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Journal Articles

Spatially differentiated crystalline inorganic coatings deposited by an atmospheric pressure dielectric barrier discharge with immobilized filaments

M. Brabant, A. Demaude, J. Zveny, A. Remy, T. Segato, D. Petitjean, M. P. Delplancke-Ogletree, F. Reniers

J. Vac. Sci. Technol. A 42, 023008 (2024)

https://doi.org/10.1116/6.0003268

Published: February 2024

View article titled, Spatially differentiated crystalline inorganic coatings deposited by an atmospheric pressure dielectric barrier discharge with immobilized filaments

Journal Articles

High power pulsed magnetron sputtering tailored low temperature CrAlN + MoWS coatings for dry tribological contacts

K. Bobzin, C. Kalscheuer, M. P. Möbius, C. Schulze, M. Miranda Marti

J. Vac. Sci. Technol. A 42, 013404 (2024)

https://doi.org/10.1116/6.0003259

Published: December 2023

View article titled, High power pulsed magnetron sputtering tailored low temperature CrAlN + MoWS coatings for dry tribological contacts

Journal Articles

Development of a process for flame retardant coating of textiles with bio-hybrid anchor peptides

Rahel Heesemann, Isa Bettermann, Roshan Paul, Milena Rey, Thomas Gries, Lilin Feng, Ulrich Schwaneberg, Claus Hummelsheim

J. Vac. Sci. Technol. A 41, 053110 (2023)

https://doi.org/10.1116/6.0002776

Published: August 2023

View article titled, Development of a process for flame retardant coating of textiles with bio-hybrid anchor peptides

Journal Articles

MBE growth of In_0.53Ga_0.47Sb on In_0.53Ga_0.47As/InP substrates using the interfacial misfit dislocation arrays

Fatih F. Ince, Mega Frost, Subhashree Seth, Darryl Shima, Thomas J. Rotter, Ganesh Balakrishnan

J. Vac. Sci. Technol. A 41, 052704 (2023)

https://doi.org/10.1116/6.0002681

Published: July 2023

View article titled, MBE growth of In0.53Ga0.47Sb on In0.53Ga0.47As/InP substrates using the interfacial misfit dislocation arrays

Journal Articles

Variation in thermal stability of Ge_1−xSn_x films for infrared device applications

Amanda N. Lemire, Kevin A. Grossklaus, Thomas E. Vandervelde

J. Vac. Sci. Technol. A 41, 052701 (2023)

https://doi.org/10.1116/6.0002680

Published: July 2023

View article titled, Variation in thermal stability of Ge1−xSnx films for infrared device applications

Includes: Supplementary data

Journal Articles

Why thermal laser epitaxy aluminum sources yield reproducible fluxes in oxidizing environments

Thomas J. Smart, Felix V. E. Hensling, Dong Yeong Kim, Lena N. Majer, Y. Eren Suyolcu, Dominik Dereh, Darrell G. Schlom, Debdeep Jena, Jochen Mannhart, Wolfgang Braun

J. Vac. Sci. Technol. A 41, 042701 (2023)

https://doi.org/10.1116/6.0002632

Published: May 2023

View article titled, Why thermal laser epitaxy aluminum sources yield reproducible fluxes in oxidizing environments

Journal Articles

Enhancement of discharge and mechanical properties of ta-C films by pulse-enhanced cathodic arc deposition

Benfu Wang, Xiubo Tian, Jian Hu, Chunzhi Gong, Xiangli Liu, Jin Li

J. Vac. Sci. Technol. A 41, 033003 (2023)

https://doi.org/10.1116/6.0002352

Published: March 2023

View article titled, Enhancement of discharge and mechanical properties of ta-C films by pulse-enhanced cathodic arc deposition

Journal Articles

Sympetalous defects in metalorganic vapor phase epitaxy (MOVPE)-grown homoepitaxial β-Ga₂O₃ films

Jacqueline Cooke, Praneeth Ranga, Arkka Bhattacharyya, Xueling Cheng, Yunshan Wang, Sriram Krishnamoorthy, Michael A. Scarpulla, Berardi Sensale-Rodriguez

