Kadi, F. Mahut, M. Ouaftouh
Journal: Journal of Vacuum Science & Technology A
J. Vac. Sci. Technol. A 40, 053404 (2022)
https://doi.org/10.1116/6.0002050
Published: September 2022
View articletitled, Elaboration and characterization of porous ultrathin gold films grown by ion beam assisted deposition
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Journal Articles

Scalable synthesis of supported catalysts using fluidized bed atomic layer deposition

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Zheng Lu, Angel Yanguas-Gil, Donghyeon Kang, Pragathi Darapaneni, Anil U. Mane, Christopher L. Marshall, Jeffrey W. Elam
Journal: Journal of Vacuum Science & Technology A
J. Vac. Sci. Technol. A 40, 042404 (2022)
https://doi.org/10.1116/6.0001891
Published: June 2022
View articletitled, Scalable synthesis of supported catalysts using fluidized bed atomic layer deposition
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Journal Articles

Effect of electrochemical cycling on microstructures of nanocomposite silicon electrodes using hyperpolarized 129Xe and 7Li NMR spectroscopy

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Yougang Mao, Naba K. Karan, Ravi Kumar, Russell Hopson, Pradeep R. Guduru, Brian W. Sheldon, Li-Qiong Wang
Journal: Journal of Vacuum Science & Technology A
J. Vac. Sci. Technol. A 40, 043203 (2022)
https://doi.org/10.1116/6.0001768
Published: May 2022
View articletitled, Effect of electrochemical cycling on microstructures of nanocomposite silicon electrodes using hyperpolarized 129Xe and 7Li NMR spectroscopy
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Journal Articles

Flexible atomic layer deposition system for coating porous materials

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Woo-Jae Lee, Ohhun Kwon, Renjing Huang, Chao Lin, Raymond J. Gorte, John M. Vohs
Journal: Journal of Vacuum Science & Technology A
J. Vac. Sci. Technol. A 40, 032401 (2022)
https://doi.org/10.1116/6.0001679
Published: March 2022
View articletitled, Flexible atomic layer deposition system for coating porous materials
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Includes: Supplementary data
Journal Articles

Functional plasma-sprayed hydroxylapatite coatings for medical application: Clinical performance requirements and key property enhancement

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Robert B. Heimann
Journal: Journal of Vacuum Science & Technology A
J. Vac. Sci. Technol. A 39, 050801 (2021)
https://doi.org/10.1116/6.0001132
Published: July 2021
View articletitled, Functional plasma-sprayed hydroxylapatite coatings for medical application: Clinical performance requirements and key property enhancement
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Journal Articles

Silicon-ion implantation induced doping and nanoporosity in molecular beam epitaxy grown GaSb epitaxial films

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Rakesh Kumar Pandey, Puspashree Mishra, Akhilesh Pandey, Shankar Dutta, Aman Arora, Shyama Rath
Journal: Journal of Vacuum Science & Technology A
J. Vac. Sci. Technol. A 39, 043413 (2021)
https://doi.org/10.1116/6.0000895
Published: June 2021
View articletitled, Silicon-ion implantation induced doping and nanoporosity in molecular beam epitaxy grown GaSb epitaxial films
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Journal Articles

Irradiation of nanoporous structures with light and heavy low-energy ions: Sputtering enhancement and pore sealing

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Anastasia A. Sycheva, Ekaterina N. Voronina, Tatyana V. Rakhimova, Lev S. Novikov, Alexander T. Rakhimov
Journal: Journal of Vacuum Science & Technology A
J. Vac. Sci. Technol. A 38, 053004 (2020)
https://doi.org/10.1116/6.0000389
Published: August 2020
View articletitled, Irradiation of nanoporous structures with light and heavy low-energy ions: Sputtering enhancement and pore sealing
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Journal Articles

Modeling and experimental demonstration of high-throughput flow-through spatial atomic layer deposition of Al2O3 coatings on textiles at atmospheric pressure

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Moataz Bellah M. Mousa, Jennifer S. Ovental, Alexandra H. Brozena, Christopher J. Oldham, Gregory N. Parsons
Journal: Journal of Vacuum Science & Technology A
J. Vac. Sci. Technol. A 36, 031517 (2018)
https://doi.org/10.1116/1.5022077
Published: May 2018
View articletitled, Modeling and experimental demonstration of high-throughput flow-through spatial atomic layer deposition of Al2O3 coatings on textiles at atmospheric pressure
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Journal Articles

Correlation between density and hydrogen content in vertically aligned carbon nanotube forests by ion beam analysis

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Olga Girshevitz, Vova Richter, Efrat Shawat Avraham, Gilbert D. Nessim, Irina Gouzman
Journal: Journal of Vacuum Science & Technology A
J. Vac. Sci. Technol. A 35, 061403 (2017)
https://doi.org/10.1116/1.4999774
Published: August 2017
View articletitled, Correlation between density and hydrogen content in vertically aligned carbon nanotube forests by ion beam analysis
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Journal Articles

Pore radius fine tuning of a silica matrix (MCM-41) based on the synthesis of alumina nanolayers with different thicknesses by atomic layer deposition

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Elena G. Zemtsova, Andrei Yu. Arbenin, Alexander F. Plotnikov, Vladimir M. Smirnov
Journal: Journal of Vacuum Science & Technology A
J. Vac. Sci. Technol. A 33, 021519 (2015)
https://doi.org/10.1116/1.4907989
Published: February 2015
View articletitled, Pore radius fine tuning of a silica matrix (MCM-41) based on the synthesis of alumina nanolayers with different thicknesses by atomic layer deposition
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Journal Articles

Modeling precursor diffusion and reaction of atomic layer deposition in porous structures

Open Access
Thomas Keuter, Norbert Heribert Menzler, Georg Mauer, Frank Vondahlen, Robert Vaßen, Hans Peter Buchkremer
Journal: Journal of Vacuum Science & Technology A
J. Vac. Sci. Technol. A 33, 01A104 (2015)
https://doi.org/10.1116/1.4892385
Published: August 2014
View articletitled, Modeling precursor diffusion and reaction of atomic layer deposition in porous structures
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Journal Articles

Effects of He and Ar ion kinetic energies in protection of organosilicate glass from O2 plasma damage

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Joe Lee, Haseeb Kazi, Sneha Gaddam, Jeffry A. Kelber, David B. Graves
Journal: Journal of Vacuum Science & Technology A
J. Vac. Sci. Technol. A 31, 041303 (2013)
https://doi.org/10.1116/1.4809579
Published: June 2013
View articletitled, Effects of He and Ar ion kinetic energies in protection of organosilicate glass from O2 plasma damage
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