Skip Nav Destination
Update search
Filter
All
- All
- Title
- Author
- Author Affiliations
- Full Text
- Abstract
- Keyword
- DOI
- ISBN
- EISBN
- ISSN
- EISSN
- Issue
- Volume
- References
Filter
All
- All
- Title
- Author
- Author Affiliations
- Full Text
- Abstract
- Keyword
- DOI
- ISBN
- EISBN
- ISSN
- EISSN
- Issue
- Volume
- References
Filter
All
- All
- Title
- Author
- Author Affiliations
- Full Text
- Abstract
- Keyword
- DOI
- ISBN
- EISBN
- ISSN
- EISSN
- Issue
- Volume
- References
Filter
All
- All
- Title
- Author
- Author Affiliations
- Full Text
- Abstract
- Keyword
- DOI
- ISBN
- EISBN
- ISSN
- EISSN
- Issue
- Volume
- References
Filter
All
- All
- Title
- Author
- Author Affiliations
- Full Text
- Abstract
- Keyword
- DOI
- ISBN
- EISBN
- ISSN
- EISSN
- Issue
- Volume
- References
Filter
All
- All
- Title
- Author
- Author Affiliations
- Full Text
- Abstract
- Keyword
- DOI
- ISBN
- EISBN
- ISSN
- EISSN
- Issue
- Volume
- References
NARROW
Format
Collections
Topics
Subjects
Journal
Article Type
Issue Section
Date
Availability
Journal Articles
J. Vac. Sci. Technol. A 42, 042704 (2024)
Published: May 2024
Journal Articles
Yunfei Wang, Wei Liu, Yanqing Wu, Guohao Zhang, Bin Sun, Weihong Gao, Xinxin Feng, Haizhen Wang, Xiaoyang Yi, Xianglong Meng, Zhiyong Gao
J. Vac. Sci. Technol. A 42, 022704 (2024)
Published: February 2024
Journal Articles
J. Vac. Sci. Technol. A 41, 022403 (2023)
Published: February 2023
Includes: Supplementary data
Journal Articles
Kamesh Mullapudi, Konner E. K. Holden, Jessica L. Peterson, Charles L. Dezelah, Daniel F. Moser, Ravindra K. Kanjolia, Douglas J. Tweet, John F. Conley, Jr
J. Vac. Sci. Technol. A 41, 012406 (2023)
Published: December 2022
Includes: Supplementary data
Journal Articles
Cut-and-pasting ligands: The structure/function relationships of a thermally robust Mo(VI) precursor
J. Vac. Sci. Technol. A 41, 012403 (2023)
Published: December 2022
Includes: Supplementary data
Journal Articles
J. Vac. Sci. Technol. A 39, 022401 (2021)
Published: January 2021
Includes: Supplementary data
Journal Articles
J. Vac. Sci. Technol. A 38, 022412 (2020)
Published: February 2020
Journal Articles
J. Vac. Sci. Technol. A 35, 060604 (2017)
Published: September 2017
Journal Articles
J. Vac. Sci. Technol. A 34, 061101 (2016)
Published: October 2016
Journal Articles
J. Vac. Sci. Technol. A 34, 050602 (2016)
Published: July 2016
Includes: Supplementary data
Journal Articles
J. Vac. Sci. Technol. A 33, 061513 (2015)
Published: September 2015
Journal Articles
Helmut Riedl, Christian Martin Koller, Andreas Limbeck, Jiri Kalaš, Peter Polcik, Paul Heinz Mayrhofer
J. Vac. Sci. Technol. A 33, 05E129 (2015)
Published: August 2015
Journal Articles
Atsushi Maniwa, Hirokazu Chiba, Kazuhisa Kawano, Naoyuki Koiso, Hiroyuki Oike, Taishi Furukawa, Ken-ichi Tada
J. Vac. Sci. Technol. A 33, 01A133 (2015)
Published: December 2014
Journal Articles
J. Vac. Sci. Technol. A 32, 020601 (2014)
Published: November 2013
Journal Articles
J. Vac. Sci. Technol. A 30, 061506 (2012)
Published: October 2012
Journal Articles
Christian Tritremmel, Rostislav Daniel, Christian Mitterer, Paul H. Mayrhofer, Markus Lechthaler, Peter Polcik
J. Vac. Sci. Technol. A 30, 061501 (2012)
Published: August 2012
Journal Articles
J. Vac. Sci. Technol. A 28, 1145–1156 (2010)
Published: September 2010
Journal Articles
J. Vac. Sci. Technol. A 28, 407–410 (2010)
Published: March 2010
Journal Articles
J. Vac. Sci. Technol. A 25, 1402–1406 (2007)
Published: August 2007
Journal Articles
J. Vac. Sci. Technol. A 25, 1373–1380 (2007)
Published: July 2007
1