J. Vac. Sci. Technol. A 41, 013406 (2023)

https://doi.org/10.1116/6.0002303

Published: December 2022

View article titled, Sympetalous defects in metalorganic vapor phase epitaxy (MOVPE)-grown homoepitaxial β-Ga2O3 films

Includes: Supplementary data

Journal Articles

Physicochemically reformed tin oxide film fabricated for self-alignment of liquid crystals

Dong Hyun Kim, Dong Wook Lee, Jin Young Oh, Jonghoon Won, Dae-Hyun Kim, Hae-Chang Jeong, Dae-Shik Seo

J. Vac. Sci. Technol. A 40, 063406 (2022)

https://doi.org/10.1116/6.0002072

Published: November 2022

View article titled, Physicochemically reformed tin oxide film fabricated for self-alignment of liquid crystals

Journal Articles

Tunable alignment of liquid crystals between anisotropic polyacrylamide thin layer

Dong-Wook Lee, Dong-Hyun Kim, Jin-Young Oh, Dae-Shik Seo

J. Vac. Sci. Technol. A 40, 023408 (2022)

https://doi.org/10.1116/6.0001695

Published: February 2022

View article titled, Tunable alignment of liquid crystals between anisotropic polyacrylamide thin layer

Journal Articles

Investigation on the influence of oxygen on the deformation and cracking behavior of (Cr,Al)ON hard coatings using combinatorial static and dynamic loadings

Tobias Brögelmann, Kirsten Bobzin, Nathan Christopher Kruppe, Mostafa Arghavani

J. Vac. Sci. Technol. A 37, 061509 (2019)

https://doi.org/10.1116/1.5124615

Published: October 2019

View article titled, Investigation on the influence of oxygen on the deformation and cracking behavior of (Cr,Al)ON hard coatings using combinatorial static and dynamic loadings

Journal Articles

Nano-optical imaging of monolayer MoSe₂-WSe₂ lateral heterostructure with subwavelength domains

Wenjin Xue, Prasana K. Sahoo, Jiru Liu, Haonan Zong, Xiaoyi Lai, Sharad Ambardar, Dmitri V. Voronine

J. Vac. Sci. Technol. A 36, 05G502 (2018)

https://doi.org/10.1116/1.5035437

Published: July 2018

View article titled, Nano-optical imaging of monolayer MoSe2-WSe2 lateral heterostructure with subwavelength domains

Journal Articles

Characterization of Al₂O₃ and ZnO multilayer thin films deposited by low temperature thermal atomic layer deposition on transparent polyimide

Seung Hak Song, Myoung Youb Lee, Gyeong Beom Lee, Byoung-Ho Choi

J. Vac. Sci. Technol. A 35, 01B110 (2017)

https://doi.org/10.1116/1.4967728

Published: November 2016

View article titled, Characterization of Al2O3 and ZnO multilayer thin films deposited by low temperature thermal atomic layer deposition on transparent polyimide

Journal Articles

Probabilistic distributions of pinhole defects in atomic layer deposited films on polymeric substrates

Alexander S. Yersak, Yung-Cheng Lee

J. Vac. Sci. Technol. A 34, 01A149 (2016)

https://doi.org/10.1116/1.4938496

Published: December 2015

View article titled, Probabilistic distributions of pinhole defects in atomic layer deposited films on polymeric substrates

Journal Articles

Growth of single and bilayer graphene by filtered cathodic vacuum arc technique

A. K. Kesarwani, O. S. Panwar, S. R. Dhakate, R. K. Rakshit, V. N. Singh, Atul Bisht, Ashish Kumar

J. Vac. Sci. Technol. A 34, 021504 (2016)

https://doi.org/10.1116/1.4936258

Published: November 2015

View article titled, Growth of single and bilayer graphene by filtered cathodic vacuum arc technique

Journal Articles

Self-aligned process for forming microlenses at the tips of vertical silicon nanowires by atomic layer deposition

Yaping Dan, Kaixiang Chen, Kenneth B. Crozier

J. Vac. Sci. Technol. A 33, 01A109 (2015)

https://doi.org/10.1116/1.4897221

Published: October 2014

View article titled, Self-aligned process for forming microlenses at the tips of vertical silicon nanowires by atomic layer deposition

