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Journal Articles
Brian C. Welch, Jeanne Casetta, Rajesh Pathak, Jeffrey W. Elam, Céline Pochat-Bohatier, Philippe Miele, Tamar Segal-Peretz
J. Vac. Sci. Technol. A 43, 022402 (2025)
Published: January 2025
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Published: November 2024
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Anjar Anggraini Harumningtyas, Tomoko Ito, Hidekazu Kita, Joe Kodama, Takashi Kaito, Satoshi Hamaguchi
J. Vac. Sci. Technol. A 42, 053004 (2024)
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Published: June 2024
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J. Vac. Sci. Technol. A 42, 043409 (2024)
Published: June 2024
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J. Vac. Sci. Technol. A 42, 032803 (2024)
Published: April 2024
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J. Vac. Sci. Technol. A 42, 033009 (2024)
Published: April 2024
Includes: Supplementary data
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J. Vac. Sci. Technol. A 42, 033103 (2024)
Published: April 2024
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J. Vac. Sci. Technol. A 42, 023110 (2024)
Published: February 2024
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J. Vac. Sci. Technol. A 42, 023004 (2024)
Published: February 2024
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Rui Ding, Xue-qi Zhang, Jing Lv, An-lan Ji, Yu-chen Zhang, Jie Fu, Xiao Lv, Lan Yao, Sheng-ying Yang, Guo-qing Mao, Xuan Liang, Heng Yang, Jie Liu, Hai-bin Yu
J. Vac. Sci. Technol. A 42, 023415 (2024)
Published: February 2024
Journal Articles
J. Vac. Sci. Technol. A 42, 022401 (2024)
Published: January 2024
Includes: Supplementary data
Journal Articles
J. Vac. Sci. Technol. A 42, 013205 (2024)
Published: January 2024
Includes: Supplementary data
Journal Articles
J. Vac. Sci. Technol. A 42, 013402 (2024)
Published: December 2023
Journal Articles
Alexander S. Grenadyorov, Yuriy N. Yuriev, Аndrey А. Solovyev, Artem A. Runts, Konstantin V. Oskomov, Vyacheslav A. Semenov, Vladimir S. Sypchenko
J. Vac. Sci. Technol. A 42, 010402 (2024)
Published: December 2023
Includes: Supplementary data
Journal Articles
Cheng Liu, Nikhil Pokharel, Qinchen Lin, Miguel A. Betancourt Ponce, Jian Sun, Dominic Lane, Thomas J. De Prinse, Nelson Tansu, Padma Gopalan, Chirag Gupta, Shubhra S. Pasayat, Luke J. Mawst
J. Vac. Sci. Technol. A 41, 062705 (2023)
Published: November 2023
Journal Articles
Wil Gardner, David A. Winkler, David L. J. Alexander, Davide Ballabio, Benjamin W. Muir, Paul J. Pigram
J. Vac. Sci. Technol. A 41, 063204 (2023)
Published: September 2023
Includes: Supplementary data
Journal Articles
Lena Patterer, Sabrina Kollmann, Teresa de los Arcos, Leonie Jende, Soheil Karimi Aghda, Damian M. Holzapfel, Sameer A. Salman, Stanislav Mráz, Guido Grundmeier, Jochen M. Schneider
J. Vac. Sci. Technol. A 41, 053112 (2023)
Published: August 2023
Includes: Supplementary data
Journal Articles
Rahel Heesemann, Isa Bettermann, Roshan Paul, Milena Rey, Thomas Gries, Lilin Feng, Ulrich Schwaneberg, Claus Hummelsheim
J. Vac. Sci. Technol. A 41, 053110 (2023)
Published: August 2023
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