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Journal Articles

Improved optical efficiency of GaAs-based infrared vertical-cavity surface-emitting laser enabled by combining a metallic reflector and a Bragg reflector

In-Kyu Jang, Hyung-Joo Lee, Dae-Kwang Kim, Lee-Ku Kwac, Sung Woon Cho
Journal: Journal of Vacuum Science & Technology A
J. Vac. Sci. Technol. A 41, 063415 (2023)
https://doi.org/10.1116/6.0002975
Published: November 2023
View article titled, Improved optical efficiency of GaAs-based infrared vertical-cavity surface-emitting laser enabled by combining a metallic reflector and a Bragg reflector
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Journal Articles

Electrochromic properties of NiO films prepared by atomic layer deposition

Xi Su, Zexin Tu, Liwei Ji, Hao Wu, Hongxing Xu, Chang Liu
Journal: Journal of Vacuum Science & Technology A
J. Vac. Sci. Technol. A 41, 062407 (2023)
https://doi.org/10.1116/6.0003040
Published: October 2023
View article titled, Electrochromic properties of NiO films prepared by atomic layer deposition
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Journal Articles

Growth and optical properties of NiO thin films deposited by pulsed dc reactive magnetron sputtering

Faezeh A. F. Lahiji, Samiran Bairagi, Roger Magnusson, Mauricio A. Sortica, Daniel Primetzhofer, Erik Ekström, Biplab Paul, Arnaud le Febvrier, Per Eklund
Journal: Journal of Vacuum Science & Technology A
J. Vac. Sci. Technol. A 41, 063402 (2023)
https://doi.org/10.1116/6.0002914
Published: September 2023
View article titled, Growth and optical properties of NiO thin films deposited by pulsed dc reactive magnetron sputtering
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Includes: Supplementary data
Journal Articles

Full-angle high-reflection ultrathin composite film realizing high spatial resolution of scintillation crystal array

Jing Yang, Linwei Wang, Zhang Chen, Zhongjun Xue, Shuwen Zhao, Dongzhou Ding
Journal: Journal of Vacuum Science & Technology A
J. Vac. Sci. Technol. A 41, 063401 (2023)
https://doi.org/10.1116/6.0002875
Published: September 2023
View article titled, Full-angle high-reflection ultrathin composite film realizing high spatial resolution of scintillation crystal array
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Includes: Supplementary data
Journal Articles

Mechanical and optical properties of amorphous silicon nitride-based films prepared by electron cyclotron resonance plasma-enhanced chemical vapor deposition

Brahim Ahammou, Paramita Bhattacharyya, Christophe Levallois, Fahmida Azmi, Jean-Pierre Landesman, Peter Mascher
Journal: Journal of Vacuum Science & Technology A
J. Vac. Sci. Technol. A 41, 053113 (2023)
https://doi.org/10.1116/6.0002896
Published: August 2023
View article titled, Mechanical and optical properties of amorphous silicon nitride-based films prepared by electron cyclotron resonance plasma-enhanced chemical vapor deposition
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Journal Articles

Spatiotemporal evolution of excitation temperature of vacuum arcs by tomography

Bo Cao, Rui Li, Zhiyuan Cao, Haomin Li, Liqiong Sun, Yingsan Geng, Jianhua Wang, Zhenxing Wang
Journal: Journal of Vacuum Science & Technology A
J. Vac. Sci. Technol. A 41, 053006 (2023)
https://doi.org/10.1116/6.0002876
Published: August 2023
View article titled, Spatiotemporal evolution of excitation temperature of vacuum arcs by tomography
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Journal Articles

Plasmonic black coatings with broadband absorption for space applications

Hanjörg Wagner, Valentin Ripka, Andrea Dellith, Jan Dellith, Florian Wittkämper, Uwe Hübner, Mario Ziegler
Journal: Journal of Vacuum Science & Technology A
J. Vac. Sci. Technol. A 41, 053209 (2023)
https://doi.org/10.1116/6.0002821
Published: August 2023
View article titled, Plasmonic black coatings with broadband absorption for space applications
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Includes: Supplementary data
Journal Articles

