Skip Nav Destination
Update search
Filter
All
- All
- Title
- Author
- Author Affiliations
- Full Text
- Abstract
- Keyword
- DOI
- ISBN
- EISBN
- ISSN
- EISSN
- Issue
- Volume
- References
Filter
All
- All
- Title
- Author
- Author Affiliations
- Full Text
- Abstract
- Keyword
- DOI
- ISBN
- EISBN
- ISSN
- EISSN
- Issue
- Volume
- References
Filter
All
- All
- Title
- Author
- Author Affiliations
- Full Text
- Abstract
- Keyword
- DOI
- ISBN
- EISBN
- ISSN
- EISSN
- Issue
- Volume
- References
Filter
All
- All
- Title
- Author
- Author Affiliations
- Full Text
- Abstract
- Keyword
- DOI
- ISBN
- EISBN
- ISSN
- EISSN
- Issue
- Volume
- References
Filter
All
- All
- Title
- Author
- Author Affiliations
- Full Text
- Abstract
- Keyword
- DOI
- ISBN
- EISBN
- ISSN
- EISSN
- Issue
- Volume
- References
Filter
All
- All
- Title
- Author
- Author Affiliations
- Full Text
- Abstract
- Keyword
- DOI
- ISBN
- EISBN
- ISSN
- EISSN
- Issue
- Volume
- References
NARROW
Format
Collections
Topics
Subjects
Journal
Article Type
Issue Section
Date
Availability
Journal Articles
J. Vac. Sci. Technol. A 43, 023203 (2025)
Published: February 2025
Journal Articles
J. Vac. Sci. Technol. A 43, 018501 (2025)
Published: December 2024
Journal Articles
Adnan Mohammad, Krishna D. Joshi, Dhan Rana, Saidjafarzoda Ilhom, Barrett Wells, Boris Sinkovic, Ali K. Okyay, Necmi Biyikli
J. Vac. Sci. Technol. A 42, 012406 (2024)
Published: January 2024
Includes: Supplementary data
Journal Articles
J. Vac. Sci. Technol. A 41, 023101 (2023)
Published: January 2023
Journal Articles
J. Vac. Sci. Technol. A 40, 062704 (2022)
Published: November 2022
Includes: Supplementary data
Journal Articles
A. Parisini, P. Mazzolini, O. Bierwagen, C. Borelli, K. Egbo, A. Sacchi, M. Bosi, L. Seravalli, A. Tahraoui, R. Fornari
J. Vac. Sci. Technol. A 40, 042701 (2022)
Published: June 2022
Includes: Supplementary data
Journal Articles
Alexander Y. Polyakov, Vladimir I. Nikolaev, Eugene B. Yakimov, Fan Ren, Stephen J. Pearton, Jihyun Kim
J. Vac. Sci. Technol. A 40, 020804 (2022)
Published: February 2022
Journal Articles
J. Vac. Sci. Technol. A 39, 060801 (2021)
Published: September 2021
Journal Articles
J. Vac. Sci. Technol. A 38, 063412 (2020)
Published: November 2020
Journal Articles
J. Vac. Sci. Technol. A 36, 04F405 (2018)
Published: June 2018
Journal Articles
Roberto Mirabal-Rojas, Stephen Muhl, Sandra E. Rodil, Enrique Camps, Michael Lejeune, Andreas Zeinert
J. Vac. Sci. Technol. A 34, 041518 (2016)
Published: July 2016
Journal Articles
J. Vac. Sci. Technol. A 31, 01A118 (2013)
Published: November 2012
Journal Articles
Madeleine Diskus, Ola Nilsen, Helmer Fjellvåg, Spyros Diplas, Pablo Beato, Clare Harvey, Evelien van Schrojenstein Lantman, Bert M. Weckhuysen
J. Vac. Sci. Technol. A 30, 01A107 (2012)
Published: September 2011
Journal Articles
J. Vac. Sci. Technol. A 25, 1188–1192 (2007)
Published: July 2007
Journal Articles
J. Vac. Sci. Technol. A 25, L5–L8 (2007)
Published: January 2007
Journal Articles
J. Vac. Sci. Technol. A 24, 2054–2060 (2006)
Published: October 2006
Journal Articles
J. Vac. Sci. Technol. A 22, 122–128 (2004)
Published: December 2003
Journal Articles
J. Vac. Sci. Technol. A 8, 49–60 (1990)
Published: January 1990
Journal Articles
J. Vac. Sci. Technol. A 6, 1907–1911 (1988)
Published: May 1988