Journal Articles

Deposition temperature dependence of material and Si surface passivation properties of O₃-based atomic layer deposited Al₂O₃-based films and stacks

Stefan Bordihn, Verena Mertens, Jörg W. Müller, W. M. M. (Erwin) Kessels

J. Vac. Sci. Technol. A 32, 01A128 (2014)

https://doi.org/10.1116/1.4852855

Published: December 2013

View article titled, Deposition temperature dependence of material and Si surface passivation properties of O3-based atomic layer deposited Al2O3-based films and stacks

Journal Articles

Enzyme adsorption on polymer-based confined bioinspired biosensing surface

Manuel L. B. Palacio, Bharat Bhushan

J. Vac. Sci. Technol. A 30, 050607 (2012)

https://doi.org/10.1116/1.4745852

Published: August 2012

View article titled, Enzyme adsorption on polymer-based confined bioinspired biosensing surface

Journal Articles

Substrate grain size and orientation of Cu and Cu–Ni foils used for the growth of graphene films

Zachary R. Robinson, Parul Tyagi, Thomas M. Murray, Carl A. Ventrice, Jr., Shanshan Chen, Andrew Munson, Carl W. Magnuson, Rodney S. Ruoff

J. Vac. Sci. Technol. A 30, 011401 (2012)

https://doi.org/10.1116/1.3663877

Published: December 2011

View article titled, Substrate grain size and orientation of Cu and Cu–Ni foils used for the growth of graphene films

Journal Articles

Surface texture and wetting stability of polydimethylsiloxane coated with aluminum oxide at low temperature by atomic layer deposition

Joseph C. Spagnola, Bo Gong, Gregory N. Parsons

J. Vac. Sci. Technol. A 28, 1330–1337 (2010)

https://doi.org/10.1116/1.3488604

Published: September 2010

View article titled, Surface texture and wetting stability of polydimethylsiloxane coated with aluminum oxide at low temperature by atomic layer deposition

NARROW

Topics

Spatially differentiated crystalline inorganic coatings deposited by an atmospheric pressure dielectric barrier discharge with immobilized filaments

High power pulsed magnetron sputtering tailored low temperature CrAlN + MoWS coatings for dry tribological contacts

Development of a process for flame retardant coating of textiles with bio-hybrid anchor peptides

MBE growth of In_0.53Ga_0.47Sb on In_0.53Ga_0.47As/InP substrates using the interfacial misfit dislocation arrays

Variation in thermal stability of Ge_1−xSn_x films for infrared device applications

Why thermal laser epitaxy aluminum sources yield reproducible fluxes in oxidizing environments

Enhancement of discharge and mechanical properties of ta-C films by pulse-enhanced cathodic arc deposition

Sympetalous defects in metalorganic vapor phase epitaxy (MOVPE)-grown homoepitaxial β-Ga₂O₃ films

Physicochemically reformed tin oxide film fabricated for self-alignment of liquid crystals

Tunable alignment of liquid crystals between anisotropic polyacrylamide thin layer

Investigation on the influence of oxygen on the deformation and cracking behavior of (Cr,Al)ON hard coatings using combinatorial static and dynamic loadings

Nano-optical imaging of monolayer MoSe₂-WSe₂ lateral heterostructure with subwavelength domains

Characterization of Al₂O₃ and ZnO multilayer thin films deposited by low temperature thermal atomic layer deposition on transparent polyimide

Probabilistic distributions of pinhole defects in atomic layer deposited films on polymeric substrates

Growth of single and bilayer graphene by filtered cathodic vacuum arc technique

Self-aligned process for forming microlenses at the tips of vertical silicon nanowires by atomic layer deposition

Deposition temperature dependence of material and Si surface passivation properties of O₃-based atomic layer deposited Al₂O₃-based films and stacks

Enzyme adsorption on polymer-based confined bioinspired biosensing surface

Substrate grain size and orientation of Cu and Cu–Ni foils used for the growth of graphene films

Surface texture and wetting stability of polydimethylsiloxane coated with aluminum oxide at low temperature by atomic layer deposition

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