Chemical conversion of MoS2 thin films deposited by atomic layer deposition (ALD) into molybdenum nitride monitored by in situ reflectance measurements

J. Patouillard, R. Gassilloud, F. Mercier, A. Mantoux, R. Boichot, A. Crisci, M. Bernard, N. Gauthier, S. Cadot, C. Raynaud, F. Gianesello, E. Blanquet
Journal: Journal of Vacuum Science & Technology A
J. Vac. Sci. Technol. A 41, 052201 (2023)
https://doi.org/10.1116/6.0002678
Published: July 2023
View article titled, Chemical conversion of MoS<sub>2</sub> thin films deposited by atomic layer deposition (ALD) into molybdenum nitride monitored by <em>in situ</em> reflectance measurements
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Includes: Supplementary data
Journal Articles

Enhanced structural and optical properties of semipolar ( 11 2 ¯ 2 ) AlGaN film with insertion of AlN/AlGaN superlattice

Xuguang Luo, Xiong Zhang, Ruiting Fang, Lin Chen, Shenyu Xu, Jia Cui, Zhiyi Lou, Yifeng Xu, Shuchang Wang, Guohua Hu
Journal: Journal of Vacuum Science & Technology A
J. Vac. Sci. Technol. A 41, 052705 (2023)
https://doi.org/10.1116/6.0002870
Published: July 2023
View article titled, Enhanced structural and optical properties of semipolar ( 11 2 ¯ 2 ) AlGaN film with insertion of AlN/AlGaN superlattice
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Journal Articles

Observable color change of Cu2O–Mo–Zr composite films based on rapid oxidation at room temperature and thin film interference behavior

Haoge Zhang, Pengyan Shi, Yuanjiang Lv, Haoliang Sun, Guangxin Wang
Journal: Journal of Vacuum Science & Technology A
J. Vac. Sci. Technol. A 41, 053408 (2023)
https://doi.org/10.1116/6.0002774
Published: July 2023
View article titled, Observable color change of Cu<sub>2</sub>O–Mo–Zr composite films based on rapid oxidation at room temperature and thin film interference behavior
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Includes: Supplementary data
Journal Articles

Study of the surface and interface properties of ultrathin nickel film on cerium layer by in situ magnetic sputtering

Tianzuo Fu, Yiqiang Zhong, Lihua Zhou, Shuwen Meng, Zhengang Tian, Yiwu Chen, Tianfu Li, Xiaoyu Zou, Zhengcao Li, Tinggui Yang
Journal: Journal of Vacuum Science & Technology A
J. Vac. Sci. Technol. A 41, 043212 (2023)
https://doi.org/10.1116/6.0002455
Published: July 2023
View article titled, Study of the surface and interface properties of ultrathin nickel film on cerium layer by <em>in situ</em> magnetic sputtering
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Journal Articles

Design and fabrication of color-generating nitride based thin-film optical filters for photovoltaic applications

Paramita Bhattacharyya, Brahim Ahammou, Fahmida Azmi, Rafael Kleiman, Peter Mascher
Journal: Journal of Vacuum Science & Technology A
J. Vac. Sci. Technol. A 41, 033409 (2023)
https://doi.org/10.1116/6.0002357
Published: May 2023
View article titled, Design and fabrication of color-generating nitride based thin-film optical filters for photovoltaic applications
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Journal Articles

Nanostructured MoS2 thin films: Effect of substrate temperature on microstructure, optical, and electrical properties

Onur Alev, Eda Goldenberg
Journal: Journal of Vacuum Science & Technology A
J. Vac. Sci. Technol. A 41, 033408 (2023)
https://doi.org/10.1116/6.0002627
Published: April 2023
View article titled, Nanostructured MoS<sub>2</sub> thin films: Effect of substrate temperature on microstructure, optical, and electrical properties
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Journal Articles

Optical studies of pure and (Cu, Co) doped nickel zinc ferrite films deposited on quartz substrate

Sneha Kothapally, Sushma Kotru, Roni Paul, Jaber A. Abu Qahouq
Journal: Journal of Vacuum Science & Technology A
J. Vac. Sci. Technol. A 41, 023404 (2023)
https://doi.org/10.1116/6.0002262
Published: February 2023
View article titled, Optical studies of pure and (Cu, Co) doped nickel zinc ferrite films deposited on quartz substrate
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Journal Articles

In situ spectroscopic ellipsometry and rigorous coupled wave analysis for real time profile evolution of atomic layer deposited films inside SiO2 nanotrenches

S. Novia Berriel, Corbin Feit, Nick Keller, Nicholas G. Rudawski, Parag Banerjee
Journal: Journal of Vacuum Science & Technology A
J. Vac. Sci. Technol. A 40, 062403 (2022)
https://doi.org/10.1116/6.0001937
Published: September 2022
View article titled, <em>In situ</em> spectroscopic ellipsometry and rigorous coupled wave analysis for real time profile evolution of atomic layer deposited films inside SiO<sub>2</sub> nanotrenches
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Includes: Supplementary data
Journal Articles

VO2 films on flexible thin polyimide films: Fabrication and characterization of electrical and optical properties in insulator-metal transition

Yuta Miyatake, Yukito Ozawa, Kunio Okimura, Toshihiro Nakanishi
Journal: Journal of Vacuum Science & Technology A
J. Vac. Sci. Technol. A 40, 043406 (2022)
https://doi.org/10.1116/6.0001808
Published: June 2022
View article titled, VO<sub>2</sub> films on flexible thin polyimide films: Fabrication and characterization of electrical and optical properties in insulator-metal transition
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Journal Articles

Two step synthesis of ultrathin transition metal tellurides

Michael Snure, Michael J. Motala, Timothy A. Prusnick, Evan M. Smith, David Moore, Christopher Muratore, Shivashankar R. Vangala, Nicholas R. Glavin
Journal: Journal of Vacuum Science & Technology A
J. Vac. Sci. Technol. A 40, 042202 (2022)
https://doi.org/10.1116/6.0001893
Published: June 2022
View article titled, Two step synthesis of ultrathin transition metal tellurides
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Journal Articles

Chirality in double photoemission from a Cu(100) surface

F. O. Schumann, G. Di Fillippo, Z. Wei, G. Stefani
Journal: Journal of Vacuum Science & Technology A
J. Vac. Sci. Technol. A 40, 043204 (2022)
https://doi.org/10.1116/6.0001875
Published: June 2022
View article titled, Chirality in double photoemission from a Cu(100) surface
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Journal Articles

Electrical properties of p-type Zn:Ga2O3 thin films

Ekaterine Chikoidze, Corinne Sartel, Hayate Yamano, Zeyu Chi, Guillaume Bouchez, François Jomard, Vincent Sallet, Gérard Guillot, Kamel Boukheddaden, Amador Pérez-Tomás, Tamar Tchelidze, Yves Dumont
Journal: Journal of Vacuum Science & Technology A
J. Vac. Sci. Technol. A 40, 043401 (2022)
https://doi.org/10.1116/6.0001766
Published: May 2022
View article titled, Electrical properties of <em>p</em>-type Zn:Ga<sub>2</sub>O<sub>3</sub> thin films
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Journal Articles

In situ monitoring atomic layer doping processes for Al-doped ZnO layers: Competitive nature of surface reactions between metal precursors

Adnan Mohammad, Saidjafarzoda Ilhom, Deepa Shukla, Necmi Biyikli
Journal: Journal of Vacuum Science & Technology A
J. Vac. Sci. Technol. A 40, 042401 (2022)
https://doi.org/10.1116/6.0001772
Published: May 2022
View article titled, <em>In situ</em> monitoring atomic layer doping processes for Al-doped ZnO layers: Competitive nature of surface reactions between metal precursors
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Includes: Supplementary data